Analysis and control of the fluids, interfaces of liquid-liquid and liquid-solid in microchannels

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Nano/micro flow systems open up the new possibilities for chemical and biochemical analysis and synthesis. For the design of nano/micro flow systems LSI designing concepts is applicable considering the symmetries between the electric devices and the flow devices. Nano/micro flow devices and elements which have micro meter scale sizes and nano liter volumes developed so far are described. Microvalves of negligible leakage and dead volumes were developed for chemical/biochemical applications. Micro mixers and sample injectors were obtained by using microfluidic behaviors in micro scale channels. In channel micro filters and electrochemical biosensors were fabricated using high aspect ratio UV photolithographic technologies. 3D metal electrodes implanted PDMS microflow cell was fabricated using 3D assembly method. Biological cell observation micro cell integrated on chip microvalve for regent injection was fabricated on Si substrate using deep RIE. Biomolecules sorting microsystems were. also realized using sol-gel transfer of hydrogels.