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Study on High Resolution Photoforming for Micromachines

微机械高分辨率光成形研究

基本信息

批准号：
05555038
负责人：
NAKAJIMA Naomasa
金额：
$ 9.15万
依托单位：
The University of Tokyo
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research (B)
财政年份：
1993
资助国家：
日本
起止时间：
1993 至 1995
项目状态：
已结题

项目摘要

A forming resolution under 10mum is required for application of photoforming to micromachine manufacturing. For the purpose of obtaining the optimum dimensions and shape of solidified cells, we considered a solidification mechanism of light-cured resin and developed a computer model tracing the behaviors of photons with a modified Monte Carlo method. We simulated the behaviors of a large number of photons and obtained the density distribution of absorbed photons and conditions to keep the depth of a solidified layr under 10mum. From these theoretical studies, we arrived at the following conditions ; (1) stabilization of exposure spot diameter, (2) fine control of exposure light amount, (3) more light absorption factor of the resin.Based on these guidelines, we designed the photoforming apparatus which enabled to experiment two kinds of combinations, a) He-Cd laser and ultraviolet light curing resin, and b) Ar^+laser and visible light curing resin with organic dyes. We examined forming experiments using the apparatus and obtained the following resolutions ; about 10mum in the horizontal direction, and about 30mum in the vertical direction by the combination of He-Cd laser and ultraviolet light curing resin, and about 2mum in the horizontal direction and about 5mum in the vertical direction by the combination of Ar^+laser and visible light curing resin with organic dyes. In the visible light case, unnecessary parts like icicles formed in the ultra violet light case were no more found. Microscopic movable mechanisms were successfully fabricated and endured in 10,000 operations without failure when maximum strain was kept under 2% strain.

光成形在微机械制造中的应用要求成形分辨率在10微米以下。为了获得最佳的固化单元尺寸和形状，我们考虑了光固化树脂的固化机理，并用改进的蒙特卡罗方法建立了一个跟踪光子行为的计算机模型。我们模拟了大量光子的行为，得到了吸收光子的密度分布以及使凝固层深度保持在10微米以下的条件。通过这些理论研究，我们得出了以下条件：(1)稳定曝光光斑直径，(2)精细控制曝光光量，(3)提高树脂的光吸收系数。在此基础上，我们设计了光成型仪，可以实验两种组合：a)He-Cd激光和紫外光固化树脂；b)Ar~+激光和可见光固化树脂与有机染料。我们利用该装置进行了成型实验，得到了以下分辨率：He-Cd激光和紫外光固化树脂结合的水平方向约10微米，垂直方向约30微米；Ar~+激光和可见光固化树脂与有机染料结合的水平方向约2微米和垂直方向约5微米。在可见光情况下，不再发现紫外线情况下形成的冰柱等不必要的部分。在最大应变控制在2%以下的情况下，成功地制造了微型移动机构，并在10,000次操作中没有失败。