Trial Manufacture of Ultra-precision Positioning Apparatus with High Speed Using Plastic

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An ultra-precision positioning apparatus with high speed and high accuracy is trially designed and manufactured, aiming at the use for semi-conductor lithography and ultra-precision machine tool.(1)To obtain high speed,a plastic BT resin is used to make a table lighter and to absorb the vibration, and an Anti Residual Vibration(ARV)system which absorb the inertia force caused by the table acceleration and deceleration is applied on the experimental apparatus to prevent the residual vibration.(2)To obtain high accuracy,control method is improved ; after a proportional gain is changed to a higher one during course positioning, the integral control is applied for fine positioning.As a result,(1)20 -60 ms shorter settling t+me can be obtained when using the ARV system for 1.5- 4.5 kg table mass.(2)The positioning accuracy of dispersion error 0 nm and deviation error 3.2 nm can be obtained with the settling time of 251 ms.