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Development of in situ manufacturing and mechanical evaluation system for micromaterials

微材料原位制造及力学评价系统开发

基本信息

批准号：
11355007
负责人：
KOMAI Kenjiro
金额：
$ 17.15万
依托单位：
KYOTO UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A).
财政年份：
1999
资助国家：
日本
起止时间：
1999 至 2000
项目状态：
已结题

项目摘要

In order to develop a reliable micromachine in a service operation, much care must be taken to micro mechanical evaluation, i.e., mechanical properties of μm-sized microelements including fatigue behavior. However, the evaluation method has not been well established yet. In this study, the evaluation system of metallic foil is developed, including in situ specimen machining, chucking and non-contact strain measurement. Using an electric discharge machine (PX-05 : Mitsubishi Co.Ltd.), micro specimens of stainless steel foil were machined and a suitable machining condition was found to minimize the roughness of machined surface : the minimum of the maximum roughness was 1.0μm. The micro specimen for tensile testing was designed to make easily handle and testing, which has the specimen supporting part and the specimen chucking part. To measure the strain of microelements, for which strain gages on the market are too large and strong, a laser speckle strain measurement method was applied, and non-contact strain measurement system for microelements was developed. Integrating these machining system and non-contact strain measurement system, tensile and fatigue tests of micro specimens of stainless steel foil (thickness : 50 μm, width : 1 mm) was successfully conducted, and the influence of anisotropy and machining method on the mechanical and fatigue strength was investigated. The elongation at break and fracture morphology of tensile tests were affected by specimen orientation, but fatigue strength was not.

为了在使用中开发出可靠的微机械，必须重视对微机械性能的评估，即μm尺寸微元件的机械性能，包括疲劳行为。然而，评价方法还没有很好地确立。在本研究中，开发了包括原位试件加工、夹紧和非接触应变测量在内的金属箔性能评价系统。利用PX-05电火花加工机(PX-05：Mitsubishi Co.Ltd.)对不锈钢箔材的微观试件进行了加工，得到了使加工表面粗糙度最小的加工条件：最大粗糙度最小为1.0μm。针对市场上应变片尺寸过大、强度过大的微元件应变测量问题，采用激光散斑应变测量方法，研制了微元件非接触式应变测量系统。将这些加工系统与非接触式应变测量系统相结合，成功地对厚度为50μm、宽度为1 mm的不锈钢箔进行了拉伸和疲劳试验，研究了各向异性和加工方法对其机械强度和疲劳强度的影响。拉伸试验的断裂伸长率和断口形貌受试件取向的影响，但疲劳强度不受影响。