Study on New three dimensional laser micro machiing for manufacturing of aspheric lens

新型三维激光微加工非球面透镜制造研究

• 批准号: 14350066
• 负责人: IKENO Junichi
• 金额: $ 9.54万
• 依托单位: Saitama University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2002
• 资助国家: 日本
• 起止时间: 2002 至 2004
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-14350066/
• 关键词: laser machining; aspheric lens; plastic processing; transference point; transition temperature; glass; breaking process; micromachining; 線膨脹係数

In laser beam machining of glass materials, there are many machining methods such as drilling, cutting, surface treatment, etc. The laser beam absorbed in the material causes a rapid temperature rise, and then the material melts and evaporates. Such laser beam machining belongs to a type of material removal processing. Therefore, the processed shape is concave. To make a convex shape on the surface by laser beam machining, all the circumferences must be removed. It is considered that by irradiating the glass with the laser beam of lower power than conventional laser beam machining, the glass should not evaporate, and that a local high-temperature part may appear. It is possible that the part produces a large difference of expansion coefficient around the transition temperature of glass. As the resuit, it is expected that the part may swell. Purpose of this study is to investigate a possibility of generating the convex shapes on glass surface by a YAG laser irradiation, and feasibilitie … More s of its applications to various micromachining of glass materials. As the result, the following have been obtained, and the micromachining of glass surface by generating convex shapes could be accomplished.1.Generating the convex shapes on glass surface by a YAG laser irradiation :For a glass material, which is comparatively easy to absorb YAG laser, generating convex shapes on the glass surface was possible by YAG laser irradiation. It seems a cubical expansion of glass caused by quick heating and cooling around the transition temperature. By realizing the generating processing of the convex shape, which is different from conventional laser beam machining, various applications are expected as new micromachining technology.2.Micromachining by the generation of convex shapes :Micromachining using the generation of convex shapes by laser was proposed. As the result, marking and patterning of the glass surface became possible with many convex shapes and linear convex shapes. Also, it was possible to make three-dimensional microstructures by piling up the convex shapes.3.Micro forming of the convex shapes :Possibility of micro forming of the convex shapes by external forces was investigated. As the result, molding or filling of the expanding convex shape in to a die cavity was possible. And, the expanding convex shape could be deformed plastically by striking it with a hammer, and pressing with a silica glass plate. Less

在玻璃材料的激光加工中，有许多加工方法，如钻孔，切割，表面处理等，在材料中吸收的激光束使温度迅速上升，然后材料熔化和蒸发。这种激光束加工属于一种材料去除加工。因此，加工的形状是凹形的。为了通过激光束加工在表面上形成凸形，必须去除所有的圆周。据认为，通过用比常规激光束加工功率低的激光束照射玻璃，玻璃不应蒸发，并且可能出现局部高温部分。这是可能的，该部分产生的玻璃转变温度附近的膨胀系数的差异很大。因此，预计部件可能会膨胀。本研究的目的是探讨利用YAG激光在玻璃表面产生凸形的可能性， ...更多信息 介绍了它在各种玻璃材料微细加工中的应用。1.通过YAG激光照射在玻璃表面上产生凸起形状：对于相对容易吸收YAG激光的玻璃材料，通过YAG激光照射在玻璃表面上产生凸起形状是可能的。这似乎是玻璃在转变温度附近快速加热和冷却引起的体积膨胀。通过实现与传统激光加工不同的凸形的生成加工，作为新的微细加工技术，可以期待各种各样的应用。2.通过凸形的生成的微细加工：提出了利用激光生成凸形的微细加工。结果，玻璃表面的标记和图案化变得可能具有许多凸起形状和线性凸起形状。此外，通过堆积凸形，可以制作三维微结构。3.凸形的微成形：研究了利用外力对凸形进行微成形的可能性。因此，可以将膨胀的凸形模制或填充到模腔中。并且，通过用锤子敲击并用石英玻璃板挤压，可以使膨胀的凸起形状塑性变形。少

项目成果

精度自己収束型レンズ形状作成方法およびその方法によって形成された光学素子

精确的自会聚透镜形状生成方法以及由该方法形成的光学元件

• 发表时间: 2004

池野順一: "3次元割断法によるマイクロレンズ製造の可能性について"第148回レーザ協会研究会. 1-6 (2002)

Junichi Ikeno：“论通过三维切割方法制造微透镜的可能性”第148届激光协会研究会议1-6（2002年）。

中川裕介, 池野順一, 尼子淳: "レーザトラッピングに関する研究〜液晶SLMを用いた複数微粒子のレーザトラッピング"2002年度砥粒加工学会学術講演会講演論文集. 389-390 (2002)

Yusuke Nakakawa、Junichi Ikeno、Jun Amago：“激光捕获的研究 - 使用液晶 SLM 的多个细颗粒的激光捕获”日本磨料加工学会 2002 年学术会议记录 389-390 (2002)。

Femt second laser processing of photosensitized glass

Femt二次激光加工光敏玻璃

• 发表时间: 2004
• 期刊: Proceedings of JSPE(Spring)
• 作者: WAKABAYASHI Masatugu;IKENO Junichi;ANZAI Masahiro;OMORI Hitoshi;YAMANOUCHI Mikio
• 通讯作者: YAMANOUCHI Mikio

マイクロレンズ作成法およびその装置、その方法によって作成した光学素子

微透镜制作方法、装置以及由该方法制作的光学元件

• 发表时间: 2004