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Super high aspect ratio micro fabrication and magnetic micro machine by using anodic oxidation alumina film

利用阳极氧化氧化铝薄膜进行超高深宽比微加工及磁性微机械

基本信息

批准号：
12450129
负责人：
YAMASAKI Jiro
金额：
$ 8.77万
依托单位：
Kyushu Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2001
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-12450129/
关键词：
anodic oxidation micro fabrication high aspect ratio magnetic micro machine magnetostrictive vibrfation micro-motor 磁歪

项目摘要

It is for a purpose of this study to establishment of super high aspect ratio micro fabrication of the magnetic material which utilized an anodic oxidation alumina film, realization of a magnetostriction vibration micro-motor of world minimum diameter, and the medical service application.An alumina film having micro hole is very solid. Because a mechanical stress is hardly produced even if thickness become large, very adequate mechanical characteristic is obtained as a thick-film resist material. A uniform alumina film of 300 micro meter thickness was obtained by a computer controlled temperature of bathing in it, composition, pH, and keeping the anode oxidation uniformity for a long time. We stripped off an alumina film on a barrier layered surface by generating hydrogen, and micro hole of aspect ratio 60 was utilized by circulating with etching liquid in the pore. The nano wire with small demagnetizing field was realized by plating into the micro hole.We observed a high aspect ratio amorphous wire of a diameter of 100 micro meter when the wire can be obtained magnetic elasticity resonance caused by magnetostriction. We realized high speed micro-motor of 3000 rpm caused by adopting the machine structure that did not disturb resonance vibration of a wire. Furthermore, high torque was realized by fabrication of slowdown mechanism. A horizontal-set micro-motor was also obtained a high-speed rotation, and the micro-motor can rotate in water. Application to a catheter and medical service micro pump are expected by using the micro-motor.

本研究的目的是建立利用阳极氧化氧化铝薄膜的超高纵横比磁性材料的微加工，实现世界上最小直径的磁致伸缩振动微型电机，并在医疗服务中应用。具有微孔的氧化铝膜是非常坚固的。由于即使厚度变大，也几乎不会产生机械应力，因此作为厚膜抗蚀剂材料，可以获得非常充分的机械特性。通过计算机控制浸浴温度、成分、pH值，长时间保持阳极氧化均匀性，得到了厚度为300微米的均匀氧化铝膜。我们利用氢气在屏障层状表面剥离氧化铝膜，并利用宽高比为60的微孔在孔内与蚀刻液循环。通过在微孔中电镀，实现了具有小退磁场的纳米线。我们观察到直径为100微米的高纵横比非晶态金属丝，当该金属丝可以获得磁致伸缩引起的磁弹性共振。采用不干扰导线共振振动的机器结构，实现了3000转/分的高速微电机。此外，通过制造减速机构实现了大扭矩。水平设置的微电机也获得了高速旋转，并且微电机可以在水中旋转。该微电机有望应用于导管和医疗服务微泵。