Study on a new three-dimensional laser micro-processing method using the difference in the permeation characteristic

利用渗透特性差异的三维激光微加工新方法研究

• 批准号: 11450055
• 负责人: IKENO Junichi
• 金额: $ 7.81万
• 依托单位: SAITAMA UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B).
• 财政年份: 1999
• 资助国家: 日本
• 起止时间: 1999 至 2000
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-11450055/
• 关键词: Laser processing; Three dimensional Micro-processing; Drilling; Hard and brittle material; Crack-free; Glass; YAG laser; Permeation characteristic; 3次元; 微細加工

In recent years, the additional value of product, low costs, high product-mix and proper-repetitive production and a harmony with the earth environment are pursued in the manufacturing industry. The laser processing which is different from the conventional mechanical and chemical processing has been by the collection light and the non-contact-ability of the light in a high-speed and can realize high accuracy machining. Moreover, it is clean to the earth environment, as a kind of resource which can save machining. Therefore, the laser processing is highly expected as a method of the processing of new material, the micromachining.However, if that the performance and the productivity of the laser equipment with high cost become better than that in the past hasn't been proved the introduction into the production line may be of high cost. Therefore the attempts to expand the coverage of the laser processing in the future and the development of a new processing technology are much regained.I … More f the free direction drilling in 3-dimensional becomes possible, the new feature can be added to the product. This can expect a big effect as the new processing technology such as the reduction of the production process and the number of parts, the expansion of the coverage of the material.The purpose of this research is to apply a high quality and high accuracy 3- dimensional drilling to the free direction by proposing a newly 3-dimensional laser processing method to Glass-ceramics.As a result, that the method shown below has been developed and the application of which into 3-dimensional drilling was realized.1. The crack-free processing methodIt was necessary to create a crack-free processing on the surface of workpiece and then to scatter the melt into the air. According to the experimental results, it was found that a crack-free drilled hole could be processed when YAG laser beam irradiated on the surface with paints applied to absorb the laser beam continuously.2. The 3-dimensional drillingThe mechanism of growth of the drilled hole was examined. Through observation and analysis, it was found that the growth could be attained by melted layer on the bottom of a hole. Then, a new crack-free and 3-dimensional YAG laser processing method was developed and discussed. The holes are always drilled along the incident direction of laser, a crack-free and 3-dimensional drilled hole was realized by changing the YAG laser incident direction.3. Development of deep drillingThis research conducted some examination on the deep drilling method of construction to realize a deeper 3-dimensional drilling with high accuracy and quality. As a result, the problem of a filled hole was solved by irradiating a laser from the upper and lower direction.4. The development of the 3-dimensional drilling method using a chemical operationThe experimental results proved that the adhesion and affected layer can be removed gradually from inside the hole by using an etching, which can give a high quality processing hole.This way makes the inner space and the spiral processing become possible in the glass. Therefore, the various effects such as the reduction of the production process and the number of parts can be expected.5. The application to the other materialThis research confirmed that it is possible to apply this 3-dimensional drilling method to soda lime glass and alkaline glass and so on. Less

近年来，在制造业中追求了产品，低成本，高产品混合和应与地球环境的和谐的额外价值。与传统的机械和化学处理不同的激光处理是通过收集光和高速灯的非接触性能，并且可以实现高精度的加工。此外，它是对地球环境的干净，作为一种可以节省加工的资源。因此，高度期望激光处理是一种处理新材料的一种方法，即微加工。因此，未来扩大激光处理的覆盖范围和新处理技术的开发的尝试持续了很多。这可能会期望成为新的加工技术，例如减少生产过程和零件数量，扩大材料的覆盖范围。这项研究的目的是通过提出新的3维激光处理方法来应用高质量和高精度的3维钻探到自由方向。意识到1。对于在工作场所的表面上创建无裂纹的加工，然后将熔体散布到空气中，必须使用无裂纹的加工方法。根据实验结果，发现当Yag激光束在表面上辐照并涂油漆以连续吸收激光束时，可以处理一个无裂纹的钻孔。2。检查了三维钻孔的钻孔生长机理。通过观察和分析，发现生长可以通过孔底部的熔化层来实现。然后，开发并讨论了一种新的无裂纹和3维YAG激光处理方法。孔总是沿激光的入射方向钻孔，通过更改YAG激光入射方向实现无裂纹和3维钻孔3。深入钻井研究的开发对深度钻井方法进行了一些检查，以高精度和质量实现更深入的三维钻孔。结果，通过从上和下方辐射激光器来解决一个填充孔的问题。4。使用化学操作的三维钻孔方法的开发实验结果证明，可以通过使用蚀刻来从孔内部逐渐去除粘合剂和受影响的层，这可以给出高质量的加工孔。这使得内部空间和螺旋处理在玻璃中成为可能。因此，可以预期的各种效果，例如减少生产过程和零件数量。5。对其他材料研究的应用证实，可以将这种三维钻孔方法应用于苏打石灰玻璃和酒精玻璃等。较少的

项目成果

D.Sawaki, J.Ikeno, O.Horiuchi, T.Kasai: "Three Dimensional Micro-assembly Technique Applying Laser Trapping"Proceedings of LPM2000. 110-114 (2000)

D.Sawaki、J.Ikeno、O.Horiuchi、T.Kasai：“应用激光捕获的三维微组装技术”LPM2000 论文集。

T.Hashimoto, J.Ikeno, O.horiuchi, T.Kasai: "Micro-processing of Glass"Proceeding of JSGE. ABTEC2000. 345-346 (2000)

T.Hashimoto、J.Ikeno、O.horiuchi、T.Kasai：《玻璃微加工》JSGE 论文集。

橋本隆寛,池野順一,堀内宰: "YAGレーザによるガラス表面の微細加工〜微細塑性加工の検討〜"精密工学会講演論文集. 220 (2000)

Takahiro Hashimoto、Junichi Ikeno、Osamu Horiuchi：“使用 YAG 激光对玻璃表面进行微加工 - 微塑料加工的检查 -”日本精密工程学会论文集 220 (2000)。

Y.Masugi, J.Ikeno, O.Horiuchi: "Three dimensional machining of Glass"Proceeding of JSPE. 331 (2000)

Y.Masugi、J.Ikeno、O.Horiuchi：“玻璃的三维加工”JSPE 论文集。

"Study on new arrangement technique of fine particles by laser beam (1st report, arrangement and motion control of fine particles in the water)"Transaction of the japan society of mechanical engineers. 65-636 (C). 3452-3457 (1999)

《利用激光束对微粒进行新排列技术的研究（第1次报告，水中微粒的排列和运动控制）》《日本机械工程学会学报》。