Analysis of epilayr structures by high-resolution X-ray methods

二维晶格畸变离子注入硅晶体已映射出的空间分辨率为0.016和0.265 μ m的深度和横向分别使用同步辐射X射线衍射数据。强度分布沿着晶体截断棒与基本111布拉格反射和卫星反射进行了测量和相位信息检索使用Petrashen-Chukhovskii算法为每个反射。用连续试验法和局部能量最小法测定了卫星反射的相对相位，得到了两个同样合理的图，用单片三反射非对称道切单色仪和1.54 * X射线分析仪获得了聚合物基体中空隙和玻璃纤维的X射线相衬图像。详细讨论了空隙和玻璃纤维图像对比度的形成机理，数值模拟结果与实验结果吻合较好。

Two-dimensional lattice distortions in ion-implanted silicon crystals have been mapped out with spatial resolutions of 0.016 and 0.265 mum in the depth and lateral directions respectively using synchrotron X-ray diffractometry data. Intensity profiles along the crystal-truncation-rods associated with the fundamental 111 Bragg reflections and satellite reflections were measured and phase information was retrieved using the Petrashen-Chukhovskii algorithm for each reflection. Two equally plausible maps have been obtained by determining the relative phases of the satellite reflections with a sequential trial method and a local energy-minimum method.X-ray phase-contrast images of voids and glass fibers in a polymer matrix has been obtained using both a monolithic 3-reflection asymmetric channel-cut monochromator and analyzer with 1.54-* X-rays. The mechanism of contrast formation in the images of voids and glass fibers are discussed in detail and numerical simulations of the images are found to agree with the experiments.