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Development of Indoor Environmental Improvement System by Using Nano Structural High Sensitivity Thin Film Gas Sensor

利用纳米结构高灵敏度薄膜气体传感器开发室内环境改善系统

基本信息

批准号：
14350153
负责人：
SUDA Yoshiaki
金额：
$ 4.74万
依托单位：
SASEBO NATIONAL COLLEGE OF TECHNOLOGY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2002
资助国家：
日本
起止时间：
2002 至 2005
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-14350153/
关键词：
Nano structure Thin film gas sensor Environmental improvement SnO_2 WO_3 PLD method Ozonizer Dielectric thin film TiO_2

项目摘要

The purpose of this research is to combine the ozone deodorizations with the high sensitive and selective gas sensor and develop the indoor environmental improvement system.In this study, we prepared SnO_2, WO_3, ZnO, TiO_2 fims by pulsed Nd:YAG laser deposition (PLD) method. The surface morphology, crystalline structure, crystallographic orientation, composition ratio and bonding state of the films were analyzed by AFM, GXRD, FT-IR, XPS. Exprimental results suggest that the stoichimetric and crystalline SnO_2, WO_3, ZnO, TiO_2 flms can be prepared. We have succesfully deposited H_2 sensitive SnO_2-Pd thin films and NOx sensitive WO_3-Pd thin films using the new PLD In method combined with d.c. sputtering. Various dielectric thin films were prepared on the electrode surface of silent electrical discharge type ozonizer by sputtering method to get the highly effective ozonizer. The relation between the amount of the ozone generation and the discharge voltage and the dielectric thin film was clarified, and we succeeded in the development of highly effective ozonizer.In addition, the indoor environmental improvement system that combined a high sensitivity gas sensor, nitrogen dope TiO_2 photocatalyst, and highly effective ozonizer was developed.As mentioned above, the purpose of this research was achieved enough. In the future, an extremely new result is expected to be obtained by the development of the environmental improvement thin film material process using the pulsed laser and the development of the environmental improvement system using the ozonizer. It is very important to research the problem of this field aggressively from academic and an industrial viewpoint.A part of this research is published at a domestic and foreign science magazine and the academic society.The remainder of this research is scheduled to be made public one by one by the end of this year.

本研究以联合收割机为研究对象，采用脉冲Nd：YAG激光沉积（PLD）法制备了SnO_2、WO_3、ZnO、TiO_2薄膜。采用AFM、GXRD、FT-IR、XPS等分析手段对薄膜的表面形貌、晶体结构、晶体取向、组成比和成键状态进行了分析。实验结果表明，可以制备出化学计量比和晶态的SnO_2，WO_3，ZnO和TiO_2薄膜。我们用PLD In结合直流溅射的新方法成功地沉积了H_2敏感的SnO_2-Pd薄膜和NOx敏感的WO_3-Pd薄膜。为了获得高效的臭氧发生器，采用溅射法在无声放电型臭氧发生器电极表面制备了多种介质薄膜。阐明了臭氧产生量与放电电压和介质薄膜的关系，成功研制了高效臭氧发生器，并开发了高灵敏度气体传感器、氮掺杂TiO_2光催化剂和高效臭氧发生器相结合的室内环境改善系统，达到了本研究的目的。未来，通过开发使用脉冲激光的环境改善薄膜材料工艺和开发使用臭氧发生器的环境改善系统，预计将获得非常新的结果。从学术和产业的角度积极研究这一领域的问题是非常重要的。本研究的一部分已发表在国内外科学杂志和学会上。本研究的其余部分计划在今年年底前逐一公布。