Development of Micro-Factory Based on Leading Design

提出了一种利用机械臂加工搬运系统的新概念，可以减小微工厂的规模，增加其通用性。通过对微夹持器的微加工/装配试验和原型设计进行了可行性研究。采用132,000[rpm]的高速空气主轴和外径0.3的WC立铣刀进行微加工检验，得到铝、黄铜和不锈钢的切削力。结果表明，在最小进料速率下，每个切削刃的动载荷为1300 [mN]，静载荷为350[mN]（时间平均值）。通过0.5 ~ 5.0直径的孔和轴插入试验进行微装配检验，获得摩擦载荷。结果表明，所需轴向力约为1000 [mN]。因此，要求微机械臂的静刚度为350[mN/μm]，要求微夹持器的夹持刚度为1300[mN]。基于“双形状记忆合金”（TSMA）的特征数据，对微夹持器结构进行了优化设计。微夹持器原型设计及性能评估结果表明，夹持器/工件尺寸比为5.6，夹持器对夹持工件承受的弯矩载荷为4[mm]×1,300[mN]。此外，利用微夹持器和柔性悬臂臂组合系统，模拟了微机械臂的动力学特性，演示了微零件的真实加工过程。

We propose a new concept of machining ＆ handling system using robot arm, which can reduce microfactory size and increase its versatility. Feasibility study is carried out through micro machining/assembling examinations and prototyping of micro gripper.Micro machining examination is carried out using high-speed air spindle of 132,000[rpm] and WC end mill of outer diameter 0.3, to get cutting force of aluminum, brass and stainless steel. It turns out that the dynamic load of 1,300[mN] for each cutting edge and the static load of 350[mN] as time averaged value arise at minimized feeding rate. Micro assembling examination is carried out to get friction load by 0.5〜5.0 diameter hole ＆ shaft insertion test. It turns out that the required axial force is about 1,000[mN]. So, the required static stiffness of micro robot arm is 350[mN/μm], and the required gripping rigidity of micro gripper is 1300[mN].The optimum design of micro gripper configuration based on characteristic data of "Two Shape Memory Alloy" (TSMA) is carried out. Micro gripper prototyping and performance evaluation results in the gripper/work size ratio of 5.6, and the gripper bear out bending moment load of 4[mm]×1,300[mN] on the gripping work. Moreover, the real micro parts machining is demonstrated using combined system of micro gripper and flexible cantilever, which simulates the dynamics of micro robot arm.