Development of testing system for evaluating the mechanical properties of thin microelement
Development of testing system for evaluating the mechanical properties of thin microelement
批准号:
13555025
负责人:
KOMAI Kenjiro
金额:
$8.83万
依托单位:
依托单位国家:
日本
项目类别:
Grant-in-Aid for Scientific Research (B)
财政年份:
2001
资助国家:
日本
项目状态:
已结题
起止时间:
2001 至 2002
中文摘要
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英文摘要
In order to develop a reliable micro machine and MEMS in a service operation, much care must be taken into micro mechanical evaluation, i.e., mechanical properties of μm-sized microelements including fatigue behavior. However, the evaluation method has not been well established yet. In this study, the testing system of a thin microelement has been developed to evaluate the mechanical properties; the tensile strength, elastic modulus, fatigue strength and so on, and the evaluation methods for thin microelement are established. The system consists of a micromechanical tensile testing machine actuated by a PZT driven positioning stage, a micro manipulation system, a non-contact strain measurement system with a help of a double field of view microscope. The system is basically designed for poly-Si thin microelement with 3.5μm thick and 10μm wide. When conducting the uni-axial tensile test, the most important and difficult thing is to establish the method of gripping the specimen. In this study, a gripping method with glue is developed and successfully applied to the uni-axial tensile test without any slipping at the grip. Moreover the testing system is installed on an AFM stage and in situ observation of specimen surface is successfully done. The testing machine and a control program are improved to conduct the fatigue tests of thin microelement not only in laboratory air but also in water.
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箕島 弘二: "多結晶シリコン微小素子の引張強度特性評価"日本機械学会関西支部第78期定時総会講演会講演論文集. 2-5-2-6 (2003)
Koji Minoshima:“多晶硅微元件的拉伸强度特性的评估”日本机械工程师学会关西分会第78届年会会议记录2-5-2-6(2003年)。
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K.Komai: "Environmentally Assisted Fracture Behavior of Silicon Microelements"Advances in Fracture Mechanics. 1-6 (2001)
K.Komai:“硅微元件的环境辅助断裂行为”断裂力学的进展。
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K.Komai: "Environmentally Assisted Fracture Behavior of Silicon Microelements"Advances in Fracture Mechanics, K.Ravi-Chandar, B.L. Karihaloo, T.Kishi, R.O. Ritchie, A.T. Yokobori, Jr., T. Yokobori, Eds., Elsevier Sci., Ltd., Oxford, UK. 1-6 (2001)
K.Komai:“硅微元件的环境辅助断裂行为”断裂力学进展,K.Ravi-Chandar,B.L.
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Kohji MINOSHIMA, Kazuto TANAKA, Hiroki YOKOTE, Ryo TOMOIDA, Kenjiro KOMAI: "Development of Testing System for Mechanical Properties of Microelement Thin Film"Proceeding of the 78th Annual Meeting of JSMS Kansai, Japan. No.034-1. 6-27-6-28 (2003)
Kohji MINOSHIMA、Kazuto TANAKA、Hiroki YOKOTE、Ryo TOMOIDA、Kenjiro KOMAI:“微元件薄膜机械性能测试系统的开发”日本 JSMS 关西第 78 届年会论文集。
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箕島 弘二: "Si単結晶マイクロエレメントの破壊・疲労強度特性とナノスコピック損傷評価"電気学会研究会資料マイクロマシン・センサシステム研究会. 35-38 (2003)
Koji Minoshima:“Si单晶微元件的断裂/疲劳强度特性和纳米损伤评估”日本电气工程师学会材料微机械和传感器系统研究组35-38(2003)。
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共 15 条
Development of atmosphere controlled Tribotester and evaluation of tribological properties of hard thin films nanostructured with femtosecond laser
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批准号:16360059
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项目类别:Grant-in-Aid for Scientific Research (B)
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资助金额:$9.73万
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财政年份:2004
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负责人:KOMAI Kenjiro
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依托单位:
Investigation into the Degradation Mechanisms of Advanced Metallic Materials based upon Localized Hydrogen Distribution Analyses
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批准号:13450046
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项目类别:Grant-in-Aid for Scientific Research (B)
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资助金额:$11.07万
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财政年份:2001
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负责人:KOMAI Kenjiro
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依托单位:
Development of in situ manufacturing and mechanical evaluation system for micromaterials
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批准号:11355007
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项目类别:Grant-in-Aid for Scientific Research (A).
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资助金额:$17.15万
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财政年份:1999
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负责人:KOMAI Kenjiro
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依托单位:
Environmental Strength Evaluation and Investigation into Degradation Mechanisms of Advanced Metallic Materials based upon Analyses of State of Hydrogen and Nanofractography
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批准号:11450043
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项目类别:Grant-in-Aid for Scientific Research (B).
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资助金额:$9.54万
-
财政年份:1999
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负责人:KOMAI Kenjiro
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依托单位:
Development of In Situ Nanoscopic Dynamic Damage Analyzer
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批准号:09555030
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项目类别:Grant-in-Aid for Scientific Research (B)
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资助金额:$8.7万
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财政年份:1997
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负责人:KOMAI Kenjiro
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依托单位:
Evaluation of Mechanical Properties of Microelements and Environmental Strength under Dynamic Loading
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批准号:09450048
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项目类别:Grant-in-Aid for Scientific Research (B)
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资助金额:$8.96万
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财政年份:1997
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负责人:KOMAI Kenjiro
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依托单位:
Development of Multi-Probe Scanning Environmental Microscope and In Situ Observation of Initiation of Corrosion Damage
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批准号:07555347
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项目类别:Grant-in-Aid for Scientific Research (A)
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资助金额:$1.66万
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财政年份:1995
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负责人:KOMAI Kenjiro
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依托单位:
Establishment of SPM Nanofractographic Techique and Its Application to Investigation of Damage and Fracture Mechanisms of Materials
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批准号:07305004
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项目类别:Grant-in-Aid for Scientific Research (A)
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资助金额:$6.78万
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财政年份:1995
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负责人:KOMAI Kenjiro
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依托单位:
Mechanical Evaluation of High-Strength and High-Modulus Fibers and Influence of Environment of Fracture Behavior
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批准号:06452148
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项目类别:Grant-in-Aid for General Scientific Research (B)
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资助金额:$4.74万
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财政年份:1994
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负责人:KOMAI Kenjiro
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依托单位:
Development of Mechanical Testing Machine for Microelements
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批准号:04555023
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项目类别:Grant-in-Aid for Developmental Scientific Research (B)
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资助金额:$14.02万
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财政年份:1992
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负责人:KOMAI Kenjiro
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依托单位:
Development of Diagnostic Expert System for Environmentally Assisted Cracking and of Its Standard Development Methods
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批准号:03302028
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项目类别:Grant-in-Aid for Co-operative Research (A)
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资助金额:$5.18万
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财政年份:1991
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负责人:KOMAI Kenjiro
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依托单位:
Investigations of Environmental Strength of Metal Matrix Composites under Multiaxial Loading Conditions
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批准号:03452109
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项目类别:Grant-in-Aid for General Scientific Research (B)
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资助金额:$4.35万
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财政年份:1991
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负责人:KOMAI Kenjiro
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依托单位:
Development of Scanning Tunneling Microscope Operating in Corrosiove Solution and In Situ Observation of Corrosion Damage of Metals
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批准号:02555018
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项目类别:Grant-in-Aid for Developmental Scientific Research (B)
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资助金额:$6.91万
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财政年份:1990
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负责人:KOMAI Kenjiro
-
依托单位:
Study on Dynamic Environmental Strength of Advanced High-Strength, High-Rigidity Fiber Reinforced Composites.
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批准号:63420026
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项目类别:Grant-in-Aid for General Scientific Research (A)
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资助金额:$21.31万
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财政年份:1988
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负责人:KOMAI Kenjiro
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依托单位:
Stadardization of Image Processing Techniques for Fractography
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批准号:62302024
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项目类别:Grant-in-Aid for Co-operative Research (A)
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资助金额:$8.0万
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财政年份:1987
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负责人:KOMAI Kenjiro
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依托单位:
Development of High-Speed-Scanning, Three-dimensional Mapping System
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批准号:62850018
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项目类别:Grant-in-Aid for Developmental Scientific Research
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资助金额:$7.68万
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财政年份:1987
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负责人:KOMAI Kenjiro
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依托单位:
Threshold Characteristics of Stress Corrosion Cracking under Dynamic Combined Multiaxial Loading Conditions
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批准号:61460083
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项目类别:Grant-in-Aid for General Scientific Research (B)
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资助金额:$5.25万
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财政年份:1986
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负责人:KOMAI Kenjiro
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依托单位:
Development of Corrosion Crack Initiation Monitor Based upon Scanning Vibrating Electrode Technique
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批准号:60850018
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项目类别:Grant-in-Aid for Developmental Scientific Research
-
资助金额:$5.25万
-
财政年份:1985
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负责人:KOMAI Kenjiro
-
依托单位:
海外基金