Development of Corrosion Fatigue Testing Machine for Micro-Sized Specimens for Bio-MEMS

生物MEMS微型试件腐蚀疲劳试验机的研制

• 批准号: 13555186
• 负责人: TAKASHIMA Kazuki
• 金额: $ 8.77万
• 依托单位: TOKYO INSTITUTE OF TECHNOLOGY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-13555186/
• 关键词: Bio-Micromachine; MEMS; Micro-sized specimens; Corrosion fatigue; Fatigue life; Materials evaluation; Amorphous alloy; Austenitic stainless steel

MEMS (Micro electro mechanical systems) devices are expected to be used in human body as Bio-MEMS (diagnosis and treatment devices) and in corrosive environments as inspection devices. The size of components used in such MEMS devices are considered to be in the order of microns. This size is smaller than the grain diameter in conventional metals and alloys. Mechanical properties of such micro-sized materials are considered to be different from those of bulk materials. In addition, the effect of corrosion is considered to be more prominent, because the specific surface area of micro-sized specimens is larger compared with that of bulk specimens. Crevices, the size of which is also in the order of microns, may exist in MEMS devices and thus crevice corrosion is also important. Therefore, corrosion fatigue properties of micro-sized materials are extremely important to design MEMS devices and micro-machines used in corrosive environments. However, there have been few studies that investiga … More te corrosion fatigue properties of micro-sized materials. However, there are several difficulties in corrosion fatigue tests on micro-sized specimens. It is also necessary to clarify the problems for the method and to find their solutions. In this investigation, we have developed a fatigue testing machine for micro-sized specimens, and corrosion fatigue tests for micro-sized Ni-P amorphous alloy and 304 austenitic stainless steel specimens have been carried out in air and 0.9% NaCl solution to investigate the size effects on corrosion fatigue properties. Specimens of cantilever-beam-type with dimensions of 10 microns × 10 microns × 50 microns were prepared from a Ni-P amorphous alloy thin film and a 304 austenitic stainless steel thin sheet by focused ion beam machining. The fatigue life of the specimen tested in air was more than 100,000 cycles, while that tested in the corrosive environment was less than 10,000 cycles. Distinct environmental effects on fatigue properties were observed. Several problems and solutions for the testing method were also discussed. Less

预计MEMS（微电动机械系统）设备将在人体中用作生物MEM（诊断和治疗装置），以及在关键环境中作为检查装置。此类MEMS设备中使用的组件的大小被认为是微米的顺序。这种尺寸小于常规金属和合金中的晶粒直径。这种微型材料的机械性能被认为与散装材料不同。另外，腐蚀的作用被认为更为突出，因为与散装样品相比，微型标本的特定表面积大。缝隙（其大小也按微分顺序）可能存在于MEMS设备中，因此缝隙腐蚀也很重要。因此，微型材料的腐蚀疲劳性能对于设计MEMS设备和用于腐蚀性环境中的微型机器极为重要。但是，很少有研究的研究……更多的微型材料的腐蚀疲劳特性。但是，微型标本的腐蚀疲劳试验有几个困难。还必须阐明该方法的问题并找到其解决方案。在这项研究中，我们开发了用于微型标本的疲劳测试机，以及微型Ni-P无定形合金和304个奥斯丁尼智能钢样本的腐蚀疲劳测试，在空气中进行了0.9％的NACL溶液，以研究对腐蚀疲劳的尺寸效应。通过聚焦离子束机加工制备了悬臂梁型的标本，尺寸为10微米×10微米×50微米。在空气中测试的标本的疲劳寿命超过100,000个周期，而在腐蚀性环境中进行了测试的周期小于10,000个周期。观察到对疲劳特性的明显影响。还讨论了测试方法的几个问题和解决方案。较少的

项目成果

Y.Mizutani, M.Shimojo, K.Takashima, Y.Higo: "Size Effect of Corrosion Fatigue Properties in Micro-Sized 304 Austenitic Stainles Steel Specimens"Proc. ICF 10 (CD-ROM). ICF1000186OR (2001)

Y.Mizutani、M.Shimojo、K.Takashima、Y.Higo：“微型 304 奥氏体不锈钢试样中腐蚀疲劳性能的尺寸效应”Proc。

H.Ogi, G.Shimoike, M.Hirao, K.Takashima, Y.Higo: "Anisotropic Elastic-Stiffness Coefficients of an Amorphous Ni-P Film"J. Appl. Phys.. 91・8. 4857-4862 (2002)

H.Ogi、G.Shimoike、M.Hirao、K.Takashima、Y.Higo：“非晶态 Ni-P 薄膜的各向异性弹性刚度系数” J. Appl. 91・8（2002 年） ）

高島和希, 肥後矢吉: "MEMS/NEMS材料における破壊と疲労特性評価"まてりあ. 41・10. 673-676 (2002)

Kazuki Takashima、Yayoshi Higo：“MEMS/NEMS 材料的断裂和疲劳特性的评估” Materia 41・10（2002 年）。

Y.Mizutani, Y.Higo, Y.Ichikawa, A.Morita, K.Takashima, Y.Higo: "Corrosion Fatigue Tests of Micro-Sized Specimens"MRS Symp. Proc.. 657. EE5.11.1-11.6 (2001)

Y.Mizutani、Y.Higo、Y.Ichikawa、A.Morita、K.Takashima、Y.Higo：“微型样品的腐蚀疲劳测试”MRS Symp。

Y.Mizutani, Y.Higo, Y.Ichikawa, A.Morita, K.Takashima, Y.Higo: "Corrosion Fatigue Behavior of Micro-Sized Specimens"Materials Science for the 21st Century. B. 241-244 (2001)

Y.Mizutani、Y.Higo、Y.Ichikawa、A.Morita、K.Takashima、Y.Higo：“微型样品的腐蚀疲劳行为”21 世纪材料科学。