A Study on Y Oxide High-Temperature Superconducting Thin Film Deposition by Pulsed Arc Plasma Discharges

脉冲电弧等离子体放电Y氧化物高温超导薄膜沉积研究

• 批准号: 04555062
• 负责人: SUDA Yoshiaki
• 金额: $ 2.05万
• 依托单位: SASEBO NATIONAL COLLEGE OF TECHNOLOGY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1992
• 资助国家: 日本
• 起止时间: 1992 至 1994
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-04555062/
• 关键词: High-Temperature Superconducting Film; YBaCuO; Pulsed Arc Plasma; Excitation Temperature; Stoichiometric; Pulsed Process; 超伝導薄膜; Y系酸化物超伝導; 分光分析; X線マイクロアナライザー; 発光種; プラズマ温度; 低温プロセス; 超伝導薄膜作製; Y系酸化物高温超伝導; EPMA

Since the discovery of high Tc oxide superconductors, there have been enormous interest and efforts to develop superconducting thin films for electronic applications including high sensitive magnetic field detector, switching device and a Josephson device.A pulsed arc plasma discharge method has the advantage of high deposition rate, chemicall stoichiometry equal to a bulk (target) material and possibility of in situ crystallization and low temperature process. The pulsed arc plasma discharge and the off-axis magnetron sputtering were applied to sputter YBa_2Cu_3O_<7-X> bulktargets and deposit YBaCuO thin films on MgO (100) and SrTiO_3 (100) substrates without heating. The plasma properties and the film characteristics were investigated to prepare the high-quality YBaCuO thin films. The films deposited by the pulsed arc plasma discharge method had almost stoichiometric composition. Optical emission spectroscopy was used to monitor the process plasma state and many spectral lines were i … More dentified. And the excitation temperature were estimated. Our experiments show that the pulsed arc plasma discharge method is simple, inexpensive and effective technique to fabricate YBaCuO superconducting thin films.A preparation of YBaCuO thin film on a flexible substrate with YSZ buffer layr by KrF pulsed laser deposition (PLD) was also investigated. The c-axis arraignment of the YBaCuO/YSZ/metal films was controlled by the orientation of the YSZ buffer layr. And laser-irradiated superconducting thin films were studied numerically by solving the one-dimensional heat conduction equation by means of the finite element method. Cubic BN films which might be coating films of YBaCuO thin films were prepared by pulsed YAG laser deposition. The electromagnetic noise caused by pulsed arc plasma discharge was also measured.We will get new good results from the pulsed process including pulsed arc plasma and pulsed laser. It might be very important to study the pulsed process scientifically and industrially. Less

自发现高Tc氧化物超导体以来，人们对开发用于电子应用的超导薄膜产生了巨大的兴趣和努力，包括高灵敏度磁场探测器，开关器件和约瑟夫森器件。脉冲电弧等离子体放电方法具有沉积速率高、化学计量量等于大块（靶）材料、可进行原位结晶和低温处理等优点。采用脉冲电弧等离子体放电和离轴磁控溅射技术在MgO（100）和SrTiO_3（100）衬底上溅射YBa_2Cu_3O_<7-X>块靶，在不加热的情况下沉积YBaCuO薄膜。为了制备高质量的YBaCuO薄膜，研究了等离子体性能和薄膜特性。用脉冲电弧等离子体放电法沉积的薄膜几乎具有化学计量成分。利用发射光谱法对等离子体状态进行了监测，并对许多谱线进行了识别。并对激发温度进行了估计。实验结果表明，脉冲电弧等离子体放电法是制备YBaCuO超导薄膜的一种简单、廉价、有效的方法。研究了KrF脉冲激光沉积（PLD）在YSZ缓冲层柔性衬底上制备YBaCuO薄膜的方法。YBaCuO/YSZ/金属薄膜的c轴排列由YSZ缓冲层的取向控制。采用有限元法求解一维热传导方程，对激光辐照超导薄膜进行了数值研究。采用脉冲YAG激光沉积法制备了可能是YBaCuO薄膜涂层的立方BN薄膜。对脉冲电弧等离子体放电产生的电磁噪声进行了测量。我们将从脉冲电弧等离子体和脉冲激光等脉冲工艺中获得新的良好效果。对脉冲过程的科学研究和工业应用具有重要意义。少

项目成果

Y. Suda: "Development of a Pulsed Arc Plasma Process for Preparation of YBaCuO Thin Films" Proceedings of the 5th ACED-92. 157-160 (1992)

Y. Suda：“用于制备 YBaCuO 薄膜的脉冲电弧等离子体工艺的开发”第五届 ACED-92 论文集。

Y.Suda: "Preparation of Boron Nitride Film by Pulsed YAG Laser Ablation and Spectroscopic Study" Electric Discharge Cof.I.E.E Japan. ED-95-24, DEI-95-11 (in japanese). 81-90 (1995)

Y.Suda：“脉冲 YAG 激光烧蚀制备氮化硼薄膜和光谱研究”日本放电 Cof.I.E.E。

須田 義昭: "パルスYAGレーザアブレッションによる窒化崩素薄膜作製と分光分析" 電気学会放電,誘電・電気材料合同研究会. ED-95-24. 81-90 (1995)

Yoshiaki Suda：“脉冲 YAG 激光烧蚀氮化氮薄膜的制备和光谱分析”IEEJ 放电、电介质和电气材料联合研究组 ED-95-90 (1995)。

T. Nakamiya: "Dynamics During Pulsed Laser Ablation of High Tc Superconductor" IEEE Transactions on Applied Superconductivity. Vol.3,No.1. 1057-1060 (1993)

T. Nakamiya：“高温超导脉冲激光烧蚀过程中的动力学”IEEE 应用超导汇刊。

Y. Suda: "Electromagnetic Noise Caused by Pulsed Arc Plasma Discharges" Proceedings of the 6th ACED-93. 55-58 (1993)

Y. Suda：“脉冲电弧等离子体放电引起的电磁噪声”第六届 ACED-93 会议记录。