Analysis of epilayr structures by high-resolution X-ray methods

通过高分辨率 X 射线方法分析外延层结构

• 批准号: 04044066
• 负责人: HASHIZUME Hiroo
• 金额: $ 3.39万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for international Scientific Research
• 财政年份: 1992
• 资助国家: 日本
• 起止时间: 1992 至 1994
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-04044066/
• 关键词: Synchrotron radiation; X-ray diffractometry; phase retrieval; lattice distortion; ion implantation; multilayr; X-ray imaging; 位相コントラスト; 高分解能X線回折; 3結晶回折計; エピタキシャル結晶; 薄膜構造解析; 表面・界面構造; X線光学; サブミクロン結晶; 白色X線回析; エピタキシャルHgCdTe結晶; すれすれ入射; ラウエ回析

Two-dimensional lattice distortions in ion-implanted silicon crystals have been mapped out with spatial resolutions of 0.016 and 0.265 mum in the depth and lateral directions respectively using synchrotron X-ray diffractometry data. Intensity profiles along the crystal-truncation-rods associated with the fundamental 111 Bragg reflections and satellite reflections were measured and phase information was retrieved using the Petrashen-Chukhovskii algorithm for each reflection. Two equally plausible maps have been obtained by determining the relative phases of the satellite reflections with a sequential trial method and a local energy-minimum method.X-ray phase-contrast images of voids and glass fibers in a polymer matrix has been obtained using both a monolithic 3-reflection asymmetric channel-cut monochromator and analyzer with 1.54-* X-rays. The mechanism of contrast formation in the images of voids and glass fibers are discussed in detail and numerical simulations of the images are found to agree with the experiments.

利用同步加速器x射线衍射数据绘制了离子注入硅晶体在深度和横向分别以0.016和0.265微米空间分辨率的二维晶格畸变图。测量了与基本111布拉格反射和卫星反射相关的晶体截断棒的强度分布，并使用Petrashen-Chukhovskii算法检索了每个反射的相位信息。用连续试验法和局部能量最小法确定卫星反射的相对相位，得到了两幅同样可信的图。利用单片三反射非对称通道切割单色仪和1.54 * x射线分析仪，获得了聚合物基体中空隙和玻璃纤维的x射线相衬图像。详细讨论了孔洞和玻璃纤维图像反差形成的机理，数值模拟结果与实验结果一致。

项目成果

D.Gao: "Nean-sunface micro structural charactevizatim by extreme asymmetric Bragg oeflection topograply" J.Appl.plys.(1993)

D.Gao：“Nean-sunface 微结构特征通过极端不对称布拉格偏转地形”J.Appl.plys.(1993)

C.Carvalho,H.Hashizume,O.Yokota,O.Sakata,A.Stevenson,I.Robinson: "Application of the maximum-entropy method to the calculation of electron densities of the Si(111)7×7 surface" Report of RLEM,T.I.T.20. 53-64 (1995)

C. Carvalho、H. Hashizume、O. Yokota、O. Sakata、A. Stevenson、I. Robinson：“应用最大熵方法计算 Si(111)7×7 表面的电子密度”报告RLEM，T.I.T.20。53-64 (1995)

D.Gao,T.Davis,S.Wilkins: "X-ray phase-contrast imaging study of voids and fibers in a polymer matrix" Australian J.of Physics. (投稿中).

D.Gao、T.Davis、S.Wilkins：“聚合物基质中空隙和纤维的 X 射线相衬成像研究”澳大利亚物理学杂志（正在提交）。

T.Davis,D,Gao,T.Goureev,A.Stevenson,S.Wilkins: "Phase-contrast imaging of weakly absorbing materials using hard X-rays" Nature. (投稿中).

T. Davis、D、Gao、T. Goureev、A. Stevenson、S. Wilkins：“使用硬 X 射线对弱吸收材料进行相衬成像”（正在进行）。

C.Carvalho, H.hashizume, O.Yokota, O.Sakata, A.Stevenson, I.Robinson: "Application of the maximum-entropy method to the calculation of electron densities of the Si(III)7*7 surface" Report of RLEM,T.I.T. 20. 53-64 (1995)

C.Carvalho、H.hashizume、O.Yokota、O.Sakata、A.Stevenson、I.Robinson：“最大熵法在 Si(III)7*7 表面电子密度计算中的应用”报告