Ultra-Precision Machining of Replicated Aspherical Optical Components

本研究的目的是建立下一代X射线望远镜的超精密非球面光学系统的制造技术，通过以下方法：制作超精密非球面芯轴，在芯轴上涂敷重金属涂层，在芯轴上压制或成型基片，从芯轴上移除基片，并制作复制的非球面光学系统。这项技术是计划于2010年发射到空间的掠入射X射线望远镜的关键制造技术。该技术也将成为生物技术和医学应用的X射线显微镜的基础制造技术。本公司与S。F.美国对美国和美国的恐惧。S. A.该装置还能检测出锋利透明的钻石边缘 ...更多信息 通过扫描光纤连接超稳半导体激光器、超快半导体传感器和压电加速器，该显微镜在分辨率上上级SEM和激光显微镜。X射线望远镜需要面形误差小于100 nm、表面粗糙度均方根值小于0.5nm的非球面光镜。化学镀镍是唯一一种可以进行金刚石车削和光学抛光的材料。对化学镀镍层进行金刚石车削，得到X射线望远镜反射镜芯轴代替玻璃芯轴，仅对材料进行金刚石车削加工，就得到了0.344nm rms的表面粗糙度.我们试图为下一代X射线望远镜制作具有Pt/C多层膜的复制X射线镜。我们可以从化学镀镍芯轴上去除厚的Pt或Au层，但是我们不能从化学镀镍芯轴上去除复制的Pt/C超级反射镜。这个问题必须在未来解决。少

The aim of this research is to establish the manufacturing technology of ultra-precision aspherical light optics for next-generation X-ray telescopes by the following methods ; making ultra-precision aspherical mandrels, putting heavy metal coating on mandrels, pressing or forming the substrates on the mandrels, removing the substrates from the mandrels and making replicated aspherical light optics. This technology is the key manufacturing technology of the grazing incident X-ray telescope that will be intended to launch in space in 2010. And this technology will be also the base manufacturing technology of X-ray microscopes for biotechnology and medical applications.The outlines of research results are as follows :1. We have developed a new scanning laser scattering microscope that can measure the nose radius of sharp diamond cutting tools in high precision in cooperation with Dr. S. F. Scares of US & A in U. S. A. The apparatus can detect the edge of sharp and transparent diamond too … More ls in tens of nm resolution by scanning optical fiber connected with ultra-stable semiconductor laser, ultra-fast semiconductor sensor and piezo accelerator. The microscope is superior in resolution to a SEM and laser microscope.2. The aspherical-shape light mirrors having less than 100nm in figure error and less than 0.5nm rms in surface roughness are needed in an X-ray telescope. Electroless nickel is the only one material that can be diamond-turned and also optically polished. The electroless nickel was diamond-turned for obtaining X-ray telescope mirror mandrels instead of glass mandrel, and the surface roughness of 0.344nm rms was obtained only by diamond-turning process on the material.3. We tried to make replicated X-ray mirrors having Pt/C multilayers for the next-generation X-ray telescope. We can remove thick Pt or Au layers from electroless nickel mandrel, however we could not remove replicated Pt/C super mirrors from the electroless nickel mandrel. This problem has to be solved in future. Less