Study on a new three-dimensional laser micro-processing method using the difference in the permeation characteristic

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In recent years, the additional value of product, low costs, high product-mix and proper-repetitive production and a harmony with the earth environment are pursued in the manufacturing industry. The laser processing which is different from the conventional mechanical and chemical processing has been by the collection light and the non-contact-ability of the light in a high-speed and can realize high accuracy machining. Moreover, it is clean to the earth environment, as a kind of resource which can save machining. Therefore, the laser processing is highly expected as a method of the processing of new material, the micromachining.However, if that the performance and the productivity of the laser equipment with high cost become better than that in the past hasn't been proved the introduction into the production line may be of high cost. Therefore the attempts to expand the coverage of the laser processing in the future and the development of a new processing technology are much regained.I … More f the free direction drilling in 3-dimensional becomes possible, the new feature can be added to the product. This can expect a big effect as the new processing technology such as the reduction of the production process and the number of parts, the expansion of the coverage of the material.The purpose of this research is to apply a high quality and high accuracy 3- dimensional drilling to the free direction by proposing a newly 3-dimensional laser processing method to Glass-ceramics.As a result, that the method shown below has been developed and the application of which into 3-dimensional drilling was realized.1. The crack-free processing methodIt was necessary to create a crack-free processing on the surface of workpiece and then to scatter the melt into the air. According to the experimental results, it was found that a crack-free drilled hole could be processed when YAG laser beam irradiated on the surface with paints applied to absorb the laser beam continuously.2. The 3-dimensional drillingThe mechanism of growth of the drilled hole was examined. Through observation and analysis, it was found that the growth could be attained by melted layer on the bottom of a hole. Then, a new crack-free and 3-dimensional YAG laser processing method was developed and discussed. The holes are always drilled along the incident direction of laser, a crack-free and 3-dimensional drilled hole was realized by changing the YAG laser incident direction.3. Development of deep drillingThis research conducted some examination on the deep drilling method of construction to realize a deeper 3-dimensional drilling with high accuracy and quality. As a result, the problem of a filled hole was solved by irradiating a laser from the upper and lower direction.4. The development of the 3-dimensional drilling method using a chemical operationThe experimental results proved that the adhesion and affected layer can be removed gradually from inside the hole by using an etching, which can give a high quality processing hole.This way makes the inner space and the spiral processing become possible in the glass. Therefore, the various effects such as the reduction of the production process and the number of parts can be expected.5. The application to the other materialThis research confirmed that it is possible to apply this 3-dimensional drilling method to soda lime glass and alkaline glass and so on. Less