Study on a micro-maching appoying the lasertrapping of fine abrasives.

激光捕获细磨料的微加工研究

• 批准号: 06555033
• 负责人: IKENO Junichi
• 金额: $ 4.48万
• 依托单位: Toyohashi University of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1994
• 资助国家: 日本
• 起止时间: 1994 至 1995
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-06555033/
• 关键词: laser trapping; wicro-mechanism; micro-machining; fine abrasive; YAG laser; Ultra precision machining; 3D-measurement; 微細加工; レーザ加工; 超微粒子; 光圧力

A aim of this research is that uitra precision machining is completed applying manipulation of a fine particle by laser beam. A experomental apparatus was manufactured in the first year. The mainly constituent elements are three parts. One is YAG laser systems that a power is 18W (TEM_<00>). A fine particle is trapped by a radiation force of laser beam. The farce occurs when a laser beam incident on the surface of a fine particle. If laser power is large, a radiation force is also large. Therefore, we decided using of a laser system which has large power. The other is laser scanning system which has two galvanometer optical scanners controlled by PC.We can scan a laser beam on a stage with complete control. Another part is microscope as a light-gathering instrument. Forcus size of laser beam is about phi1mum by the microscope.Some phenomena occured when YAG laser is irradiated to a particle. We investigated the phenomena thoroughly in next year. Many particles, for example diamond, sil … More ica, alumina etc., were manipulated and arranged in the water applying a radiation force of the laser beam. Some newly maniplation techniques of particles was developed. One isthe technique applying a local convection of the water which is occured by laser beam. A particle was rotated on its axis and revolved around the axis. The rotation speed was several thousands rad/min, which is higher than a rotation of a particle by a radiation force. A large particle and an opaque particle, which could not be manipulated by radiation force, could be done straight in the water by the technique. We expect that the characteristic can be applied to micro-mechanism and micro-machining. Another new technique was developed in the air. We found out a levitation of a fine particle on the base plate. The levitation has some interesting characteristics. One is that levitating particle can move along a surface of a base plate. The other is that the particle is changed the motion on a damage area of the base plate. We expect that their characteristics can be applied to a non-contact measurement system, an analysis of a material and a micro-machining.A newly micro-machining applying a radiation force and the levitation could be developed in the resaerch. Some fine particles were manipulated by them, 3D-microstructure was constructed on the base plate. Less

本研究的目的是利用激光束操纵细颗粒来完成超精密加工。第一年就制造了一台实验仪器。主要构成要素有三部分。一种是功率为18W （TEM_<00>）的YAG激光系统。细粒子被激光束的辐射力捕获。当激光束照射在细颗粒表面时，就会发生这种闹剧。如果激光功率大，辐射力也大。因此，我们决定采用功率较大的激光系统。另一种是激光扫描系统，由PC机控制的两个振镜光学扫描器组成。我们可以在完全控制下扫描舞台上的激光束。另一部分是作为聚光工具的显微镜。在显微镜下，激光束的焦点大小约为1毫米。当YAG激光照射到粒子时，会发生一些现象。我们在明年对这一现象进行了深入调查。许多粒子，例如金刚石、硅……更多的是ica、氧化铝等，在激光光束的辐射力作用下被操纵并排列在水中。发展了一些新的粒子操作技术。一种是利用激光束引起的水的局部对流技术。粒子绕其轴旋转并绕其轴旋转。旋转速度为几千rad/min，比粒子受辐射力的旋转速度要快。大颗粒和不透明颗粒不受辐射力的影响，可以直接在水中进行。我们期望该特性可以应用于微机械和微加工。另一项新技术在空中发展起来。我们发现一种微粒悬浮在底板上。悬浮有一些有趣的特点。一是悬浮粒子可以沿着底板表面运动。另一种是改变粒子在底板损伤区域的运动。我们期望它们的特性可以应用于非接触式测量系统、材料分析和微加工。研究中可以发展一种利用辐射力和悬浮的新型微加工方法。利用它们对微细颗粒进行处理，在基板上构建三维微观结构。少

项目成果

池野順一,他3名: "レーザ光線による微粒子の操作とその応用に関する研究(第2報) 〜新しい操作法の開発〜" 1995年度精密工学会秋季大会学術講演会講演論文集. 495-496 (1995)

Junichi Ikeno等3人：“激光束对细颗粒的操纵及其应用的研究（第2次报告）〜新操纵方法的开发〜”1995年日本精密工程学会秋季会议学术会议论文集495-496。 (1995)

池野順一,他3名: "レーザ光線による微粒子の操作とその応用に関する研究(第一報) 〜レーザトラッピング装置の試作とその性能評価〜" 1995年度精密工学会秋季大会学術講演会講演論文集. 493-494 (1995)

池野纯一等3人：《激光束对微粒子的操纵及其应用的研究（第一次报告）-激光捕获装置的原型制作及其性能评估-》1995年日本精密工程学会秋季学术会议论文集会议。493-494（1995）

池野順一,他2名: "レーザ光線による微粒子の操作とその応用に関する研究(第4報) 〜空中における微粒子の浮上について〜" 1995年度精密工学会春季大会学術講演会講演論文集. 705-706 (1996)

池野淳一等2人：《激光束对微粒子的操纵及其应用的研究（第4次报告）～关于空气中微粒子的悬浮～》1995年精密工程学会春季会议学术会议论文集。 705-706 (1996)

J.IKENO,Y.TANI,H.SATO: "Deveropment of Highly Homogeneous Pellets Applying Electrophoretic Deposition of Ultrafine Abrasives for Nanometer Grinding" Annals of CIRP. 43-1. 319-322 (1994)

J.IKENO、Y.TANI、H.SATO：“利用电泳沉积超细磨料进行纳米研磨的高度均匀颗粒的开发”CIRP 年鉴。

池野順一,その他3名: "レーザ光線による微粒子の操作とその応用に関する研究(第一報)〜レーザトラッピング装置の試作とその性能評価〜" 1995年度精密工学会秋季大会学術講演会講演論文集. 493-494 (1995)

池野纯一等3人：《激光束对微粒子的操纵及其应用的研究（第一次报告）-激光捕获装置的原型制作及其性能评估-》1995年日本精密工程学会秋季学术会议论文集会议。493-494（1995）