Development of Fabrication Technology of Ferrite Thin Materials for Microwave Magnetic Devices

微波磁器件用铁氧体薄材料制备技术的进展

• 批准号: 13450145
• 负责人: YAMAMOTO Setsuo
• 金额: $ 9.34万
• 依托单位: Yamaguchi University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2003
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-13450145/
• 关键词: ferrite; thin-film; Microwave; magnetic device; inductor; isolator; circulator; communication device

Use of bulk ferrite materials disturbs achievement of magnetic devices and mobile communication sets. The purpose of this research is to develop fabrication technology of ferrite thin-films at low temperature and to investigate the feasibility of application to small and low height magnetic devices. The following research results were obtained1. Using reactive sputtering utilizing electron-cyclotron-resonance microwave plasma, Ni-Zn ferrite thin-films with a coercivity as low as 11 Oe and high crystal orientation was successfully prepared at high deposition rate of 44 nm/min. Use of conic sputtering target instead of platelet target was effective to achieve this2. Extremely small size inductor using Ni-Zn ferrite thin-film was developed. 25 % increase in inductance and 15 % increase in Q-value as compared with inductor without magnetic core was obtained up to 1 GHz. The area of the inductor was 6×10^4μm^2 (250μm×240μm) which was about 50 % of the smallest inductor already developed by another researchers. Thus the effectiveness of use of ferrite thin-film as a magnetic core was proved3. Microstrip Y junction type isolator using ferrite thin-film with a novel structure was designed using high frequency FEM simulator. The height of this isolator was less than 1 mm. Ground plane underneath of the circle portion of the Y junction was located closed to the microstrip line to enhance circulation of microwave transmission. The isolator was fabricated in trial using micromachining technology. The isolator showed non-reciprocal transmission characteristics

块状铁氧体材料的使用妨碍了磁性器件和移动的通信装置的实现。本研究旨在发展低温下铁氧体薄膜的制造技术，并探讨其应用于小型低高度磁性元件的可行性。取得了以下研究成果1。采用电子回旋共振微波等离子体反应溅射技术，以44 nm/min的高沉积速率成功制备了具有低至11 Oe的结晶度和高取向度的Ni-Zn铁氧体薄膜。研制了镍锌铁氧体薄膜超小型电感器。与无磁芯电感器相比，在1GHz以下获得电感增加25%和Q值增加15%。电感器的面积为6×10^4μm^2（250μm×240μm），约为其他研究人员已经开发的最小电感器的50%。因此，证明了使用铁氧体薄膜作为磁芯的有效性。利用高频有限元仿真器设计了一种新型结构的铁氧体薄膜微带Y结型隔离器。该隔离器的高度小于1 mm，接地面位于Y结圆形部分下方靠近微带线的位置，以增强微波传输的循环性。该隔离器是使用微机械加工技术进行试验制造的。该隔离器具有非互易传输特性

项目成果

山本節夫: "平坦化したフェライト基板に作製した薄膜インダクタ"粉体および粉末冶金. Vol.48, No.2. 150-154 (2001)

Setsuo Yamamoto：“在扁平铁氧体基板上制造的薄膜电感器”《粉末与粉末冶金》第 48 卷，第 150-154 期（2001 年）。

山本節夫: "反応性ECRスパッタ法で作製したCo含有酸化鉄薄膜のプラズマ酸化処理効果"日本応用磁気学会誌. Vol.26,No.4. 263-268 (2002)

Setsuo Yamamoto：“等离子体氧化处理对反应性 ECR 溅射制备的含钴氧化铁薄膜的影响”，日本应用磁学学会杂志，第 26 卷，第 263-268 期（2002 年）。

Setsuo Yamamoto: "High-rate-deposition of Ni-Zn ferrite thin-films using ECR sputtering with conic target"Physica Status Solidi. (in press). (2004)

Setsuo Yamamoto：“使用 ECR 溅射和圆锥靶材高速沉积 Ni-Zn 铁氧体薄膜”Physica Status Solidi。

S.Yamamoto: "Thin-Film Inductor Mlcro-Formed on Smoothed Ferrite Substrate"Journal of the Japan Society of Powder and Powder Metallurgy. Vol.48, No.2. 150-154 (2001)

S.Yamamoto：“在平滑铁氧体基板上微成型的薄膜电感器”日本粉末和粉末冶金学会杂志。

S.Yamamoto: "Co-Containing Spine) Ferrite Thin-Film Perpendicular Magnetic Recording Media With Mn-Zn Ferrite Backlayer"IEICE TRANSACTIONS on Electronics. Vol.E86-C, No.9. 1835-1840 (2003)

S.Yamamoto：“含钴脊柱）铁氧体薄膜垂直磁记录介质与锰锌铁氧体背层”IEICE 电子交易。