Simulation and Control of Deformations for Next Generation of Ultra Precision Machine Tools

点击翻译按钮获取中文摘要

The present co-operative research deals with simulation and control of deformations of ultra precision machine tools aiming at developing technological bases for the next generation of ultra precision machine tools. The results are summarized as follows ;1. Development of a simulation system to estimate deformations of ultra precision machine toolsA simulation system was developed based on the FEM (Finite Element Method) in order to analyze thermal deformations of ultra precision machine tools. the simulation system can estimate the thermal deformations due to disturbance of the environmental temperature and the heat generated in the ultra precision machining process.2. Effect of disturbance in machining environment on ultra precision machining processExperimental and theoretical analysis of the ultra precision machining process was carried out to clarify the effects of the disturbance in the machining environment on the machining accuracy. In particular, the machining errors due to the heat generated in the machining process was discussed based on the thermal deformations of the cutting tools and the work pieces.3. Effect of environmental disturbance on ultra precision machine toolsThe thermal deformations of the ultra precision machine tools and the ultra precision spindles ware analyzed applying both the experimental methods and the FEM in order to clarify the effects of the thermal disturbance in the environments surrounding the machine tools.4. Control of deformations of ultra precision machine toolsControl methods were discussed aiming at establishing effective control method to compensate the deformations of the ultra precision machine tools. A feed back control system was proposed to realize an ultra precision feed mechanism with use of an optical linear scale.