Analyses of spatiotemporal dynamic behavior of microplasmas based on three-dimensional diagnostics

基于三维诊断的微等离子体时空动态行为分析

基本信息

  • 批准号:
    15075206
  • 负责人:
  • 金额:
    $ 77.18万
  • 依托单位:
  • 依托单位国家:
    日本
  • 项目类别:
    Grant-in-Aid for Scientific Research on Priority Areas
  • 财政年份:
    2003
  • 资助国家:
    日本
  • 起止时间:
    2003 至 2007
  • 项目状态:
    已结题

项目摘要

The major roll of our group in the whole project was to develop diagnostic methods in the gas phase for plasma parameters and active species in various types of microplasmas with sufficient spatiotemporal resolutions. As the targets, firstly, we selected a single discharge cell of a plasma display panel (PDP) and performed a three-dimensional measurement of excited atoms in the unit cell by using a specially designed structure combined with a diode-laser absorption spectroscopy technique. We applied also a similar method to the diagnostics in an array of microplasmas for a large area atmospheric pressure plasma source. For the electron density n_e, we developed a diagnostic method using microwaves in the frequency range of 10 to 100 GHz, and obtained average values of n_e in space for planar microplasma arrays with a good temporal resolution. As a complementary method, we constructed a heterodyne interferometer using a CO_2 laser of 10.6 μm wavelength. It has a spatial resolution better than 0.1 mm although the temporal resolution is instrumentally limited up to a few tens of microseconds. We also developed also a THz time-domain spectroscopy (TDS) method for the simultaneous measurement of n_e and the collision frequency v_e through the effective complex dielectric function of microplasma arrays.On the other hand, we directed our objective toward the creation of new functions with microplasmas utilizing their inherent properties. As such examples, we developed several types of plasma photonic crystals for controlling microwaves of mm to sub-mm ranges. Another direction is the generation of microplasmas in heterogeneous media such as microdischarge in bubbles under water. We tested a fabric electrode structure immersed in water to generate bubbles on the surface by electrolysis, and ignited discharge in those bubbles containing H_2 or O_2.
在整个项目中,我们小组的主要工作是开发气相诊断方法,用于各种类型微等离子体的等离子体参数和活性物质,并具有足够的时空分辨率。作为研究对象,我们首先选择了等离子体显示面板(PDP)的单个放电单元,采用特殊设计的结构结合二极管激光吸收光谱技术对单元内的激发原子进行了三维测量。我们还将类似的方法应用于大面积大气压等离子体源的微等离子体阵列的诊断。对于电子密度n_e,我们开发了一种利用频率在10 ~ 100 GHz范围内的微波进行诊断的方法,得到了平面微等离子体阵列的电子密度n_e在空间上的平均值,具有较好的时间分辨率。作为补充,我们利用波长10.6 μm的CO_2激光器构建了外差干涉仪。它的空间分辨率优于0.1毫米,尽管时间分辨率被仪器限制在几十微秒内。我们还开发了一种太赫兹时域光谱(TDS)方法,通过微等离子体阵列的有效复介电函数同时测量n_e和碰撞频率v_e。另一方面,我们的目标是利用微等离子体的固有特性创造新的功能。作为这样的例子,我们开发了几种类型的等离子体光子晶体,用于控制毫米到亚毫米范围的微波。另一个方向是在非均匀介质中产生微等离子体,如水下气泡微放电。我们将织物电极结构浸入水中,通过电解在表面产生气泡,并对含有H_2或O_2的气泡进行点火放电。

项目成果

期刊论文数量(226)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
Characteristics of Ne-Xe microplasma in unit discharge cell of plasma display panel equipped with counter sustain electrodes and auxiliary electrodes
配备反维持电极和辅助电极的等离子体显示面板单元放电单元中Ne-Xe微等离子体的特性
  • DOI:
  • 发表时间:
    2005
  • 期刊:
  • 影响因子:
    0
  • 作者:
    NAKAMUR;A;Takashi;T.IAMI;K. Tachibana
  • 通讯作者:
    K. Tachibana
Production efficiencies of Kr^*(1s_5, 1s_4) atoms leading to vacuum-ultraviolet emission in ac plasma display panels with Kr-Ne binary mixtures measured by laser-absorption spectroscopy
通过激光吸收光谱测量 Kr^*(1s_5, 1s_4) 原子在交流等离子体显示面板中导致真空紫外发射的 Kr-Ne 二元混合物的生产效率
  • DOI:
  • 发表时间:
    2005
  • 期刊:
  • 影响因子:
    0
  • 作者:
    Takashi Imai;Yuichi Harano;Masahiro Kinoshita;Andriy Kovalenko;and Fumio Hirata;A. Yamatake;仲谷 博安;J. -S. Oh
  • 通讯作者:
    J. -S. Oh
Diagnostics of three dimensional behaviors of sustain discharge in an AC-PDP with auxiliary pulses
使用辅助脉冲诊断 AC-PDP 中维持放电的三维行为
  • DOI:
  • 发表时间:
    2003
  • 期刊:
  • 影响因子:
    0
  • 作者:
    K.Miyauchi;S.Miyazaki;K.Sakai;S.Kawata Q.Kong;A.A.Andreev;T.Kikuchi;S. Ishii;Y. Shintani
  • 通讯作者:
    Y. Shintani
Verification of a plasma photonic crystal for microwaves of milimeter wavelength range using two-dimensional array of columnar
使用二维柱状阵列验证毫米波长范围微波的等离子体光子晶体
Spatiotemporal behavior of excited Xe*(1s4,1s5) and Kr*(1s5) atoms measured by laser-absorption spectroscopy in unit cell of a plasma display panel with Xe–Kr–Ne ternary gas mixture
通过激光吸收光谱测量 Xe-Kr-Ne 三元气体混合物等离子显示面板晶胞中激发的 Xe*(​​1s4,1s5) 和 Kr*(1s5) 原子的时空行为
  • DOI:
    10.1063/1.2786609
  • 发表时间:
    2007
  • 期刊:
  • 影响因子:
    3.2
  • 作者:
    Jun‐Seok Oh;K. Tachibana
  • 通讯作者:
    K. Tachibana
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TACHIBANA Kunihide其他文献

TACHIBANA Kunihide的其他文献

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{{ truncateString('TACHIBANA Kunihide', 18)}}的其他基金

Development of High Performance Gene Transfection Methods Using Microplasma Integrated Devices
使用微等离子体集成装置开发高性能基因转染方法
  • 批准号:
    22654070
  • 财政年份:
    2010
  • 资助金额:
    $ 77.18万
  • 项目类别:
    Grant-in-Aid for Challenging Exploratory Research
A study on Discharge Plasma Phenomena in Heterogeneous Media Under Controlled Conditions
受控条件下异质介质中放电等离子体现象的研究
  • 批准号:
    20340162
  • 财政年份:
    2008
  • 资助金额:
    $ 77.18万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Generation methods for high pressure plasmas to be operated in wide parameter ranges and their applications.
在宽参数范围内运行的高压等离子体的产生方法及其应用。
  • 批准号:
    15340198
  • 财政年份:
    2003
  • 资助金额:
    $ 77.18万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Generation of micro-scale reactive plasmas and development of their new applications
微尺度反应等离子体的产生及其新应用的开发
  • 批准号:
    15075101
  • 财政年份:
    2003
  • 资助金额:
    $ 77.18万
  • 项目类别:
    Grant-in-Aid for Scientific Research on Priority Areas
Diagnostics of Gas-Phase and Surface Reactions of Atomic Radicals in Processing Plasmas by Vacuum Ultraviolet Laser Spectroscopy
真空紫外激光光谱诊断等离子体处理中原子自由基的气相和表面反应
  • 批准号:
    13480126
  • 财政年份:
    2001
  • 资助金额:
    $ 77.18万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Process Diagnostics in High-Aspect-Ratio Patterns by Microscopic Interferometry
通过显微干涉测量法对高纵横比图案进行过程诊断
  • 批准号:
    10555022
  • 财政年份:
    1998
  • 资助金额:
    $ 77.18万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Generation of a Large Diameter and High Density Processing Plasma
产生大直径和高密度处理等离子体
  • 批准号:
    08405006
  • 财政年份:
    1996
  • 资助金额:
    $ 77.18万
  • 项目类别:
    Grant-in-Aid for Scientific Research (A)
Development of a Synthesis Method for Tailored-Particles using the Coulomb Crystal Formation Process in Reactive Plasmas
利用反应等离子体中的库仑晶体形成过程开发定制颗粒的合成方法
  • 批准号:
    07558065
  • 财政年份:
    1995
  • 资助金额:
    $ 77.18万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Analysis of Interfacial Phenomena between Plasmas and Solid Surfaces with Microstructure
等离子体与固体表面界面现象的微观结构分析
  • 批准号:
    06452422
  • 财政年份:
    1994
  • 资助金额:
    $ 77.18万
  • 项目类别:
    Grant-in-Aid for General Scientific Research (B)
INTERACTION OF FREE-RADICALS WITH SOLID SURFACES AS STUDIED BY FLUORESCENCE-IMAGING METHOD WITH CROSSED BEAMS
交叉光束荧光成像法研究自由基与固体表面的相互作用
  • 批准号:
    03452079
  • 财政年份:
    1991
  • 资助金额:
    $ 77.18万
  • 项目类别:
    Grant-in-Aid for General Scientific Research (B)
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