High-accuracy Fabrication of Large Area Micro-Structured Metrology Surface by a Nano-Machining Probe with Surface Profile Measurement Function

利用具有表面轮廓测量功能的纳米加工探针高精度制造大面积微结构计量表面

• 批准号: 15360063
• 负责人: GAO Wei
• 金额: $ 8.58万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2003
• 资助国家: 日本
• 起止时间: 2003 至 2004
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-15360063/
• 关键词: Nanometrology; Nanofabrication; Micro-structured surface; Three-dimensional; measurement force; Stiffness; Force sensor; fast tool servo

A nanomachining instrument with nanometrology function for precision nanofabrication of large area micro-structured metrology surfaces. A single crystal diamond tool for diamond turning is mounted on one end of a hollow-type piezoelectric (PZT) ring actuator with a stroke of 10μm. The other end of the PZT is attached to a compact piezoelectric force sensor. The diamond tool is actuated by the PZT for nanomachining of micro-structures over a large area surface through employing the fast-tool-servo technique. The depth-of-cut, which is the displacement of the PZT actuator, is measured accurately by a capacitance-type displacement probe with a resolution of 1nm situated inside the PZT and used as the servo signal for the fast tool servo machining. The instrument is designed to be stiff enough for nanomachining on a diamond turning machine. The same instrument can also be used for nanometrology of the machined surface through utilizing the force sensor output. To measure the surface profil … More e, the diamond tool is scanned along the surface and the contact force is detected by the force sensor. During the scanning, the diamond tool is servo controlled by the PZT so that the tool tip is kept contact with the surface with a constant contact force based on the force sensor output. The displacement of the PZT, which corresponds to the profile height of the machined surface, can thus be obtained from the capacitance sensor inside the PZT. To reduce the contact force so that the surface will not be damaged in the measurement process, the diamond tool is oscillated with a small amplitude of 1nm and a certain frequency of 500 Hz to modulate the output of the force sensor into an AC signal for high sensitivity detection with a lock-in amplifier. Experimental results have shown that the machined surface can be measured with a small contact force on the order of 0.01 mN. The frequency bandwidths in the thrust direction and the cutting direction have been evaluated to be 2.5 kHz and 1 kHz, respectively. A large area sinusoidal metrology surface with amplitude of 15 nm and wavelength of 100 μm has successfully been fabricated on a optical glass plate. Less

一种具有纳米测量功能的纳米加工仪器，用于大面积微结构测量表面的精密纳米加工。将用于金刚石车削的单晶金刚石刀具安装在行程为10μm的中空压电环驱动器的一端，另一端连接紧凑型压电力传感器。该工具由PZT驱动，通过快速工具伺服技术在大面积表面上实现微结构的纳米加工。利用位于PZT内部1 nm分辨率的电容式位移探头，作为快速刀具伺服加工的伺服信号，精确测量了PZT驱动器的切深。该仪器设计得足够坚硬，可以在钻石车床上进行纳米加工。通过利用力传感器的输出，同样的仪器也可以用于加工表面的纳米测量。测量曲面纵断面…的步骤更重要的是，钻石工具沿表面扫描，力传感器检测接触力。在扫描过程中，金刚石工具由PZT进行伺服控制，从而使刀尖根据力传感器输出的恒定接触力与表面保持接触。因此，可以从PZT内部的电容传感器获得PZT的位移，该位移对应于被加工表面的轮廓高度。为了减少接触力，使测量过程中不会损坏表面，金刚石工具以1 nm的小振幅和一定的500赫兹频率振荡，将力传感器的输出调制为交流信号，通过锁定放大器进行高灵敏度检测。实验结果表明，可用0.01mN量级的小接触力测量已加工表面。推力方向和切割方向的频带宽度分别为2.5 kHz和1 kHz。在光学玻璃板上成功地制作了振幅为15 nm、波长为100μm的大面积正弦计量表面。较少

项目成果

高 偉, 工藤康人, 清野 慧, Jhon A Patten: "形状測定機能をもつナノ加工プローブの研究(切削方向における周波数特性の向上)"日本機械学会東北支部講演会講演論文集. (掲載予定). (2004)

Wei Gau、Yasuto Kudo、Kei Kiyono、Jhon A Patten：“具有形状测量功能的纳米制造探针的研究（切削方向频率特性的改善）”日本机械工程学会东北分会讲座论文集（待出版）。 (2004)

Development of a nanomachining probe with nanometrology function -On-machine nanometrology experiment by the probe -

具有纳米计量功能的纳米加工探针的研制-通过探针进行机上纳米计量实验-

• 发表时间: 2005
• 期刊: Proceedings of the JSPE Spring Meeting(in Japanese)
• 作者: Wei Gao;Yasuto Kud;Satoshi Kiyono
• 通讯作者: Satoshi Kiyono

形状測定機能を持つナノ加工プローブの研究-加工プローブにおける加工評価実験-

具有形状测量功能的纳米探针研究-加工探针的加工评价实验-

• 发表时间: 2004
• 期刊: 日本機械学会年次大会講演論文集
• 作者: 高 偉;工藤 康人;清野 慧
• 通讯作者: 清野 慧

Design of a nanomachining probe with nanometrology function

具有纳米计量功能的纳米加工探针的设计

• 发表时间: 2004
• 期刊: Proceedings First International Symposium on Standard Materials And Metrology for Nanotechnology
• 作者: Wei Gao;Yasuto Kudo;Satoshi Kiyono;John A Patten
• 通讯作者: John A Patten

Development of a nanomachining probe with nanometrology function -Nanomachining experiment by the probe -

具有纳米计量功能的纳米加工探针的开发 -利用探针进行纳米加工实验 -

• 发表时间: 2004
• 期刊: Proceedings of the JSME Annual Meeting(in Japanese)
• 作者: Wei Gao;Yasuto Kud;Satoshi Kiyono
• 通讯作者: Satoshi Kiyono