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EVALUATION OF SCALE-UP CHARACTERISTICS AND DEVELOPMENT OF SIMULATOR FOR MANUFACTURE OF FUNCTIONAL FINE PARTICLES BY GAS - PHASE METHOD

EVALUATION OF SCALE-UP CHARACTERISTICS AND DEVELOPMENT OF SIMULATOR FOR MANUFACTURE OF FUNCTIONAL FINE PARTICLES BY GAS - PHASE METHOD
气相法制造功能细粒的放大特性评价及模拟器的开发
批准号:
09555231
负责人:
OKUYAMA Kikuo
金额:
$7.17万
依托单位:
依托单位国家:
日本
项目类别:
Grant-in-Aid for Scientific Research (B)
财政年份:
1997
资助国家:
日本
项目状态:
已结题
起止时间:
1997 至 1999

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中文摘要
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英文摘要
In the experimental portion of this study,1. A reactor equipped with wall temperature controllers for preparation of fine particles was manufactured, and the temperature distribution at the wall and inside of the reactor were measured. Analysis of the gas velocity and temperature distributions in the reactor by numerical simulation showed that these distributions governing particle formation in the reactor could be evaluated theoretically.2. A device for generating titanium alkoxide vapor or titanium tetrachloride vapor was also manufactured, to perform experiments of manufacturing titania fine particles by feeding either of the vapors into the reactor with carrier gas using the device. The state of agglomeration, and the size distributions of agglomerates and primary particles were determined by aerosol measurement techniques and electron microscopy. The complicated changes of the characteristics of manufactured particles with reaction temperature, flow rate of the carrier gas and two … More different vapors were clarified experimentally.In the theoretical portion, a dynamic equation to model the particle manufacturing processes was derived in which formation of supersaturated atmosphere of reaction products, coagulational particle growth from monomers via clusters to particles, morphology change of agglomerated particles by sintering and growth of primary particles and transport of particles in a nonisothermal flow field, were taken into account. Here, a new model called the 2-dimensional discrete-sectional model was constructed to predict the early stage of particle formation processes more accurately by describing the simultaneous change in size and morphology of agglomerated particles using the surface area and volume of the particles. The chemical reaction rates of the vapors used were evaluated from the experimental results to incorporate the reaction rates in the model. Numerical simulation for the particle manufacturing processes based on the model gave good prediction for size and morphology of particles manufactured under various conditions. Consequently, it was made clear that the simulation technique proposed in the present study could give useful guidelines to design and scale-up of particle manufacturing reactors. Less
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Okuyama,K.: "Performance Evaluation of Cluster-DMA with Integrated Electrometer and Its Application to Ion Mobility Measurements"J.Aerosol Res.Jpn. 13(2). 83-93 (1998)
Okuyama,K.:“使用集成静电计进行 Cluster-DMA 的性能评估及其在离子淌度测量中的应用”J.Aerosol Res.Jpn。
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藤本敏行: "TEOS/O_3-APCVD薄膜製造プロセスにおける蒸気とクラスター/微粒子の同時沈着の評価と制御"化学工学シンポジウムシリーズ. 67. 31-39 (1999)
Toshiyuki Fujimoto:“TEOS/O_3-APCVD 薄膜制造过程中蒸气和团簇/颗粒共沉积的评估和控制”化学工程研讨会系列 67. 31-39 (1999)。
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Fujimoto, T.: "Evaluation and Control of Co - deposition o f Vapor and Cluster/particle in TEOS/OィイD23ィエD2-APCVD Thin Film Preparation Process."Kagaku Kogaku Symposium Series. 67. 31-39 (1999)
Fujimoto, T.:“TEOS/O-D23-APCVD 薄膜制备过程中蒸气和团簇/颗粒共沉积的评估和控制”Kagaku Kogaku 研讨会系列 67. 31-39 (1999)。
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