Development of nano-CMM (Coordinate Measuring Machine with Nanometer Resolution)

设计并制作了新型纳米三坐标测量机X工作台，该工作台采用铁制材料，并增加了新的部件进行改进。利用激光干涉仪对转台的性能进行了测试。通过一系列的热试验，研究了该材料的热应力特性。在Z工作台上安装了一套用于扫描金属显微镜的测头系统，并进行了三维测量试验，得到以下结果：（1）用激光干涉仪和光学平面测量方法，估计X工作台的直线度为100nm，重复性为20nm。(2)设计了一种新型的平行弹簧Z工作台。(3)Z工作台的直线度为400 nm，重复性为40 nm. (4)在Z工作台上安装了一个探测系统，在该系统上可以进行纳米级分辨率的三维测量。(5)系统的精度受探测系统的影响最大。(6)从热分析来看，仪器的材料和热环境对纳米尺度的测量至关重要。

New X table of nano-CMM which made of iron and added newly parts for improvements was designed and made. The performances of the table was tested by the laser interferometer. Then, the thermal force properties of the bable were investigated by the series of thermal tests. A probing system for SMM was installed on Z table and three dimensional measureing tests were carried out.From these tests, we an reach the following results,(1) We estimate the straightness of X table is 100 nm and the repeatability is 20nm, from the testes by the laser intrferometer and measuring an optical flat.(2) New Z table with parallel springs was designed.(3) We estimate the straightness of Z table is 400 nm and the repeatability is 40 nm.(4) using a probing system was installed on Z table, it is found that three dimensional measuring tests with nanometer resolution can be done in the systam.(5) The accuracy of the system is most influenced by the probing system.(6) From thermal analysis, the material and the thermal circumstance of the instruments are important for nanameter measurements.