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Development of testing system for evaluating the mechanical properties of thin microelement

薄型微元件力学性能评价测试系统的研制

基本信息

批准号：
13555025
负责人：
KOMAI Kenjiro
金额：
$ 8.83万
依托单位：
KYOTO UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2001
资助国家：
日本
起止时间：
2001 至 2002
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-13555025/
关键词：
Micro material Thin film Mechanical properties Tensile test Strain measurement Poly-Si thin film Fatigue Elastic modulus 疲労試験

项目摘要

In order to develop a reliable micro machine and MEMS in a service operation, much care must be taken into micro mechanical evaluation, i.e., mechanical properties of μm-sized microelements including fatigue behavior. However, the evaluation method has not been well established yet. In this study, the testing system of a thin microelement has been developed to evaluate the mechanical properties; the tensile strength, elastic modulus, fatigue strength and so on, and the evaluation methods for thin microelement are established. The system consists of a micromechanical tensile testing machine actuated by a PZT driven positioning stage, a micro manipulation system, a non-contact strain measurement system with a help of a double field of view microscope. The system is basically designed for poly-Si thin microelement with 3.5μm thick and 10μm wide. When conducting the uni-axial tensile test, the most important and difficult thing is to establish the method of gripping the specimen. In this study, a gripping method with glue is developed and successfully applied to the uni-axial tensile test without any slipping at the grip. Moreover the testing system is installed on an AFM stage and in situ observation of specimen surface is successfully done. The testing machine and a control program are improved to conduct the fatigue tests of thin microelement not only in laboratory air but also in water.

为了开发可靠的微机械和MEMS服务运行，必须非常重视微力学评估，即μm级微元件的力学性能，包括疲劳行为。然而，评价方法还没有很好的建立。在本研究中，开发了薄微元素测试系统来评估材料的力学性能；建立了薄型微元素的抗拉强度、弹性模量、疲劳强度等评价方法。该系统由PZT驱动定位台驱动的微力学拉伸试验机、微操作系统、双视场显微镜辅助的非接触应变测量系统组成。该系统主要针对厚3.5μm、宽10μm的多晶硅薄微元件设计。在进行单轴拉伸试验时，最重要也是最困难的是建立试样夹持方法。本研究开发了一种粘接夹紧方法，并成功应用于单轴拉伸试验中，夹紧处无滑移。并将测试系统安装在AFM台上，成功地完成了试样表面的原位观察。改进了试验机和控制程序，使其不仅能在实验室空气中进行薄微元素的疲劳试验，而且能在水中进行薄微元素的疲劳试验。