Study on a micro-maching appoying the lasertrapping of fine abrasives.

激光捕获细磨料的微加工研究

• 批准号: 06555033
• 负责人: IKENO Junichi
• 金额: $ 4.48万
• 依托单位: Toyohashi University of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1994
• 资助国家: 日本
• 起止时间: 1994 至 1995
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-06555033/
• 关键词: laser trapping; wicro-mechanism; micro-machining; fine abrasive; YAG laser; Ultra precision machining; 3D-measurement; 微細加工; レーザ加工; 超微粒子; 光圧力

A aim of this research is that uitra precision machining is completed applying manipulation of a fine particle by laser beam. A experomental apparatus was manufactured in the first year. The mainly constituent elements are three parts. One is YAG laser systems that a power is 18W (TEM_<00>). A fine particle is trapped by a radiation force of laser beam. The farce occurs when a laser beam incident on the surface of a fine particle. If laser power is large, a radiation force is also large. Therefore, we decided using of a laser system which has large power. The other is laser scanning system which has two galvanometer optical scanners controlled by PC.We can scan a laser beam on a stage with complete control. Another part is microscope as a light-gathering instrument. Forcus size of laser beam is about phi1mum by the microscope.Some phenomena occured when YAG laser is irradiated to a particle. We investigated the phenomena thoroughly in next year. Many particles, for example diamond, sil … More ica, alumina etc., were manipulated and arranged in the water applying a radiation force of the laser beam. Some newly maniplation techniques of particles was developed. One isthe technique applying a local convection of the water which is occured by laser beam. A particle was rotated on its axis and revolved around the axis. The rotation speed was several thousands rad/min, which is higher than a rotation of a particle by a radiation force. A large particle and an opaque particle, which could not be manipulated by radiation force, could be done straight in the water by the technique. We expect that the characteristic can be applied to micro-mechanism and micro-machining. Another new technique was developed in the air. We found out a levitation of a fine particle on the base plate. The levitation has some interesting characteristics. One is that levitating particle can move along a surface of a base plate. The other is that the particle is changed the motion on a damage area of the base plate. We expect that their characteristics can be applied to a non-contact measurement system, an analysis of a material and a micro-machining.A newly micro-machining applying a radiation force and the levitation could be developed in the resaerch. Some fine particles were manipulated by them, 3D-microstructure was constructed on the base plate. Less

本研究的一个目的是利用激光束操纵微细颗粒来完成超精密加工。第一年就制造了一个实验装置。其主要构成要件有三个部分。一种是功率为18 W（TEM_）的YAG激光系统<00>。通过激光束的辐射力捕获微小颗粒。当激光束入射到微粒表面时，就会发生这种现象。如果激光功率大，则辐射力也大。因此，我们决定使用具有大功率的激光系统。另一个是激光扫描系统，它由两个振镜式光学扫描器组成，由PC机控制，可以在一个工作台上完成激光扫描。另一部分是作为聚光仪器的显微镜。用显微镜观察到激光束的焦点尺寸约为φ 1 μ m，YAG激光照射颗粒时出现了一些现象。我们在明年彻底调查了这些现象。许多颗粒，例如金刚石、银 ...更多信息 伊卡、氧化铝等，被操纵并布置在水中，施加激光束的辐射力。发展了一些新的粒子操纵技术。一种是利用激光束使水发生局部对流的技术。一个粒子绕着它的轴旋转，再绕着轴旋转。旋转速度为数千rad/min，这高于粒子通过辐射力的旋转。一个大的粒子和一个不透明的粒子，不能用辐射力操纵，可以直接在水中的技术。我们期望这种特性可以应用于微机械和微加工。另一项新技术在空中开发。我们发现一个微粒悬浮在基板上。悬浮有一些有趣的特征。一个是悬浮粒子可以沿着基板表面移动。另一种是在基板的损伤区域上改变颗粒的运动。这些特性有望应用于非接触测量、材料分析和微加工等领域，并有望发展出一种新型的辐射力悬浮微加工技术。通过对一些细小颗粒的操纵，在基板上构建了三维微结构。少

项目成果

池野順一,他3名: "レーザ光線による微粒子の操作とその応用に関する研究(第2報) 〜新しい操作法の開発〜" 1995年度精密工学会秋季大会学術講演会講演論文集. 495-496 (1995)

Junichi Ikeno等3人：“激光束对细颗粒的操纵及其应用的研究（第2次报告）〜新操纵方法的开发〜”1995年日本精密工程学会秋季会议学术会议论文集495-496。 (1995)

池野順一,他3名: "レーザ光線による微粒子の操作とその応用に関する研究(第一報) 〜レーザトラッピング装置の試作とその性能評価〜" 1995年度精密工学会秋季大会学術講演会講演論文集. 493-494 (1995)

池野纯一等3人：《激光束对微粒子的操纵及其应用的研究（第一次报告）-激光捕获装置的原型制作及其性能评估-》1995年日本精密工程学会秋季学术会议论文集会议。493-494（1995）

池野順一,他2名: "レーザ光線による微粒子の操作とその応用に関する研究(第4報) 〜空中における微粒子の浮上について〜" 1995年度精密工学会春季大会学術講演会講演論文集. 705-706 (1996)

池野淳一等2人：《激光束对微粒子的操纵及其应用的研究（第4次报告）～关于空气中微粒子的悬浮～》1995年精密工程学会春季会议学术会议论文集。 705-706 (1996)

J.IKENO,Y.TANI,H.SATO: "Deveropment of Highly Homogeneous Pellets Applying Electrophoretic Deposition of Ultrafine Abrasives for Nanometer Grinding" Annals of CIRP. 43-1. 319-322 (1994)

J.IKENO、Y.TANI、H.SATO：“利用电泳沉积超细磨料进行纳米研磨的高度均匀颗粒的开发”CIRP 年鉴。

池野順一,その他3名: "レーザ光線による微粒子の操作とその応用に関する研究(第一報)〜レーザトラッピング装置の試作とその性能評価〜" 1995年度精密工学会秋季大会学術講演会講演論文集. 493-494 (1995)

池野纯一等3人：《激光束对微粒子的操纵及其应用的研究（第一次报告）-激光捕获装置的原型制作及其性能评估-》1995年日本精密工程学会秋季学术会议论文集会议。493-494（1995）