Development of an integrated model of the hybrid pumping plasma light source based on laser assisted discharge

研究了激光-等离子体混合泵浦等离子体光源的建模方法。在等离子体原子过程模拟方面，建立了一个能准确计算等离子体能级布居数、发射率和不透明度并能再现发射光谱的模型。计算出的等离子体辐射压力对密度的非单调行为表明等离子体是不稳定的。该模型还被应用于评估Tb等离子体在未来EUV应用中的发射特性。在等离子体辐射流体力学建模方面，讨论了计算时空结构形成的建模方法的重要性。代替现有的MHD和其他流体和颗粒方法，发现使用渗流模型可以再现放电的初始结构。

Modeling methods of laser-plasma hybrid pumping plasma light sources are investigated. On the modeling of plasma atomic processes, a model, which calculates level population, emissivity and opacity of the plasma with a reasonable accuracy and is capable of reproducing emission spectrum, is developed. Calculated dependence of the plasma radiation pressure, which shows non-monotonic behavior with respect to density, suggests instability of the plasmas. The model is also applied to evaluate the emission characteristics of Tb plasma for future EUV applications. On the modeling of plasma radiation hydrodynamics, importance of modeling methods, which can calculate the temporal and spatial structure formation, is discussed. Instead of existing MHD and other fluid and particle approach, it is found that using the percolation model, the initial structure of the discharge can be reproduced.