Stereo-Lithography System for Fabricating Micro-Flexible Mechanism

用于制造微型柔性机构的立体光刻系统

• 批准号: 08555032
• 负责人: NAKAJIMA Naomasa
• 金额: $ 8.51万
• 依托单位: The University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 1996
• 资助国家: 日本
• 起止时间: 1996 至 1998
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-08555032/
• 关键词: Micro-machine; Stereo-Lithography; Photo-forming; Flexible mechanism; Free liquid surface; Liquid surface difference control; Hollow; Rapid prototyping; 空気制御; 樹脂量制御; レーザー; 液面制御; 気泡

The objective of this research is to design and build a photo-forming system, which can create very thin liquid layers in resin surface for the fabrication of micro flexible structures by introducing a hollow surface control into the system.The results can be summarized as follows.1. Surface unevenness and layer thickness of free liquid surface were investigated. To solve the problem of surface unevenness, a hollow control method was proposed.2. Three approaches involving hollow control have been proposed and investigated. In the air pressure control approach, the hollow surface is found suffering severe influences from the change of atmospheric pressure and temperature. Liquid quantity control approach has the problems of the friction between the resin tank and the movable plate, and serious time delay of hollow response to stick adjusting. Liquid surface difference control approach has no the disadvantages of the above-mentioned two approaches and is easily realized.3. Theoretical analysis and numerical simulation of the hollow shape gave a ground for the design of the nozzle unit. An experimental photo-forming system based on liquid surface difference control approach is designed and built.4. Examination of hollow layer thickness is conducted. The hollow begins to vibrate when it closes to the platform at a distance of near to 7 mum. This phenomenon limits the minimum layer thickness to be 7 mum.5. Fabrication of sample models has been undertaken. A micro flexible cantilever part was successfully manufactured.This is the first time that the liquid surface has been treated as a subject of control in stereo-lithography systems. The layer thickness of 7 mum has been realized. This research shows the effectiveness of the hollow surface control approach on attaining very thin liquid layers and high processing accuracy.

本研究的目的是设计和构建一个光成形系统，通过在系统中引入空心表面控制，可以在树脂表面形成非常薄的液体层，用于制造微柔性结构。结果可以总结如下：1。研究了自由液表面的不均匀度和层厚。为解决表面不平整问题，提出了一种空心控制方法。提出并研究了三种涉及空心控制的方法。在空气压力控制方法中，发现空心表面受到大气压力和温度变化的严重影响。液量控制方法存在树脂罐与活动板之间的摩擦和中空响应对粘滞调节的严重时滞等问题。液面差控制方法没有上述两种方法的缺点，易于实现。对空心形状的理论分析和数值模拟为喷管单元的设计提供了依据。设计并构建了一种基于液面差分控制方法的实验光成形系统。对空心层厚度进行了检测。当它在接近平台的距离上接近7英里时，空心开始振动。这种现象限制了最小层厚度为7mm .5。进行了样品模型的制作。成功地制造了一种微柔性悬臂零件。这是第一次将液体表面作为立体光刻系统的控制对象来处理。实现了7 μ m的层厚。研究表明，空心表面控制方法在获得极薄的液层和高加工精度方面是有效的。

项目成果

中島尚正,他: "液量調整による液面制御を用いたマイクロ光造形法" 日本機械学会第8回設計工学.システム部門講演会講演論文集. NO.98-32. 41-44 (1998)

Naomasa Nakajima 等人：“通过调节液体量来控制液位的微型立体光刻”日本机械工程师学会系统分会第 8 届会议记录第 98-32 号（1998 年）。

Naomasa NAKAJIMA et al: "Refrigerative Stereolithography for Rapid Product Prototyping" PRapid Product Development,Chapman & Hall. 73-82 (1997)

Naomasa NAKAJIMA 等人：“用于快速产品原型制作的制冷立体光刻技术”PRapid 产品开发，查普曼

中島尚正,他: "液量調整による液面制御を用いたマイクロ光造形" 日本機械学会第75期通常総会請漬会講演論文集(I). No.98-1. 453-454 (1998)

Naomasa Nakajima 等人：“通过调节液体量来控制液位的微型立体光刻术”日本机械工程学会第 75 届普通大会论文集（I）第 453-454 号（1998 年）。

Tamotsu MURAKAMI,et al.: "Refrigerative Stereo-lithography for Rapid Product Prototyping" Rapid Product Development. 73-82 (1997)

Tamotsu MURAKAMI 等人：“用于快速产品原型制作的冷冻立体光刻”快速产品开发。

Naomasa NAKAJIMA: "Japan's Country Reviews on Micromachine Technology" Proc.of the 4th World Micromachine Summit. 40-42 (1998)

Naomasa NAKAJIMA：第四届世界微型机械峰会“日本对微型机械技术的国家评论”Proc.。