XYZ three-axis surface encoder with a single measurement point based on interference of diffraction beams

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A new type of XYZ three-axis surface encoder has been developed for measurement and control of next-generation XYZ three-axis stages. In the surface encoder, a single laser beam is projected onto a micro-structured surface grating. A compact sensor head, which can be mounted on the stage, has been designed and constructed. It has been verified that the surface encoder has the ability to measure the three-axis XYZ displacements with a resolution of 0. 1 nm over a measurement area of 100mm(X)x 100mm(Y)x 1mm(Z)by using the information from the single measurement point.