Development of an integrated model of the hybrid pumping plasma light source based on laser assisted discharge

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Modeling methods of laser-plasma hybrid pumping plasma light sources are investigated. On the modeling of plasma atomic processes, a model, which calculates level population, emissivity and opacity of the plasma with a reasonable accuracy and is capable of reproducing emission spectrum, is developed. Calculated dependence of the plasma radiation pressure, which shows non-monotonic behavior with respect to density, suggests instability of the plasmas. The model is also applied to evaluate the emission characteristics of Tb plasma for future EUV applications. On the modeling of plasma radiation hydrodynamics, importance of modeling methods, which can calculate the temporal and spatial structure formation, is discussed. Instead of existing MHD and other fluid and particle approach, it is found that using the percolation model, the initial structure of the discharge can be reproduced.