Study of Nanometer Accuracy Positioning in Consideration of Feed Element and Guide Elements

考虑进给元件和导向元件的纳米级精度定位研究

• 批准号: 04302030
• 负责人: OTSUKA Jiro
• 金额: $ 6.34万
• 依托单位: Shizuoka Institute of Science and Technology (1993)Tokyo Institute of Technology (1992)
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Co-operative Research (A)
• 财政年份: 1992
• 资助国家: 日本
• 起止时间: 1992 至 1993
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-04302030/
• 关键词: Ultraprecision Positioning; Nanometer accuracy; Feed elements; Guide elements; 超精密; 位置決め

1. Feed Elements(1)Ball screws : Fundamental data, concerning the nut preload control, were abtained and applied to a practical machine (S.Fukada). (2)Friction drive : The reason became clear why the nonlinear elastic characteristic on the driving point varied along the table movement (J.Otsuka). By the simulation of the positioning appratus, the designing method was established (H.Shimizu).2. Guide elements(1)Rolling guides : The positioning charasteristics were made clear about several kinds of rolling guide (M.Izawa). When the railway had misalignment, the table tilting motion and friction change was analyzed (S.Shimizu).(2)Hydrostatic air bearing : The bearing with double restristors was newly developed and its experimental and theoretical results showed that it was very effective to obtain infinite stiffness (S.Togo and O.Saito). The bearing with sub-mum clearance was manufactured and its dynamic characteristics were studied (S.Yoshimoto).3. Parallel springsThe characteristics of … More displacement magnification mechanism attached to the parallel springs were made clear (Y.Yoshimura).4. SensingAs for the diffraction moire sensor, an optimal design using soft and hard methods was established for settling a precise angular position (Y.Uchida). By applying the sensor fusion to the lathe, effective results could be obtained to get good surface and contour (M.Shiraishi).5. Positioning below 100nm accuracyOn the foundation of the above results, the new several positioning apparatuses were developed and high performance for ultraprecision positioning could be achieved with the positioning accuracy below 0.1mum (100nm) ; The positioning characteristics of the aerodynamic drive motor was studied (Y.Uchida). The experiment showed that double integration of the table acceleration without position sensor during table movement was capable of rough positioning (S.Fukada). Precise tilting of the rotating table for the facing lathe be controlled within the sensor resolution (Y.Aoyama). The minute-displacement table to obtain several nm cutting depth and 10nm surface flatness to grind the brittle materials was manufactured for the ultraprecision surface grinder, which could give 5nm displacement resolution, infinite stiffness and frequency bandwidth of 80 Hz (K.Furutani and J.Otsuka). An open-loop type positioning system a ball screw and ball linear guide could gain 0.1mum positioning resolution (S.Shimizu). Less

1.进给元件（1）滚珠丝杠：获得了有关螺母预紧力控制的基本数据，并将其应用于实际机床（S.（2）摩擦驱动：驱动点的非线性弹性特性随着工作台的移动而沿着变化的原因变得清楚了（J.Otsuka）。通过对定位装置的仿真，建立了定位装置的设计方法.（1）滚动导轨：明确了几种滚动导轨的定位特性（M.Izawa）。当轨道有错位时，分析了工作台的倾斜运动和摩擦力的变化（清水正孝）。（2）液体静压空气轴承：新近发展的具有双阻尼器的轴承，其实验和理论结果表明，获得无限刚度是非常有效的（S.Togo和O.Saito）。制作了亚微米间隙轴承，并对其动态特性进行了研究（吉本）.平行弹簧的特点 ...更多信息 位移放大机构附加到平行弹簧明确（Y.吉村）.传感对于衍射莫尔传感器，建立了使用软和硬方法的优化设计，以解决精确的角位置（内田Y.）。通过将传感器融合应用于车床，可以获得有效的结果，以获得良好的表面和轮廓（白石先生）.定位精度低于100 nm在上述结果的基础上，开发了几种新的定位装置，可以实现定位精度低于0.1 μ m（100 nm）的超精密定位的高性能;研究了气动驱动电机的定位特性（Y.Uchida）。实验表明，在没有位置传感器的情况下，在工作台运动过程中对工作台加速度进行二次积分能够实现粗定位（S.在传感器分辨率范围内控制端面车床旋转工作台的精确倾斜（青山Y）。为超精密平面磨床研制了一种微小位移工作台，用于脆性材料的磨削，可获得几nm的切削深度和10 nm的表面平整度，该工作台具有5 nm的位移分辨率、无穷大的刚度和80 Hz的频带宽度（K.Furutani和J.Otsuka）。一个开环型定位系统的滚珠丝杠和滚珠直线导轨可以获得0.1微米的定位分辨率（清水）。少

项目成果

清水弘幸: "摩擦駆動による精密位置決め装置について" 千葉県工業技術振興センター機関誌「テクノポート」. 18. 6-8 (1993)

Hiroyuki Shimizu：“关于使用摩擦驱动的精密定位设备”千叶县工业技术振兴中心杂志“Technoport”18. 6-8（1993）。

井澤實: "ボールねじ応用技術" 工業調査会, (1993)

井泽稔：《滚珠丝杠应用技术》产业研究会，（1993年）

S.YOSHIMOTO et al.: "Hydro-Static Air Bearing Operated Under Sub-micron Gap (Static Characteristics)" J.Japan Society for Precision Engineering. Vol.58, No.12(in Japanese). (1992)

S.YOSHIMOTO 等人：“在亚微米间隙下运行的静压空气轴承（静态特性）”J.日本精密工程学会。

H.FURUHASHI, Y.UCHIDA et al.: "An Automatic Alignment System Using Moire Sensors" Proc. 1993 Korean Automatic Control Conf. Internal Sessions. No.2. 545-549 (1993)

H.FURUHASHI、Y.UCHIDA 等人：“使用莫尔传感器的自动对准系统”Proc。

高橋道郎、大塚二郎: "摩擦駆動による精密位置決めの研究(第5報)-押付力可変方式による位置決め精度向上" 精密工学会誌. 59・4. 637-692 (1993)

高桥道夫、大冢二郎：“利用摩擦驱动的精密定位研究（第5次报告）-通过可变压力方法提高定位精度”日本精密工程学会杂志59・4（1993年）。