New Assembly Technique of Three Dimensional Micro-structure by YAG Laser Beam

本文研究的重点是一种新发展起来的基于激光的微装配技术。二氧化硅微粉被单光束从上方照射到纯碱玻璃板上，在空气中沿光轴漂浮并被捕获。首次发现了空气中的悬浮和滞留现象。此外，我们还发现，产生悬浮的原因除了辐射力的梯度外，还有其他一些未知因素。被捕获的粒子可以在完全三维的方向上进行操作。这种新的三维操纵技术有望成为未来微装配的一种有效的处理技术。从而验证了用该技术组装由细小颗粒构成的微结构的可行性。在目前的技术中，颗粒可以在水平和垂直方向上组装。基于水平和垂直装配能力，可以创建四面体等三维微结构。

The focus of this study is on a newly developed micro-assembly technique by YAG laser beam. Silica fine particle is levitated and can be trapped along optical axis in the air, as it on soda glass plate is irradiated single-beam from upper. The levitation and the trapping in the air are discovered for the first time. Furthermore, we find out that a occurrence of the levitation is caused by some other unknown factors besides gradient of radiation force. The trapped particle can be manipulated in fully three dimensional orientation. This new 3D-manipulation technique is expected to be an effective handling technique for micro-assembly in the future. Hence assembling of a micro-structure, which is constructed by fine particles, is verified with the presented technique. In present technique, particles can be assembled in horizontal and vertical direction. Based on the horizontal and vertical assembly capability, 3D micro-structure like tetrahedron and so on, can be created.