New Synthesis of TiC Films by Applying High Pressure and Electric Field to (Ti/Polyethylene) Film

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The new synthesis of TiC film has been studied by applying high pressure and electric field to the vacuum deposited (Ti and polyethylene (PE) ) films on the alloy tool steel as a substrate. TiC^+ ions were found by secondary ion mass spectroscopy on the surfaces of the samples synthesized under the condition of high pressure (0.392-9.8)/**10^5N and high electric field (3.75-7.5)*10^7V/m. These increased with sputtering of Xe^+ ion going from the surface to the substrate, while C^+ ions decreased. These results suggest the existence of TiC compound in synthesized films. Furthermore the strong TiC_2H^+ ions and the weak dimer ions of TiC_2 were also observed, which suggest that the synthesized films include the amorphous states of TiC.X ray diffraction showed hardly any peak of TiC in the films as synthesized. However the diffraction peak of TiC (lll) was detected in the sample thermal treated at 600ﾟC for 2days after synthesizing under 2.94*10^5N and minus-bias on Ti film side, and ones thermal treated at 780ﾟC for 4 days.Furthermore the measurement of the coefficient of static friction showed that the surface was very flat in the sample synthesized under 2.94*10^5N and minus-bias on Ti film side, and one of wearing did that this sample had also the good property of wearig.