Trial Manufacture of Ultra-precision Positioning Apparatus with High Speed Using Plastic

塑料高速超精密定位装置的试制

• 批准号: 02555048
• 负责人: OTSUKA Jiro
• 金额: $ 8.32万
• 依托单位: tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1990
• 资助国家: 日本
• 起止时间: 1990 至 1991
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-02555048/
• 关键词: Ultra-precision Positioning; Plastic; Speedy Positioning; Nanometer; Feedback Control

An ultra-precision positioning apparatus with high speed and high accuracy is trially designed and manufactured, aiming at the use for semi-conductor lithography and ultra-precision machine tool.(1)To obtain high speed,a plastic BT resin is used to make a table lighter and to absorb the vibration, and an Anti Residual Vibration(ARV)system which absorb the inertia force caused by the table acceleration and deceleration is applied on the experimental apparatus to prevent the residual vibration.(2)To obtain high accuracy,control method is improved ; after a proportional gain is changed to a higher one during course positioning, the integral control is applied for fine positioning.As a result,(1)20 -60 ms shorter settling t+me can be obtained when using the ARV system for 1.5- 4.5 kg table mass.(2)The positioning accuracy of dispersion error 0 nm and deviation error 3.2 nm can be obtained with the settling time of 251 ms.

针对半导体光刻机和超精密机床的应用，试制了一种高速高精度超精密定位装置。(1)To为了获得高速度，使用塑料BT树脂使工作台更轻并吸收振动，并且在实验装置上应用抗残余振动（ARV）系统来吸收由工作台加速和减速引起的惯性力以防止残余振动。(2)To为了提高定位精度，改进了控制方法，在航向定位时将比例增益调高后，采用积分控制进行精定位，结果表明：（1）当转台质量为1.5 ~ 4.5kg时，ARV系统的稳定时间t+me缩短了20 ~ 60 ms。（2）在251 ms的建立时间下，可以获得色散误差为0 nm，偏移误差为3.2 nm的定位精度。

项目成果

大塚 二郎: "摩擦駆動による精密位置決め" 学術月報. 44. 69- (1991)

大冢次郎：《摩擦驱动的精密定位》学术月报44。69-（1991）。

Shigeo Fukada and Jiro Otsuka: "Ultra-Precision Positioning Using Screw Drive" Proc.Sino-Japan Conference on Ultra-Precision Machining. 10. 1-6 (1990)

Shigeo Fukada 和 Jiro Otsuka：“使用丝杠传动的超精密定位”Proc.中日超精密加工会议。

Jiro Otsuka: "Nanometer Positioning by Bit Control Using Three Kinds of Lead screws" Proc. 16th SEIKEN Symposium (International). 59-66. (1991)

Jiro Otsuka：“使用三种丝杠通过位控制进行纳米定位”Proc。

青木 芳人,川瀬 佳洋,深田 茂生,大塚 二郎: "ねじ駆動による超精密位置決め(第1報)ーずべりねじとボ-ルねじによる基礎的研究" 精密工学会誌. N5646. 2033-2038 (1990)

Yoshito Aoki、Yoshihiro Kawase、Shigeo Fukada、Jiro Otsuka：“通过丝杠驱动进行超精密定位（第 1 次报告）- 使用滑动丝杠和滚珠丝杠的基础研究”日本精密工程学会期刊 N5646（1990 年）。 ) )

Shigeo Fukada and Jiro Otsuka: "Ultra-precision Positioning Using Screw Drive" Proc. 3rd Sino-Japan Conference on Ultra-precision Machining. 1-6. (1991)

Shigeo Fukada 和 Jiro Otsuka：“使用丝杠驱动的超精密定位”Proc。