Development of Corrosion Fatigue Testing Machine for Micro-Sized Specimens for Bio-MEMS

生物MEMS微型试件腐蚀疲劳试验机的研制

• 批准号: 13555186
• 负责人: TAKASHIMA Kazuki
• 金额: $ 8.77万
• 依托单位: TOKYO INSTITUTE OF TECHNOLOGY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-13555186/
• 关键词: Bio-Micromachine; MEMS; Micro-sized specimens; Corrosion fatigue; Fatigue life; Materials evaluation; Amorphous alloy; Austenitic stainless steel

MEMS (Micro electro mechanical systems) devices are expected to be used in human body as Bio-MEMS (diagnosis and treatment devices) and in corrosive environments as inspection devices. The size of components used in such MEMS devices are considered to be in the order of microns. This size is smaller than the grain diameter in conventional metals and alloys. Mechanical properties of such micro-sized materials are considered to be different from those of bulk materials. In addition, the effect of corrosion is considered to be more prominent, because the specific surface area of micro-sized specimens is larger compared with that of bulk specimens. Crevices, the size of which is also in the order of microns, may exist in MEMS devices and thus crevice corrosion is also important. Therefore, corrosion fatigue properties of micro-sized materials are extremely important to design MEMS devices and micro-machines used in corrosive environments. However, there have been few studies that investiga … More te corrosion fatigue properties of micro-sized materials. However, there are several difficulties in corrosion fatigue tests on micro-sized specimens. It is also necessary to clarify the problems for the method and to find their solutions. In this investigation, we have developed a fatigue testing machine for micro-sized specimens, and corrosion fatigue tests for micro-sized Ni-P amorphous alloy and 304 austenitic stainless steel specimens have been carried out in air and 0.9% NaCl solution to investigate the size effects on corrosion fatigue properties. Specimens of cantilever-beam-type with dimensions of 10 microns × 10 microns × 50 microns were prepared from a Ni-P amorphous alloy thin film and a 304 austenitic stainless steel thin sheet by focused ion beam machining. The fatigue life of the specimen tested in air was more than 100,000 cycles, while that tested in the corrosive environment was less than 10,000 cycles. Distinct environmental effects on fatigue properties were observed. Several problems and solutions for the testing method were also discussed. Less

MEMS（微机电系统）设备预计将作为生物MEMS（诊断和治疗设备）用于人体，并作为检查设备用于腐蚀环境。此类 MEMS 器件中使用的组件尺寸被认为是微米量级。该尺寸小于传统金属和合金的晶粒直径。这种微米级材料的机械性能被认为与块状材料不同。此外，腐蚀的影响被认为更为突出，因为微型试样的比表面积比大块试样的比表面积更大。 MEMS器件中可能存在尺寸也为微米量级的缝隙，因此缝隙腐蚀也很重要。因此，微米材料的腐蚀疲劳性能对于设计腐蚀环境中使用的MEMS器件和微型机械极为重要。然而，很少有研究调查微型材料的腐蚀疲劳性能。然而，微型试样的腐蚀疲劳试验存在一些困难。还需要明确该方法存在的问题并寻找解决方案。本研究开发了微型试件疲劳试验机，在空气和0.9% NaCl溶液中对微型Ni-P非晶合金和304奥氏体不锈钢试件进行了腐蚀疲劳试验，研究了尺寸对腐蚀疲劳性能的影响。采用聚焦离子束加工方法，采用Ni-P非晶合金薄膜和304奥氏体不锈钢薄板制备了尺寸为10微米×10微米×50微米的悬臂梁型试件。在空气中测试的试件疲劳寿命大于100,000次循环，而在腐蚀环境中测试的试件疲劳寿命小于10,000次。观察到环境对疲劳性能的明显影响。并对测试方法中存在的几个问题及解决方案进行了讨论。较少的

项目成果

Y.Mizutani, M.Shimojo, K.Takashima, Y.Higo: "Size Effect of Corrosion Fatigue Properties in Micro-Sized 304 Austenitic Stainles Steel Specimens"Proc. ICF 10 (CD-ROM). ICF1000186OR (2001)

Y.Mizutani、M.Shimojo、K.Takashima、Y.Higo：“微型 304 奥氏体不锈钢试样中腐蚀疲劳性能的尺寸效应”Proc。

H.Ogi, G.Shimoike, M.Hirao, K.Takashima, Y.Higo: "Anisotropic Elastic-Stiffness Coefficients of an Amorphous Ni-P Film"J. Appl. Phys.. 91・8. 4857-4862 (2002)

H.Ogi、G.Shimoike、M.Hirao、K.Takashima、Y.Higo：“非晶态 Ni-P 薄膜的各向异性弹性刚度系数” J. Appl. 91・8（2002 年） ）

高島和希, 肥後矢吉: "MEMS/NEMS材料における破壊と疲労特性評価"まてりあ. 41・10. 673-676 (2002)

Kazuki Takashima、Yayoshi Higo：“MEMS/NEMS 材料的断裂和疲劳特性的评估” Materia 41・10（2002 年）。

Y.Mizutani, Y.Higo, Y.Ichikawa, A.Morita, K.Takashima, Y.Higo: "Corrosion Fatigue Behavior of Micro-Sized Specimens"Materials Science for the 21st Century. B. 241-244 (2001)

Y.Mizutani、Y.Higo、Y.Ichikawa、A.Morita、K.Takashima、Y.Higo：“微型样品的腐蚀疲劳行为”21 世纪材料科学。

Y.Mizutani, Y.Higo, Y.Ichikawa, A.Morita, K.Takashima, Y.Higo: "Corrosion Fatigue Tests of Micro-Sized Specimens"MRS Symp. Proc.. 657. EE5.11.1-11.6 (2001)

Y.Mizutani、Y.Higo、Y.Ichikawa、A.Morita、K.Takashima、Y.Higo：“微型样品的腐蚀疲劳测试”MRS Symp。