New Assembly Technique of Three Dimensional Micro-structure by YAG Laser Beam

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The focus of this study is on a newly developed micro-assembly technique by YAG laser beam. Silica fine particle is levitated and can be trapped along optical axis in the air, as it on soda glass plate is irradiated single-beam from upper. The levitation and the trapping in the air are discovered for the first time. Furthermore, we find out that a occurrence of the levitation is caused by some other unknown factors besides gradient of radiation force. The trapped particle can be manipulated in fully three dimensional orientation. This new 3D-manipulation technique is expected to be an effective handling technique for micro-assembly in the future. Hence assembling of a micro-structure, which is constructed by fine particles, is verified with the presented technique. In present technique, particles can be assembled in horizontal and vertical direction. Based on the horizontal and vertical assembly capability, 3D micro-structure like tetrahedron and so on, can be created.