Development of testing system for evaluating the mechanical properties of thin microelement

薄型微元件力学性能评价测试系统的研制

基本信息

  • 批准号:
    13555025
  • 负责人:
  • 金额:
    $ 8.83万
  • 依托单位:
  • 依托单位国家:
    日本
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
  • 财政年份:
    2001
  • 资助国家:
    日本
  • 起止时间:
    2001 至 2002
  • 项目状态:
    已结题

项目摘要

In order to develop a reliable micro machine and MEMS in a service operation, much care must be taken into micro mechanical evaluation, i.e., mechanical properties of μm-sized microelements including fatigue behavior. However, the evaluation method has not been well established yet. In this study, the testing system of a thin microelement has been developed to evaluate the mechanical properties; the tensile strength, elastic modulus, fatigue strength and so on, and the evaluation methods for thin microelement are established. The system consists of a micromechanical tensile testing machine actuated by a PZT driven positioning stage, a micro manipulation system, a non-contact strain measurement system with a help of a double field of view microscope. The system is basically designed for poly-Si thin microelement with 3.5μm thick and 10μm wide. When conducting the uni-axial tensile test, the most important and difficult thing is to establish the method of gripping the specimen. In this study, a gripping method with glue is developed and successfully applied to the uni-axial tensile test without any slipping at the grip. Moreover the testing system is installed on an AFM stage and in situ observation of specimen surface is successfully done. The testing machine and a control program are improved to conduct the fatigue tests of thin microelement not only in laboratory air but also in water.
为了开发可靠的微机械和MEMS服务运行,必须非常重视微力学评估,即μm级微元件的力学性能,包括疲劳行为。然而,评价方法还没有很好的建立。在本研究中,开发了薄微元素测试系统来评估材料的力学性能;建立了薄型微元素的抗拉强度、弹性模量、疲劳强度等评价方法。该系统由PZT驱动定位台驱动的微力学拉伸试验机、微操作系统、双视场显微镜辅助的非接触应变测量系统组成。该系统主要针对厚3.5μm、宽10μm的多晶硅薄微元件设计。在进行单轴拉伸试验时,最重要也是最困难的是建立试样夹持方法。本研究开发了一种粘接夹紧方法,并成功应用于单轴拉伸试验中,夹紧处无滑移。并将测试系统安装在AFM台上,成功地完成了试样表面的原位观察。改进了试验机和控制程序,使其不仅能在实验室空气中进行薄微元素的疲劳试验,而且能在水中进行薄微元素的疲劳试验。

项目成果

期刊论文数量(30)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
箕島 弘二: "多結晶シリコン微小素子の引張強度特性評価"日本機械学会関西支部第78期定時総会講演会講演論文集. 2-5-2-6 (2003)
Koji Minoshima:“多晶硅微元件的拉伸强度特性的评估”日本机械工程师学会关西分会第78届年会会议记录2-5-2-6(2003年)。
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    0
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K.Komai: "Environmentally Assisted Fracture Behavior of Silicon Microelements"Advances in Fracture Mechanics. 1-6 (2001)
K.Komai:“硅微元件的环境辅助断裂行为”断裂力学的进展。
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    0
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K.Komai: "Environmentally Assisted Fracture Behavior of Silicon Microelements"Advances in Fracture Mechanics, K.Ravi-Chandar, B.L. Karihaloo, T.Kishi, R.O. Ritchie, A.T. Yokobori, Jr., T. Yokobori, Eds., Elsevier Sci., Ltd., Oxford, UK. 1-6 (2001)
K.Komai:“硅微元件的环境辅助断裂行为”断裂力学进展,K.Ravi-Chandar,B.L.
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    0
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Kohji MINOSHIMA, Kazuto TANAKA, Hiroki YOKOTE, Ryo TOMOIDA, Kenjiro KOMAI: "Development of Testing System for Mechanical Properties of Microelement Thin Film"Proceeding of the 78th Annual Meeting of JSMS Kansai, Japan. No.034-1. 6-27-6-28 (2003)
Kohji MINOSHIMA、Kazuto TANAKA、Hiroki YOKOTE、Ryo TOMOIDA、Kenjiro KOMAI:“微元件薄膜机械性能测试系统的开发”日本 JSMS 关西第 78 届年会论文集。
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    0
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箕島 弘二: "Si単結晶マイクロエレメントの破壊・疲労強度特性とナノスコピック損傷評価"電気学会研究会資料マイクロマシン・センサシステム研究会. 35-38 (2003)
Koji Minoshima:“Si单晶微元件的断裂/疲劳强度特性和纳米损伤评估”日本电气工程师学会材料微机械和传感器系统研究组35-38(2003)。
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KOMAI Kenjiro其他文献

KOMAI Kenjiro的其他文献

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{{ truncateString('KOMAI Kenjiro', 18)}}的其他基金

Development of atmosphere controlled Tribotester and evaluation of tribological properties of hard thin films nanostructured with femtosecond laser
气氛控制 Tribotester 的开发以及飞秒激光纳米结构硬薄膜的摩擦学性能评估
  • 批准号:
    16360059
  • 财政年份:
    2004
  • 资助金额:
    $ 8.83万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Investigation into the Degradation Mechanisms of Advanced Metallic Materials based upon Localized Hydrogen Distribution Analyses
基于局域氢分布分析的先进金属材料的降解机制研究
  • 批准号:
    13450046
  • 财政年份:
    2001
  • 资助金额:
    $ 8.83万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Development of in situ manufacturing and mechanical evaluation system for micromaterials
微材料原位制造及力学评价系统开发
  • 批准号:
    11355007
  • 财政年份:
    1999
  • 资助金额:
    $ 8.83万
  • 项目类别:
    Grant-in-Aid for Scientific Research (A).
Environmental Strength Evaluation and Investigation into Degradation Mechanisms of Advanced Metallic Materials based upon Analyses of State of Hydrogen and Nanofractography
基于氢态和纳米断口分析的先进金属材料的环境强度评价和降解机制研究
  • 批准号:
    11450043
  • 财政年份:
    1999
  • 资助金额:
    $ 8.83万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B).
Development of In Situ Nanoscopic Dynamic Damage Analyzer
原位纳米动态损伤分析仪的研制
  • 批准号:
    09555030
  • 财政年份:
    1997
  • 资助金额:
    $ 8.83万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Evaluation of Mechanical Properties of Microelements and Environmental Strength under Dynamic Loading
动态载荷下微元力学性能和环境强度评价
  • 批准号:
    09450048
  • 财政年份:
    1997
  • 资助金额:
    $ 8.83万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Development of Multi-Probe Scanning Environmental Microscope and In Situ Observation of Initiation of Corrosion Damage
多探头扫描环境显微镜的研制及腐蚀损伤萌生的原位观察
  • 批准号:
    07555347
  • 财政年份:
    1995
  • 资助金额:
    $ 8.83万
  • 项目类别:
    Grant-in-Aid for Scientific Research (A)
Establishment of SPM Nanofractographic Techique and Its Application to Investigation of Damage and Fracture Mechanisms of Materials
SPM纳米断裂技术的建立及其在材料损伤与断裂机理研究中的应用
  • 批准号:
    07305004
  • 财政年份:
    1995
  • 资助金额:
    $ 8.83万
  • 项目类别:
    Grant-in-Aid for Scientific Research (A)
Mechanical Evaluation of High-Strength and High-Modulus Fibers and Influence of Environment of Fracture Behavior
高强高模纤维的力学评价及断裂行为环境影响
  • 批准号:
    06452148
  • 财政年份:
    1994
  • 资助金额:
    $ 8.83万
  • 项目类别:
    Grant-in-Aid for General Scientific Research (B)
Development of Mechanical Testing Machine for Microelements
微量元素力学试验机的研制
  • 批准号:
    04555023
  • 财政年份:
    1992
  • 资助金额:
    $ 8.83万
  • 项目类别:
    Grant-in-Aid for Developmental Scientific Research (B)

相似海外基金

Controlling of structure and mechanical properties of thin-film metallic glasses by ion bombardment of unbalanced magnetron sputtering
非平衡磁控溅射离子轰击控制薄膜金属玻璃的结构和力学性能
  • 批准号:
    26820309
  • 财政年份:
    2014
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    $ 8.83万
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Production of thin film consisting of metal nano-helices and hierarchical elucidation of the novel mechanical properties
由金属纳米螺旋组成的薄膜的制备和新型机械性能的分层阐明
  • 批准号:
    24686018
  • 财政年份:
    2012
  • 资助金额:
    $ 8.83万
  • 项目类别:
    Grant-in-Aid for Young Scientists (A)
Evaluation of Mechanical Properties of Thin film Structure by UsingMEMS Technology
利用MEMS技术评估薄膜结构的机械性能
  • 批准号:
    23760103
  • 财政年份:
    2011
  • 资助金额:
    $ 8.83万
  • 项目类别:
    Grant-in-Aid for Young Scientists (B)
Determination of mechanical properties of nanometer-thick liquid lubricant films for thin film lubrication technology
薄膜润滑技术中纳米厚液体润滑膜机械性能的测定
  • 批准号:
    23686028
  • 财政年份:
    2011
  • 资助金额:
    $ 8.83万
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    Grant-in-Aid for Young Scientists (A)
NSF-Europe: Mechanical Properties of Thin-Film Active Materials
NSF-欧洲:薄膜活性材料的机械性能
  • 批准号:
    0354113
  • 财政年份:
    2004
  • 资助金额:
    $ 8.83万
  • 项目类别:
    Continuing Grant
Mechanical properties of multilayer, graded and nanocomposite hard thin film systems.
多层、分级和纳米复合硬薄膜系统的机械性能。
  • 批准号:
    215921-1998
  • 财政年份:
    2000
  • 资助金额:
    $ 8.83万
  • 项目类别:
    Strategic Projects - Group
Development of the Microplasticity Theory of Internal Friction and its Application to the Evaluation of Thin-Film Mechanical Properties
内摩擦微塑性理论的发展及其在薄膜力学性能评价中的应用
  • 批准号:
    12450258
  • 财政年份:
    2000
  • 资助金额:
    $ 8.83万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Mechanical properties of multilayer, graded and nanocomposite hard thin film systems.
多层、分级和纳米复合硬薄膜系统的机械性能。
  • 批准号:
    215921-1998
  • 财政年份:
    1999
  • 资助金额:
    $ 8.83万
  • 项目类别:
    Strategic Projects - Group
Mechanical properties of multilayer, graded and nanocomposite hard thin film systems.
多层、分级和纳米复合硬薄膜系统的机械性能。
  • 批准号:
    215921-1998
  • 财政年份:
    1998
  • 资助金额:
    $ 8.83万
  • 项目类别:
    Strategic Projects - Group
EVALUATION OF MECHANICAL PROPERTIES OF DIAMOND THIN FILM ONTO METAL SUBSTRATES PRODUCED BY MWCVD
MWCVD 金属基底上金刚石薄膜的机械性能评估
  • 批准号:
    09650106
  • 财政年份:
    1997
  • 资助金额:
    $ 8.83万
  • 项目类别:
    Grant-in-Aid for Scientific Research (C)
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