Flatness Change of Vacuum Chuck Surface for Ultra-Precision Turning by Elastic and Thermal Deformations

弹性和热变形超精密车削真空吸盘表面平面度变化

• 批准号: 63550101
• 负责人: YOKOYAMA Kazuhiro
• 金额: $ 1.28万
• 依托单位: Niigata University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1988
• 资助国家: 日本
• 起止时间: 1988 至 1989
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-63550101/
• 关键词: Ultra-precision lathe; Spindle; Vacuum chuck; Temperature increase; Flatness; Thermal deformation; Elastic deformation; Imbalance; 空気静圧式主軸; 遠心力; 直流制動; 油静圧式主軸; チャック面; 温度分布

Temperature increase and flatness change of vacuum chuck surface on ultra-precision lathe with hydrostatic oil spindle are analyzed. 1.The surface shows nearly uniform temperature increase (max.7.5ﾟC, at 3000rpm) due to the heat generated by the spindle rotation. 2.Increase in the centrifugal force causes a concave deformation of the surface. (0.265mu m, at 3000 rpm) 3.Probe traversing method is proposed to analyze the flatness change precisely. Thermal deformation due to the spindle rotation changes the surface to a convex profile. Flatness change of the surface is max. 1.9 mu m (at 2000 rpm) - 2.8 mu m (at 3000rpm) . 4.Considering uniform temperature distribution the convex deformation is caused by the structure that the chuck is fastened at the outer portion with steel bolts of which thermal expansion coefficient is less than that of aluminum chuck.And characteristics of hydrostatic air spindle are analyzed. 5.Static imbalance in appearance is caused when the spindle is stopped by braking with direct current. Statical balancing procedure under this state decreases the rotational accuracy of spindle at high speed operation. This imbalance disappears by free-run stopping of spindle. 6.Maximum static friction moment of the spindle is nearly 30mm*2gf. 7.Amount of the spindle shrink caused by centrifugal force is 3.0mu m (at 7000rpm, 695 mm total length) . 8.Amount of the spindle expansion caused by centrifugal force is 0.3mu m (at 7000rpm, 60mm diameter).

分析了采用静压油主轴的超精密车床真空吸盘表面的温升和平面度变化。1.由于主轴旋转产生的热量，表面显示出几乎均匀的温度升高（最大7.5 ° C，3000 rpm）。2.离心力的增加导致表面的凹陷变形。（0.265 μ m，3000 rpm）3.提出了用探针横移法精确分析板形变化的方法。由于主轴旋转引起的热变形将表面改变为凸形轮廓。表面平整度变化最大。1.9μ m（2000 rpm）- 2.8 μ m（3000 rpm）。4.考虑到温度分布的均匀性，采用热膨胀系数小于铝卡盘的钢螺栓将卡盘固定在外部的结构，导致了卡盘的外凸变形，并对静压空气主轴的特性进行了分析。5.外观上的静态不平衡是在主轴用直流电制动停止时引起的。在这种状态下的静平衡过程降低了高速运行时主轴的旋转精度。这种不平衡通过主轴的自由运行停止而消失。6.主轴最大静摩擦力矩接近30 mm *2gf。7.由离心力引起的主轴收缩量为3.0 μ m（在7000 rpm时，总长度为695 mm）。8.由离心力引起的主轴膨胀量为0.3 μ m（在7000 rpm，直径60 mm时）。

项目成果

Kazuhiro Yokoyama: "Flatness Change of Vacuum Chuck Surface by Elastic and Thermal Deformations" Journal of the Japan Society of Precision Engineering, contributed.

Kazuhiro Yokoyama：“弹性和热变形引起的真空吸盘表面的平面度变化”，日本精密工程学会杂志，撰稿。

横山和宏: "超精密度旋削におけるチャック面の変形(第1報 遠心力による弾性変形)" 1989年度北陸信越支部=信越地方(長岡)講演会概要集. 1989. (63-64)

横山一宏：“超精密车削中的卡盘表面变形（第1部分：离心力引起的弹性变形）”1989年北陆信越分部=信越地区（长冈）讲座摘要集1989年。（63-64）

横山和宏: "真空チャック面の弾性変形・熱変形による平面度変化" 精密工学会誌.

横山一宏：“真空吸盘表面的弹性变形和热变形引起的平面度变化”，日本精密工程学会杂志。

Kazuhiro Yokoyama: "Deformation of Chuck Surface in Ultra-Precision Turning (2nd Report Thermal Deformation by Heat generated at Main Spindle)" Preprint of the Japan Society of Precision Engineering in Autumn Conference, 1989, P63-64.

Kazuhiro Yokoyama：“超精密车削中卡盘表面的变形（主轴产生的热量引起的热变形第二报告）”日本精密工程学会秋季会议预印本，1989年，P63-64。

横山和宏: "超精密度旋削におけるチャック面の変形(第2報 主軸部発熱による変形)" 1989年度精密工学会秋季大会学術講演会論文集. 1989. (63-64)

Kazuhiro Yokoyama：“超精密车削中卡盘表面的变形（第2次报告：主轴发热引起的变形）”1989年日本精密工程学会秋季学术会议论文集1989。（63-64）。