Development of magnetic probe microscope for nano manipulator

微/纳米尺度的操作技术已经发展为微机械、电子和生物材料等微小物体的精确定位。特别是，非侵入性的机械手是理想的，因为这些技术使我们能够操纵微物体而不会损坏。在这项研究中，我们开发了一种新的机械手技术，使用磁探针，使用局部磁场定位的微磁性物体在非接触条件。该机械手采用具有极尖边缘的软磁丝（φ0.1mm）作为微电磁探针。该探针可以通过缠绕在探针周围的微螺线管线圈进行电磁化，以便在探针边缘处产生局部磁场。使用局部场，包含软铁磁材料的微米级物体可以被选择性地捕获并定位在衬底上的任何点处。还可以通过从基板的反面定位探针来实现薄基板上的微物体的非接触捕获。这种微操作技术具有操作简单、成本低、操作方便等特点。特别地，还可以实现无热损伤的微物体的非侵入性捕获，与基于光镊的公知捕获技术相比，这在生物领域中具有很强的优势。

Micro / nanometer scale manipulation techniques have been developed for precision positioning of micro objects such as micro-machines, electronics and biomaterials. In particular, noninvasive manipulators are desired because those techniques allow us to manipulate micro objects without damaging.In this research, we developed novel manipulator technique using a magnetic probe which use localized magnetic field for positioning of micro-magnetic objects in non-contact condition. In this manipulator, soft-ferromagnetic wire (φ0.1mm) that has very sharpened edge is employed as micro-electromagnetic probe. The probe can be electro-magnetized by a micro-solenoid coil winded around the wire probe in order to generate localized magnetic field at the probe edge. Using the localized field, micrometer-scale objects containing soft-ferromagnetic material can be selectively trapped and positioned at any points on substrates. It is also possible to realize non-contact trapping of the micro objects on thin substrates by positioning the probe from the reverse side of the substrate. This micro-manipulation technique possesses some desirable features such as simple, low cost and easy operation. In particular, it is also possible to realize non-invasive trapping of micro objects without heating damage, which is strong advantage in the biological fields in comparison with well-known trapping techniques based on optical tweezers.