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STUDY OF A LITHOGRAPHY TECHNIQUE WITH LOW COST BY NANO-HEAT SPOT

低成本纳米热斑光刻技术的研究

基本信息

批准号：
15360396
负责人：
KUWAHARA Masashi
金额：
$ 7.62万
依托单位：
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2004
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-15360396/
关键词：
Optical disks Mastering Thermal lithography Super resolution readout Carbon nano tube AFM Mutual diffusion リソグラフィー回折限界ガウス分布 TeFeCo 熱利用ナノスケール加工超高密光ディスク熱リソグラフィ光ディスク原盤 ZnS-SiO_2 TbFeCo

项目摘要

In this project, we focused on the phenomenon of nano-scale heating. The development of a fabrication technique (referred to here as thermal lithography) and the elucidation of the super-resolution readout mechanism were carried out. Light intensity inside a focused laser spot has a Gaussian profile and the temperature distribution induced by it has also a similar profile. Therefore, a high temperature area with sub-wavelength dimensions can be generated in the center of the focused laser spot. Physical or chemical reactions induced by heating can be confined inside this region. This phenomenon is useful for fabricating nano-scale structures and is integrally related to the super-resolution readout mechanism. We succeeded in producing minute dots 50 nm in diameter and with a spacing of 50 nm using a sample consisting of TbFeCo and ZnS-SiO_2. These dimensions and spacing were approximately one sixth of the optical diffraction limit. Additionally, advanced carbon nano tube(CNT) probes were developed for the observation of the fabricated structures in detail. The adoption of a base probe with a blunt apex and setting the CNT length to approximately 200 nm lead to better durability and lower noise in comparison with conventional CNT probes. The mechanism of super-resolution readout was believed to be related to the optical near-field or surface plasmons, however, it is clear from this study that nano-scale heating plays an important role in the mechanism, and the role of the each layer within the device structure was clarified. These results lead to a breakthrough in the development of super-resolution optical disks. In the future, application of thermal lithography to semiconductor fabrication as well as further clarifying the super-resolution readout mechanism and developing a temperature measurement system will be carried out.

在这个项目中，我们专注于纳米尺度的加热现象。开发了一种制造技术（这里称为热光刻），并对超分辨率读出机制进行了阐述。激光聚焦光斑内部的光强具有高斯分布，其引起的温度分布也具有相似的高斯分布。因此，在聚焦的激光光斑中心可以产生亚波长尺寸的高温区域。由加热引起的物理或化学反应可以限制在这个区域内。这一现象对纳米级结构的制造是有用的，并且与超分辨率读出机制有关。我们成功地用TbFeCo和ZnS-SiO_2组成的样品制备了直径为50 nm、间距为50 nm的微点。这些尺寸和间距大约是光学衍射极限的六分之一。此外，还开发了先进的碳纳米管（CNT）探针，用于对制备的结构进行详细观察。与传统的碳纳米管探针相比，采用钝尖的基础探针并将碳纳米管长度设置为约200nm，具有更好的耐用性和更低的噪音。超分辨率读出的机制被认为与光学近场或表面等离子体激元有关，然而，从本研究中可以清楚地看出，纳米尺度的加热在该机制中起着重要作用，并明确了器件结构中各层的作用。这些结果导致了超分辨率光盘发展的突破。在未来，热光刻技术在半导体制造中的应用，以及超分辨率读出机制的进一步阐明和温度测量系统的开发将会进行。