MICROMASHINING OF MAGNETIC FINE WIRES BY USE OF A1 ANODIZATION TECHNIQUE AND ITS APPLICATION TO MICRO-ACTUATOR

与使用静电力、压电功率和热膨胀的微致动器相比，使用静磁力的微致动器具有高输出和长位移的特点。为了制造电磁力驱动器，磁性材料必须具有高深宽比，这就需要高深宽比的微细加工技术。到目前为止，一种称为LIGA工艺的技术已被用于高深宽比的微加工。但这种技术使用的是同步加速器设备辐射的短波X射线。因此，它的产品价格昂贵。提出了一种简单易行的高深宽比磁性微机械加工方法，即利用阳极氧化铝膜进行高深宽比磁性微机械加工。然后，将所开发的技术应用于二维微输送器的制造。阳极氧化膜具有许多沿厚度方向延伸的细孔。这种结构各向异性引起化学蚀刻的各向异性。通过控制电化学条件，可获得300 μ m厚的阳极氧化膜。该厚膜用于制备具有30纵横比的10微米直径的磁性针。研制了一种能通过磁针运动实现几毫米见方重物输送的微驱动器。针是由交流磁场驱动的。实验证明，在X-Y外加磁场作用下，该输送机可以实现X-Y方向的重物输送。

Microactuators which use the magnetostatic force have characteristic features of high output and long displacement as compared to those using the electrostatic force, piezoelectric power and thermal expansion. To fabricate the actuator with the electromagnetic force, magnetic materias with high-aspect ratio, therefore, the high-aspect ratio maicromachining technique is needed. So far, a technique called LIGA process has been used for high-aspect ratio maicromachining. But this technique uses short wave X-ray radiated by synchrotron facilities. Consequently, its products cost expensive. So, the development of cheaper and simpler rechnique is needed for fabrication of magnetic maicromachine.A simple technique for high aspect-ratio maicromachining which utilizes an anodized aluminum film was developed. Then, the developed technique was applied for fabrication of two dimensional micro conveyer. The anodized film has lots of fine pores running in the thickness direction. This structural anisotropy gives rise to anisotropy for chemical etching. By controling the electrochemical condition, the anodized film as thick as 300 micron was available. This thick film was used to prepare magnetic 10 micron diameter needles with 30 aspect ratio. The maicroactuator which can convey a few mm square weight by movement of magnetic needle was fabricated. The needles was driven vy an ac magnetic field. It was confirmed that the conveyer can convey the weight in X-Y direction by using a X-Y applied fields.