Study on a new three-dimensional laser micro-processing method using the difference in the permeation characteristic

利用渗透特性差异的三维激光微加工新方法研究

• 批准号: 11450055
• 负责人: IKENO Junichi
• 金额: $ 7.81万
• 依托单位: SAITAMA UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B).
• 财政年份: 1999
• 资助国家: 日本
• 起止时间: 1999 至 2000
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-11450055/
• 关键词: Laser processing; Three dimensional Micro-processing; Drilling; Hard and brittle material; Crack-free; Glass; YAG laser; Permeation characteristic; 3次元; 微細加工

In recent years, the additional value of product, low costs, high product-mix and proper-repetitive production and a harmony with the earth environment are pursued in the manufacturing industry. The laser processing which is different from the conventional mechanical and chemical processing has been by the collection light and the non-contact-ability of the light in a high-speed and can realize high accuracy machining. Moreover, it is clean to the earth environment, as a kind of resource which can save machining. Therefore, the laser processing is highly expected as a method of the processing of new material, the micromachining.However, if that the performance and the productivity of the laser equipment with high cost become better than that in the past hasn't been proved the introduction into the production line may be of high cost. Therefore the attempts to expand the coverage of the laser processing in the future and the development of a new processing technology are much regained.I … More f the free direction drilling in 3-dimensional becomes possible, the new feature can be added to the product. This can expect a big effect as the new processing technology such as the reduction of the production process and the number of parts, the expansion of the coverage of the material.The purpose of this research is to apply a high quality and high accuracy 3- dimensional drilling to the free direction by proposing a newly 3-dimensional laser processing method to Glass-ceramics.As a result, that the method shown below has been developed and the application of which into 3-dimensional drilling was realized.1. The crack-free processing methodIt was necessary to create a crack-free processing on the surface of workpiece and then to scatter the melt into the air. According to the experimental results, it was found that a crack-free drilled hole could be processed when YAG laser beam irradiated on the surface with paints applied to absorb the laser beam continuously.2. The 3-dimensional drillingThe mechanism of growth of the drilled hole was examined. Through observation and analysis, it was found that the growth could be attained by melted layer on the bottom of a hole. Then, a new crack-free and 3-dimensional YAG laser processing method was developed and discussed. The holes are always drilled along the incident direction of laser, a crack-free and 3-dimensional drilled hole was realized by changing the YAG laser incident direction.3. Development of deep drillingThis research conducted some examination on the deep drilling method of construction to realize a deeper 3-dimensional drilling with high accuracy and quality. As a result, the problem of a filled hole was solved by irradiating a laser from the upper and lower direction.4. The development of the 3-dimensional drilling method using a chemical operationThe experimental results proved that the adhesion and affected layer can be removed gradually from inside the hole by using an etching, which can give a high quality processing hole.This way makes the inner space and the spiral processing become possible in the glass. Therefore, the various effects such as the reduction of the production process and the number of parts can be expected.5. The application to the other materialThis research confirmed that it is possible to apply this 3-dimensional drilling method to soda lime glass and alkaline glass and so on. Less

近年来，制造业追求产品的附加值、低成本、高产品结构、适度重复生产以及与地球环境的和谐。激光加工不同于传统的机械和化学加工，它是利用光的集束性和光的非接触性进行高速加工，可以实现高精度加工。此外，它是清洁的地球环境，作为一种资源，可以节省加工。因此，激光加工作为一种新型材料微加工的加工方法被寄予厚望。然而，如果高成本的激光设备的性能和生产率比过去更好，并没有得到证明，引入生产线可能是高成本的。因此，在未来扩大激光加工的覆盖范围和开发新的加工技术的尝试有了很大的恢复。如果三维自由方向钻孔成为可能，则可以将新功能添加到产品中。随着新的加工技术的出现，如生产工艺和零件数量的减少，材料覆盖范围的扩大，这将产生很大的影响。本研究的目的是通过提出一种新的玻璃陶瓷三维激光加工方法，实现高质量、高精度的自由方向三维钻孔。因此，开发了如下所示的方法，并将其应用于三维钻井。无裂纹加工方法必须在工件表面形成无裂纹加工，然后将熔体分散到空气中。实验结果表明，YAG激光束照射在材料表面，涂上连续吸收激光束的涂料，可以加工出无裂纹的钻孔。对三维钻孔的生长机理进行了研究。通过观察和分析，发现可以通过在孔的底部熔化层来实现生长。在此基础上，提出了一种无裂纹三维YAG激光加工新方法。孔始终沿激光入射方向打孔，通过改变YAG激光入射方向，实现了无裂纹的三维打孔。为实现高精度、高质量的更深的三维钻孔，本研究对建筑的深钻孔方法进行了一些探索。通过上下两个方向的激光照射，解决了填充孔的问题。实验结果表明，采用刻蚀法可以逐渐去除孔内的附着层和影响层，从而得到高质量的加工孔。这种方式使得玻璃内部空间和螺旋加工成为可能。因此，各种影响，如减少生产过程和零件数量是可以预期的。在其他材料上的应用本研究证实了将这种三维钻孔方法应用于碱石灰玻璃和碱性玻璃等是可能的。少

项目成果

橋本隆寛, 池野順一, 中野康範, 堀内宰, 河西敏雄: "YAGレーザによるガラス表面の微細加工(第3報)〜任意形状の凸部平面創成〜"精密工学会講演論文集. 277 (2000)

Takahiro Hashimoto、Junichi Ikeno、Yasunori Nakano、Osamu Horiuchi、Toshio Kawanishi：“使用 YAG 激光进行玻璃表面的微加工（第 3 次报告）- 任意形状的凸面的创建 -”日本精密工程学会论文集 277（2000 年）。

D.Sawaki, J.Ikeno, O.Horiuchi, T.Kasai: "Three Dimensional Micro-assembly Technique Applying Laser Trapping"Proceedings of LPM2000. 110-114 (2000)

D.Sawaki、J.Ikeno、O.Horiuchi、T.Kasai：“应用激光捕获的三维微组装技术”LPM2000 论文集。

T.Hashimoto, J.Ikeno, O.horiuchi, T.Kasai: "Micro-processing of Glass"Proceeding of JSGE. ABTEC2000. 345-346 (2000)

T.Hashimoto、J.Ikeno、O.horiuchi、T.Kasai：《玻璃微加工》JSGE 论文集。

橋本隆寛,池野順一,堀内宰: "YAGレーザによるガラス表面の微細加工〜微細塑性加工の検討〜"精密工学会講演論文集. 220 (2000)

Takahiro Hashimoto、Junichi Ikeno、Osamu Horiuchi：“使用 YAG 激光对玻璃表面进行微加工 - 微塑料加工的检查 -”日本精密工程学会论文集 220 (2000)。

"Study on new arrangement technique of fine particles by laser beam (1st report, arrangement and motion control of fine particles in the water)"Transaction of the japan society of mechanical engineers. 65-636 (C). 3452-3457 (1999)

《利用激光束对微粒进行新排列技术的研究（第1次报告，水中微粒的排列和运动控制）》《日本机械工程学会学报》。