In-Situ Strengthening Method for Micro-Sized materials for MEMS devices by Nanocrystal Precipitation During Application of Stress

施加应力过程中纳米晶沉淀对MEMS器件微型材料的原位强化方法

基本信息

批准号：
13650754
负责人：
TAKASHIMA Kazuki
金额：
$ 2.3万
依托单位：
TOKYO INSTITUTE OF TECHNOLOGY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2001
资助国家：
日本
起止时间：
2001 至 2002
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-13650754/
关键词：
Nanocrystal MEMS Crystalline orientation Ni-P amorphous alloy Micro-sized specimen Smarts materials 平面歪

项目摘要

Microelectromechanical systems (MEMS) are under intensive development for utilization in many scientific and technological fields such as information and biomedical technologies. These MEMS devices are usually fabricated from a thin film deposited on a substrate by suitable surface micromachining techniques, and the micro-sized elements prepared from a thin film layer are used as mechanical components. The size of the components used in such devices is thus considered to be in the order of microns, and the mechanical properties of such micro-sized materials are considered to be different from those of bulk (ordinary sized) materials. The development of high performance materials for MEMS applications is thus necessary. It is rather difficult to apply conventional strengthening methods for micro-sized materials, as the size of MEMS devices are of the order of microns and controlling the mechanical properties based on micro-size structural modifications is no longer adequate. Therefore, strengthening based on nanostructural control would be one of the most promising methods for micro-sized materials and the development of strengthening methods by nanostructural control are required. In this investigation, precipitation of nanocrystals in a Ni-P amorphous alloy film during application of a stress field was investigated. Microsized cantilever-beam-type specimens were prepared from the film by focused-ion-beam machining and bending stress was applied to the specimen using a mechanical testing machine for microsized specimens. Transmission electron microscopy observation in the plane strain deformed region has revealed that the deformation induces the precipitation of nanocrystalline Ni particles, and a (III) plane of all crystalline particles is aligned parallel to the side surface of the specimen. The precipitation of nanocrystals is considered to be effective for in-situ strengthening of micro-sized amorphous alloy.

在许多科学和技术领域（例如信息和生物医学技术）中，微机电系统（MEMS）正在密集地利用中。这些MEMS设备通常是由通过合适的表面微加工技术沉积在基板上的薄膜制造的，从薄膜层制备的微型元件用作机械组件。因此，这种设备中使用的组件的大小被认为是微米的顺序，并且这种微型材料的机械性能被认为与散装（普通尺寸）材料的机械性能不同。因此，必须开发用于MEMS应用的高性能材料。对于微型材料，将常规的加强方法应用于相当困难，因为MEMS设备的尺寸是微米的顺序，并且基于微型结构修饰的机械性能不再足够。因此，基于纳米结构控制的增强将是微型材料的最有希望的方法之一，并且需要通过纳米结构控制来开发加强方法。在这项研究中，研究了在施用应力场期间Ni-P无定形膜中纳米晶体的沉淀。通过聚焦离子梁加工制备了微化的悬臂梁型样品，并使用机械测试机将微小化样本的机械测试机应用于样品上。平面应变变形区域中的透射电子显微镜观察结果表明，变形诱导纳米晶体Ni颗粒的沉淀，并且所有晶体颗粒的A（III）平面平行于样品的侧面平行。纳米晶体的沉淀可有效地在原位增强微型无定形合金。