HIGH ASPECT RATIO MICRO-MACHINING OF MAGNETIC MATERIALS AND MAGNETIC MICRO-PUMP FOR MEDICAL USE

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The aim of this research is to develop fundamental technologies which can be apply to fabricate magnetic micropump by MEMS(micro electro mechanical system)It is possible to drive the magnetic micro-machine through energy in space generated by magnetic fields without wires. This characteristic feature of the wireless driving make the magnetic micro-machine simple in structure because of lack of driving coils near moving structure. On the other hand, a human body does not respond to an applied field generated by conventional coils, since water has very small permeability(diamagnetism). So, it become possible to leave the magnetic micro-machine in a human body and drive it from outside by applied fields. Such medical application of micro-machine can be operated only by the magnetic driving. To achieve such magnetic micro-machine, effort was made to develop fundamental technologies listed below.1) Micro-machining of permanent magnets: To fabricate thin film magnets by mold-ejection method, micro-machining with high aspect ration of Si and A12O3 was done. By constructing the inductive coupling RIE machine operative at low temperature, micro-machining technology with aspect ratio around a few ten was developed.2)Thin film magnets with high energy products: To use for thin film magnets with mold-ejection method, efforts were made to develop anisotropic permanents magnets with rapid quenching and electro deposition. By control of quenching speed and residual stress, anisotropic ribbon magnets and electro -deposited magnets were developed.3) Micro-pump mechanism with high pumping pressure: For pumping sticky liquid in a human body, high pumping-pressure mechanism as well as simple structure are needed for the micro-pump. To achieve above purpose, several enlarged pump models were developed and tested by wireless driving.