High output micromotor using amorphous nanowires and thin film magnets

使用非晶纳米线和薄膜磁体的高输出微电机

• 批准号: 07555103
• 负责人: YAMASAKI Jiro
• 金额: $ 4.8万
• 依托单位: Kyushu Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1996
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07555103/
• 关键词: micromotor; thin film magnet; magnetic nanowire; anodization; マイクロモーター

In general, out-put power of conventional electro-magnetic motors is proportional to volume of used magnetic materials. When the motor is miniaturized to the size down to a few mm square, its out-put power is around 10muN-m. To get larger out-put power, a new driving technique is needed to develope. In the present research program, an attempt was made to develope a high output acutuater by using magnetic nanowires and thin film magnets.(1) Magnetic nanowires with high aspect ratioSo far the magnetic nanowire has been fabricated by anodization technique for application to perpendicular recording media. But its length is limited less than a few microns, since acelectrodeposition has been used. In the present investigation, effort was made to apply dc eletrodeposition for fabrication of the nanowire with high aspect ratio more than a few thausands. By making holes in the insulating layr, so called barrier layr, and subsequent application of dc electrodeposition, we fabricated successfuly the nanowire 90 mum long. Its aspect ratio is more than 2000. The fabricated wire is flexible enough to be applied to actuater.(2) Thin film magnetsThin film magnet with high energy product was developed. To restrain the grain growth, layred structue with Nd-Dy-Fe-B and Fe thin film was fabricated by sputtering. It was found that addition of Dy element increases coercivety and cutts off the exchange interaction between both layrs. By this way, high coercivity was obtained with the layred thick film magnet.(3) ActuaterA new principle for micro-actuater was demonstrated using the magnetic nanowires and thin film magnet. The nanowires on the anodized Al substrate was biased in the transverse direction by the thin film magnet and magnetization of the wires was reversed by the longitudinal ac field. By this way, the nanowires can be vibrated in the transeverse direction.

通常，传统电磁电机的输出功率与所使用的磁性材料的体积成比例。当电机小型化到几平方毫米的尺寸时，其输出功率约为10 μ N-m。为了获得更大的输出功率，需要开发新的驱动技术。在本研究计画中，我们尝试利用磁性奈米线与薄膜磁铁来发展一种高输出的驱动器。(1)高长径比磁性纳米线目前，磁性纳米线的制备方法主要是阳极氧化法，用于垂直记录介质。但由于采用了电化学沉积，其长度被限制在几微米以内。在本研究中，我们尝试利用直流电沉积法来制备高长径比的奈米线。通过在绝缘层（即阻挡层）上打孔，并随后应用直流电沉积，我们成功地制备了90 μ m长的纳米线。它的长宽比超过2000。所制得的丝具有足够的柔韧性，可用于驱动器。(2)薄膜磁体开发了高磁能积的薄膜磁体。为了抑制晶粒长大，采用溅射法制备了Nd-Dy-Fe-B和Fe薄膜的层状结构。发现Dy元素的加入增加了膜层的亲水性，切断了膜层间的交换作用。通过这种方法，用层状厚膜磁体获得了高矫顽力。(3)提出了一种利用磁性纳米线和薄膜磁体实现微致动器的新原理。阳极氧化铝基板上的纳米线偏置在横向方向上的薄膜磁铁和磁化的线被逆转的纵向交流场。通过这种方式，纳米线可以在横向上振动。

项目成果

A.Tayaoka: "Fabrication of Co nanowires with high aspect ratio using anodization technique" Journal of Magnetism and Magnetic Materials. (in press). (1997)

A.Tayaoka：“利用阳极氧化技术制造高纵横比的 Co 纳米线”《磁性与磁性材料杂志》。