Small Ultraprecision Positioning Device with Sub-nanometer Resolution Considering Thermal Deformation Drift

(1)研制了分辨率为0.2、0.5和1 nm的位移传感器。(2)开发了分辨率为0.2、0.5和1 nm的非常小的超精密定位装置。(3)当超精密装置长时间使用时，装置由于来自马达的热量而热变形。测量了器件工作台上的垂直和水平热漂移。四种材料被用于设备平台、基座和基座支撑。结果，由不锈钢制成的器件显示出最大的热漂移。由低热膨胀材料制成的器件并没有表现出比我们预期的更小的热漂移。(4)为了更好地消除漂移，在光学显微镜上研制了视觉伺服系统。我们可以在显微镜视野的中心观察被观察的物体。(5)本文介绍了几种减小超精密器件热漂移的方案：（1）使电机的热量流向基座; (2)在电机和底座之间插入绝热材料。(3)通过各种方法对器件进行冷却。

(1) Displacement sensors with resolution of 0.2, 0.5 and 1 nm were developed.(2) Very small ultraprecision positioning devices with resolution of 0.2, 0.5 and 1 nm were developed.(3) When the ultraprecision device is used for long time, the device deforms thermally by the heat from the motor. The vertical and horizontal thermal drifts on the device stage were measured. Four kinds of materials were used for the device stage, base and base support. As the result, the device made of stainless steel showed the largest thermal drift. The device made of low thermal expansion material didn't show smaller thermal drift than that we expected.(4) In order to eliminate the drift perfectly, a visual servo system was developed on the optical microscope. We could observe the observed object at the center of the visual field of the microscope.(5) Several kinds of the cormterplans to decrease the thermal drift of the ultraprecision device are shown as follows ; (1) To make the heat of the motor to flow to the base support. (2) To insert an adiabatic material between the motor and the base. (3) To cool the device by some kinds of methods.