HIGH ASPECT RATIO MICRO-MACHINING OF MAGNETIC MATERIALS AND MAGNETIC MICRO-PUMP FOR MEDICAL USE

磁性材料高深宽比微加工及医疗用磁性微型泵

• 批准号: 17360143
• 负责人: YAMASAKI Jiro
• 金额: $ 8.64万
• 依托单位: KYUSHU INSTITUTE OF TECHNOLOGY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2005
• 资助国家: 日本
• 起止时间: 2005 至 2006
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-17360143/
• 关键词: PARMANENT MAGNET; MICRO-MASHINING; MEMS; MAGNETIC MATERIALS; MICRO-PUMP; MICRO-ROBOT

The aim of this research is to develop fundamental technologies which can be apply to fabricate magnetic micropump by MEMS(micro electro mechanical system)It is possible to drive the magnetic micro-machine through energy in space generated by magnetic fields without wires. This characteristic feature of the wireless driving make the magnetic micro-machine simple in structure because of lack of driving coils near moving structure. On the other hand, a human body does not respond to an applied field generated by conventional coils, since water has very small permeability(diamagnetism). So, it become possible to leave the magnetic micro-machine in a human body and drive it from outside by applied fields. Such medical application of micro-machine can be operated only by the magnetic driving. To achieve such magnetic micro-machine, effort was made to develop fundamental technologies listed below.1) Micro-machining of permanent magnets: To fabricate thin film magnets by mold-ejection method, micro-machining with high aspect ration of Si and A12O3 was done. By constructing the inductive coupling RIE machine operative at low temperature, micro-machining technology with aspect ratio around a few ten was developed.2)Thin film magnets with high energy products: To use for thin film magnets with mold-ejection method, efforts were made to develop anisotropic permanents magnets with rapid quenching and electro deposition. By control of quenching speed and residual stress, anisotropic ribbon magnets and electro -deposited magnets were developed.3) Micro-pump mechanism with high pumping pressure: For pumping sticky liquid in a human body, high pumping-pressure mechanism as well as simple structure are needed for the micro-pump. To achieve above purpose, several enlarged pump models were developed and tested by wireless driving.

本课题的研究目的是为利用MEMS（micro electro mechanical system）技术制造磁性微泵提供基础技术。利用磁场在空间产生的能量驱动磁性微机械成为可能。这种无线驱动的特性使得磁微机械结构简单，因为在运动结构附近没有驱动线圈。另一方面，由于水具有非常小的渗透性（抗磁性），所以人体不响应于由常规线圈产生的外加场。因此，将磁性微机械留在人体内并通过外加磁场从外部驱动它成为可能。这种微机械的医疗应用只能通过磁驱动来操作。为了实现这种磁性微机械，努力开发以下列出的基础技术。1）永磁体的微加工：为了通过模具喷射方法制造薄膜磁体，进行了具有高纵横比的Si和Al 2 O 3的微加工。2）高磁能积薄膜磁体：为适用于模具顶出法薄膜磁体，开发了快淬电沉积各向异性永磁体。通过控制淬火速度和残余应力，研制了各向异性带状磁体和电沉积磁体。3）高泵压微型泵机构：为了泵送人体内的粘性液体，微型泵需要高泵压机构和简单的结构。为实现上述目的，研制了多台放大泵模型，并进行了无线驱动试验。

项目成果

Effect of Nd-Rich Phase on c-Axis orientation of Nd-Fe-B melt-Spun magnet and its domain structure

富Nd相对Nd-Fe-B熔纺磁体c轴取向及其磁畴结构的影响

• 发表时间: 2007
• 期刊: J. Magn. Mag. Mat. Vol.3(10)
• 作者: M.Takezawa;K.Aiba;H.Yasuda;Y.Morimoto;T.Hidaka;J.Yamasaki;H.Kato;M.Yagi
• 通讯作者: M.Yagi

Cylindrical micropump driven by external magnetic fields

由外部磁场驱动的圆柱形微型泵

• 发表时间: 2007
• 期刊: Int. J. Appl. Electromagntics and Mechanics Vol.23(In press)
• 作者: T.Honda;A.Yoshida;J.Yamasaki
• 通讯作者: J.Yamasaki

Effect of applied magnetic field on anodic oxidization of aluminum for high-aspect ratio microfabrication

外加磁场对高深宽比微加工铝阳极氧化的影响

• 发表时间: 2007
• 期刊: Sensor Latter Vol.5(1)
• 作者: M.Takezawa;T.Imagawa;J.Yamasaki;M.Yagi
• 通讯作者: M.Yagi

低温ECRによるSiマイクロマシニングと磁性体の微細構造加工

使用低温 ECR 进行磁性材料的硅微加工和微结构加工

• 发表时间: 2005
• 期刊: 電気学会マグネティックス研究会資料 MAG-05
• 作者: 大山賢司;竹澤昌晃;本田 崇;森本祐治;山崎 二郎
• 通讯作者: 山崎 二郎

Review of Fabrication and Characterization of Nd-Fe-B Thick Films for Magnetic Micromachine

磁微机械用Nd-Fe-B厚膜的制备与表征研究进展

• 发表时间: 2007
• 期刊: IEEE Trans., Magn. Vol.43(6)
• 作者: M.Nakano;F.Yamashita;T.Honda;J.Yamasaki;K.Ishiyama;J.Fiedler;T.Yanai;H.Fukunaga
• 通讯作者: H.Fukunaga