Development of the carbon thin films nanostructured by femtosecond laser pulse with a super low friction coefficient and local conductivity

飞秒激光脉冲纳米结构碳薄膜的开发具有超低摩擦系数和局部导电性

• 批准号: 17360362
• 负责人: YASUMARU Naoki
• 金额: $ 7.62万
• 依托单位: Fukui National College of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2005
• 资助国家: 日本
• 起止时间: 2005 至 2007
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-17360362/
• 关键词: femtosecond laser; ablation; hard thin film; DLC; nanostructure; scanning probe microscope; tribology; トライボロジ-特性; トライポロジー特性

We report tribological properties of diamond-like carbon (DLC) film of which surface has been nanostructured with femtosecond (fs) laser pulses. A broad area on the DLC surface was nanostructured using a precise target-scan system developed for the fs-laser processing. In the present experiment we have developed two types of laser scan. One is a parallel scan to produce a uniformly nanostructured surface. The other is a crossed scan along a net-like pattern to form a partially nanostructured area on the surface. The results obtained are summarized as follows.1) The nanostructure has been formed uniformly on the DLC surface over the area of 15 x 15 mm^2.2) The structured surface at E=110μJ near the ablation threshold is uniformly modified to the GC layer.3) The friction coefficient of the structured DLC film has shown a small decrease for the steel ball but a small increase for the ceramic WC-Co ball.4) A large improvement of the friction coefficient of the DLC surface has been achieved by coating the MoS2 layer on the nanostructured DLC surface. The measured friction coefficients μ of the surface were 0.07 with the steel ball and 0.02-0.04 with the WC-Co ball.5) The net-like patterning of the ablated zone created by the crossed scan produces an effective method to increase maintaining the initial surface flatness.6) The nano-indentation test and nano-scratch test (100〜2000μN) indicate that the laser-treated surface layer modified to GC becomes soft and its friction coefficient increases as compared with that of the untreated DLC.

研究了飞秒激光对类金刚石薄膜表面进行纳米化处理后的摩擦学性能。一个广泛的区域上的DLC表面纳米结构使用精确的目标扫描系统开发的FS-激光加工。在本实验中，我们开发了两种类型的激光扫描。一种是平行扫描，以产生均匀的纳米结构表面。另一种是沿着网状图案交叉扫描，以在表面上形成部分纳米结构化区域。所得结果总结如下：1）在15 x 15 mm^2的面积上，纳米结构均匀地形成在DLC表面上。2）在接近烧蚀阈值的E=110μJ处，结构化表面被均匀地改性为GC层。3）结构化DLC膜的摩擦系数对于钢球显示出小的降低，而对于陶瓷WC-Co球显示出小的增加。4）通过在纳米结构DLC表面上涂覆MoS 2层，DLC表面的摩擦系数得到了很大的改善。实验结果表明，在不同的烧蚀条件下，表面的摩擦系数μ分别为0.07和0.02-0.04; 5）通过交叉扫描产生的烧蚀区的网状图案是一种有效的方法，可以提高保持初始表面平整度（100 μ N ~ 2000μN）的摩擦学试验表明，激光处理后的DLC膜表面改性为GC后，表面层变得柔软，摩擦系数比未处理的DLC膜增加。

项目成果

Surface Nanostructure and Modified Layer formed on Hard Thin Films with Femtosecond Laser Ablation

飞秒激光烧蚀在硬薄膜上形成表面纳米结构和改性层

• 发表时间: 2005
• 期刊: Expected Materials for the Future Vol.5
• 作者: K. Miyazaki;N. Yasumaru
• 通讯作者: N. Yasumaru

Microstructuring of Hard Thin Films with Femtosecond Laser Pulses

用飞秒激光脉冲对硬薄膜进行微结构化

• 发表时间: 2006
• 作者: N. Yasumaru;K. Miyazaki;J. Kiuchi and K. Komai
• 通讯作者: J. Kiuchi and K. Komai

フェムト秒レーザーによりナノ構造を加工されたDLC薄膜のトライボ甲ジー特性

飞秒激光纳米结构DLC薄膜的摩擦硬度特性

• 发表时间: 2008
• 期刊: 日本機械学会北陸信越学生会第37回学生員卒業研究発表講演会講演論文集
• 作者: J. -W. Lim;N.Yasumaru;山品 陽平;中長 貴志
• 通讯作者: 中長 貴志

Tribological Properties of the DLC film with femtosecond-laser-induced nanostructure

飞秒激光诱导纳米结构 DLC 薄膜的摩擦学性能

• 发表时间: 2007
• 期刊: Proceedings of 8th International Symposium on Laser Precision Microfabrication, LPM2007
• 作者: J. -W. Lim;N.Yasumaru;山品 陽平;中長 貴志;山品 陽平;N. Yasumaru
• 通讯作者: N. Yasumaru

薄膜表面のナノ加工と次世代表面設計技術

薄膜表面纳米加工及下一代表面设计技术

• 发表时间: 2006
• 作者: N. Yasumaru;K. Miyazaki;J. Kiuchi and K. Komai;駒井 謙治郎;N. Yasumaru;安丸 尚樹
• 通讯作者: 安丸 尚樹