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Development of Mechanical Testing Machine for Microelements

微量元素力学试验机的研制

基本信息

批准号：
04555023
负责人：
KOMAI Kenjiro
金额：
$ 14.02万
依托单位：
KYOTO UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research (B)
财政年份：
1992
资助国家：
日本
起止时间：
1992 至 1993
项目状态：
已结题

项目摘要

A specially designed testing machine (load range : 0.1mN - 5N, accuracy : less than 0.02muN, applied displacement range : 0 - 250mum) was developed, which enables mechanical testing including fatigue of microelements. Loads were applied to a specimen by means of an electromagnetic actuator, and the displacement was measured with a differential transformer (measuring accuracy : 0.1mum). Mechanical testing of microelements and fiber reinforcements could thereby be performed with a sufficient precision. By using this developed machine, quasi-static bending tests of single-crystalline silicon microelements fabricated by dicing and photoetching and lateral compression and longitudinal tensile tests of various types of fiber reinforcements including aramid fibers and ceramic fibers were performed. Single-crystalline silicon microelements deformed elastically until final catastrophic failure, showing a brittle nature, and the elastic modulus was dependent on crystal orientation. The influences of the fabrication process and specimen size on the fracture strength were investigated, and the dominating factor on the strength was discussed. In the case of mechanical tests of fiber reinforcements, the influence of environments including vacuum and humidified environments on the fracture strength were investigated. For both aramid fibers and ceramic fibers of Al_2O_3, SiC and Si-C-Ti-O, tensile strength decreased by existence of water in the environment or water absorption.

研制了专门设计的试验机（载荷范围：0.1mN - 5N，精度：小于0.02muN，应用位移范围：0 - 250mum），可进行包括微量元素疲劳在内的力学测试。通过电磁执行器对试样施加载荷，用差动变压器测量位移（测量精度：0.1 μ m）。因此，微量元素和纤维增强物的机械测试可以以足够的精度进行。利用该仪器对单晶硅微元件进行了剪切和光刻加工的准静态弯曲试验，并对芳纶纤维和陶瓷纤维等各类纤维增强材料进行了横向压缩和纵向拉伸试验。单晶硅微元素的弹性变形直到最终的灾难性破坏，表现出脆性，弹性模量依赖于晶体取向。研究了制备工艺和试样尺寸对断裂强度的影响，讨论了影响断裂强度的主要因素。以纤维增强材料的力学试验为例，研究了真空环境和加湿环境对纤维增强材料断裂强度的影响。无论是芳纶纤维还是Al_2O_3、SiC和Si-C-Ti-O陶瓷纤维，拉伸强度都因环境中存在水分或吸水而降低。