Development of an integrated model of the hybrid pumping plasma light source based on laser assisted discharge

基于激光辅助放电的混合泵浦等离子体光源集成模型的研制

• 批准号: 20340166
• 负责人: SASAKI Akira
• 金额: $ 10.9万
• 依托单位: Japan Atomic Energy Agency
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2008
• 资助国家: 日本
• 起止时间: 2008 至 2010
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-20340166/
• 关键词: プラズマ制御・レーザー; プラズマ光源; シミュレーション; EUV光源; 原子過程; 放電; レーザープラズマ; パーコレーション

Modeling methods of laser-plasma hybrid pumping plasma light sources are investigated. On the modeling of plasma atomic processes, a model, which calculates level population, emissivity and opacity of the plasma with a reasonable accuracy and is capable of reproducing emission spectrum, is developed. Calculated dependence of the plasma radiation pressure, which shows non-monotonic behavior with respect to density, suggests instability of the plasmas. The model is also applied to evaluate the emission characteristics of Tb plasma for future EUV applications. On the modeling of plasma radiation hydrodynamics, importance of modeling methods, which can calculate the temporal and spatial structure formation, is discussed. Instead of existing MHD and other fluid and particle approach, it is found that using the percolation model, the initial structure of the discharge can be reproduced.

研究了激光-等离子体混合泵浦等离子体光源的建模方法。在等离子体原子过程建模的基础上，建立了一个能较好地计算等离子体能级居数、发射率和不透明度的模型，并能再现等离子体的发射光谱。计算出的等离子体辐射压力对密度的依赖性显示出非单调性，表明等离子体的不稳定性。该模型还用于评估Tb等离子体的发射特性，为未来的EUV应用提供参考。在等离子体辐射流体动力学建模方面，讨论了能够计算时空结构形成的建模方法的重要性。替代现有的MHD和其他流体和颗粒方法，发现使用渗流模型可以再现放电的初始结构。

项目成果

Proceedings"Atomic processes in the LPP and LA-DPP EUV sources"

论文集“LPP 和 LA-DPP EUV 源中的原子过程”

• 发表时间: 2009
• 作者: A. Sasaki;K. Nishihara;A. Sunahara;H. Furukawa;T. Nishikawa;F. Koike
• 通讯作者: F. Koike

Atomic processes in the LPP and LA-DPP EUV sources

LPP 和 LA-DPP EUV 光源中的原子过程

• 发表时间: 2009
• 期刊: Procedings. SPIE, Alternative Lithographic Technologies 7271
• 作者: A.Sasaki;K.Nishihara;A.Sunahara;H.Furukawa;T.Nishikawa;F.Koike
• 通讯作者: F.Koike

Detailed atomic modeling of Sn plasmas for the EUV source

• DOI: 10.1088/1742-6596/112/4/042062
• 发表时间: 2008-05
• 期刊: Optics letters
• 影响因子: 3.6
• 作者: A. Sasaki;A. Sunahara;K. Nishihawra;T. Nishikawa;F. Koike;H. Tanuma

Development of the theoretical model of the plasma EUV source

等离子体EUV光源理论模型的开发

• 发表时间: 2008
• 作者: A. Sasaki;K. Nishihara;A. Sunahara;H. Furukawa;K. Nishikawa;F. Koike
• 通讯作者: F. Koike

Percolation simulation of laser guided electrical discharge

激光引导放电的渗流模拟

• 发表时间: 2010
• 期刊: Phys. Rev. Lett.
• 作者: A. Sasaki;Y. Kishimoto;E. Takahashi;S. Kato;T. Fujii;and S. Kanazawa
• 通讯作者: and S. Kanazawa