High-accuracy Fabrication of Large Area Micro-Structured Metrology Surface by a Nano-Machining Probe with Surface Profile Measurement Function

具有纳米计量功能的纳米加工仪，用于大面积微结构计量表面的精密纳米加工。将单晶金刚石刀具安装在行程为10μm的空心压电环形驱动器的一端。PZT的另一端连接到紧凑型压电力传感器。该金刚石工具由压电陶瓷驱动，通过采用快速工具伺服技术在大面积表面上进行微结构的纳米加工。切削深度，这是PZT驱动器的位移，精确测量的电容式位移探头与分辨率为1nm的PZT内，并作为伺服信号的快速刀具伺服加工。该仪器被设计为足够坚硬，可以在金刚石车削机上进行纳米加工。通过利用力传感器输出，同一仪器也可用于加工表面的纳米测量。测量曲面轮廓的步骤 关于我们 e.金刚石工具沿表面沿着扫描，接触力由力传感器检测。在扫描期间，金刚石工具由PZT伺服控制，使得工具尖端基于力传感器输出以恒定的接触力与表面保持接触。因此，可以从PZT内部的电容传感器获得PZT的位移，该位移对应于加工表面的轮廓高度。为了减小接触力，使表面在测量过程中不会被损坏，金刚石工具以1nm的小振幅和500 Hz的一定频率振荡，以将力传感器的输出调制成交流信号，用于锁定放大器的高灵敏度检测。实验结果表明，加工表面可以用0.01 mN量级的小接触力进行测量。推力方向和切削方向上的频率带宽已被评估为分别为2.5 kHz和1 kHz。在光学玻璃板上成功地制作了振幅为15 nm、波长为100 μm的大面积正弦计量面。少

A nanomachining instrument with nanometrology function for precision nanofabrication of large area micro-structured metrology surfaces. A single crystal diamond tool for diamond turning is mounted on one end of a hollow-type piezoelectric (PZT) ring actuator with a stroke of 10μm. The other end of the PZT is attached to a compact piezoelectric force sensor. The diamond tool is actuated by the PZT for nanomachining of micro-structures over a large area surface through employing the fast-tool-servo technique. The depth-of-cut, which is the displacement of the PZT actuator, is measured accurately by a capacitance-type displacement probe with a resolution of 1nm situated inside the PZT and used as the servo signal for the fast tool servo machining. The instrument is designed to be stiff enough for nanomachining on a diamond turning machine. The same instrument can also be used for nanometrology of the machined surface through utilizing the force sensor output. To measure the surface profil … More e, the diamond tool is scanned along the surface and the contact force is detected by the force sensor. During the scanning, the diamond tool is servo controlled by the PZT so that the tool tip is kept contact with the surface with a constant contact force based on the force sensor output. The displacement of the PZT, which corresponds to the profile height of the machined surface, can thus be obtained from the capacitance sensor inside the PZT. To reduce the contact force so that the surface will not be damaged in the measurement process, the diamond tool is oscillated with a small amplitude of 1nm and a certain frequency of 500 Hz to modulate the output of the force sensor into an AC signal for high sensitivity detection with a lock-in amplifier. Experimental results have shown that the machined surface can be measured with a small contact force on the order of 0.01 mN. The frequency bandwidths in the thrust direction and the cutting direction have been evaluated to be 2.5 kHz and 1 kHz, respectively. A large area sinusoidal metrology surface with amplitude of 15 nm and wavelength of 100 μm has successfully been fabricated on a optical glass plate. Less