Study on Micromachine Design Methods

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Silicon micro-machining process has driven research of the micromachine which is composed of surprisingly microscopic integrated mechanisms. The micromachine will realize minute operations in extremely limited space including human bodies and machines, and many micromachines will be able to work together like bees in crowds in near future. These inexperienced operations by micromachines are widely expected in medical and biological treatments, industry, daily life and basic science.In order to realize these applications, design methods for micromachines must be established as well as micro-machining process. This report treats micromachine design methods which have been tried and proposed in micromachine development projects at authors' laboratory in mechanical engineering department of the University of Tokyo. The design methods were developed according to the following items ;1)scale analysis of mechanical characteristics of micromachines,2)experiments using enlarged model,3)layout problem solving in narrow restricted three- dimensional space by simulated annealing method,4)computerized design diagnosis method,5)CAD/CAE system installing dynamic engineering model for R&D projects,6)design theory.