Study on evaluation method of uncertainty in coordinate metrology

坐标计量不确定度评定方法研究

• 批准号: 13450099
• 负责人: TAKAMASU Kiyoshi
• 金额: $ 7.04万
• 依托单位: The University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2003
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-13450099/
• 关键词: uncertainty of measurement; coordinate measuring machine; virtual CMM; evaluation of accuracy; 三次元座標測定機; 形状測定

The total theoretical methods for evaluation of uncertainty in coordinate metrology were established. Specially, the uncertainty from the strategy of measurement and the form deviation of a measured workpiece was evaluated using simulations and statistical experiments.(1)Uncertainty from the form deviationThe specified autocorrelation functions were obtained to circle features. We made several simulations to measure the circle features using the specified measuring strategies. From the results of the simulations, the uncertainties can be calculated in the strategies of measurements such as number of measuring points and positions.(2)Theoretical examinations on influences of form deviationThe uncertainties can theoretically calculated using variance and covariance of the error matrix on the least squares method. These uncertainties were compared with the results of simulations.(3)Measuring experiments using Coordinate Measuring MachineSeveral circle features were measured using CMM. The results of measurements were compared with the results of simulations. It isFrom these experiments and simulations, we confirmed our proposed methods can be applicable to coordinate metrology.

建立了坐标计量不确定度评价的总体理论方法。特别是，通过模拟和统计实验评估了测量策略的不确定性和被测工件的形状偏差。(1)形状偏差的不确定性针对圆特征获得了指定的自相关函数。我们进行了多次模拟，使用指定的测量策略来测量圆特征。根据模拟结果，可以计算出测量点数量和位置等测量策略中的不确定性。(2)形状偏差影响的理论检验可以利用最小二乘法误差矩阵的方差和协方差从理论上计算不确定性。将这些不确定性与模拟结果进行了比较。(3)三坐标测量机测量实验利用三坐标测量机测量了几个圆特征。将测量结果与模拟结果进行比较。从这些实验和模拟中，我们证实了我们提出的方法可以适用于坐标计量。

项目成果

K.Takamasu, K.Shimojima, R.Furutani, O.Sato: "Artifact Calibration of Coordinate Measuring Machine (1st Report) -Kinematic Calibration -"Journal Japan Society for Precision Engineering. 69-6. 851-855 (2003)

K.Takamasu、K.Shimojima、R.Furutani、O.Sato：“坐标测量机的工件校准（第 1 次报告）-运动学校准 -”日本精密工程学会杂志。

M.Abbe, K.Takamasu, S.Ozono: "Reliability on calibration of CMM"easurement. 33・4. 359-368 (2003)

M.Abbe、K.Takamasu、S.Ozono：“CMM 校准的可靠性”33・4 (2003)。

下嶋賢, 古谷涼秋, 大園成夫, 高増潔, 平木雅彦, 荒木健司: "3次元測定機の不確かさ推定に関する研究(第1報) -多関節型3次元測定機の機構パラメータの算出と不確かさ推定-"精密工学会誌. 69・6. 841-845 (2003)

Ken Shimojima、Ryoaki Furuya、Shigeo Ohzono、Kiyoshi Takamasu、Masahiko Hiraki、Kenji Araki：“三维测量机不确定度估计研究（第一份报告）——铰接式三维测量机机械参数的计算和不确定度估计——”日本精密工程学会杂志 69・6（2003 年）。

K.Shimojima, R.Furutani, K.Takamasu, S.Ozono: "The Estimation Method of Uncertainty of Articulated Coordinate Measuring Machine"IEEE ICIT' 02. 411-415 (2002)

K.Shimojima、R.Furutani、K.Takamasu、S.Ozono：“铰接坐标测量机不确定度的估计方法”IEEE ICIT 02. 411-415 (2002)

郭志徹, 高増潔, 山本明弘, 和田智之, 洲之内啓, 加瀬究, 田代英夫: "波長走査干渉計における信号処理"精密工学会誌. 69・6. 831-835 (2003)

Shitetsu Kaku、Kiyoshi Takamasu、Akihiro Yamamoto、Tomoyuki Wada、Kei Sunouchi、Takashi Kase、Hideo Tashiro：“波长扫描干涉仪中的信号处理”日本精密工程学会杂志 69・6（2003 年）。