Study on uncertainty of measurement of coordinate metrology for next generation manufacturing system

下一代制造系统坐标测量测量不确定度研究

• 批准号: 16206025
• 负责人: TAKAMASU Kiyoshi
• 金额: $ 17.14万
• 依托单位: The University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 2004
• 资助国家: 日本
• 起止时间: 2004 至 2007
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-16206025/
• 关键词: uncertainty of measurement; coordinate measuring machine; coordinate metrology; accuracy evaluation; next generation manufacturing system; calibration; 不確かさ; 三次元計測; ナノメートル計測

1. Geometrical torelancing for GPS The total theoretical methods for evaluation of uncertainty in coordinate metrology were established. Specially, the uncertainty from the strategy of measurement and the form deviation of a measured workpiece was evaluated using simulations and statistical experiments.(1) Uncertainty from the form deviation The specified autocorrelation functions were obtained to circle features. We made several simulations to measure the calculated in the strategies of measurements such as number of measuring points and positions.(2) Theoretical examinations on influences of form deviation The uncertainties can theoretically calculated using variance and covariance of the error matrix on the least squares method. These uncertainties were compared with the results of simulations.(3) Measuring experiments using Coordinate Measuring Machine Several circle features were measured using CMM. The results of measurements were compared with the results of simulations.2. Evaluation of uncertainty in coordinate metrology From these experiments and simulations, we confirmed our proposed methods can be applicable to coordinate metrology.(1) Evaluation of uncertainty for CMM after calibration(2) Uncertainty from form deviation of measured features(1) Evaluation of uncertainty for CMM after calibration(2) Uncertainty from form deviation of measured features

1.GPS的几何相关性建立了坐标测量不确定度评定的完整理论方法。特别是，通过仿真和统计实验对测量策略和被测零件形状偏差的不确定度进行了评定。(1)形状偏差的不确定度由形状偏差得到指定的圆特征自相关函数。从理论上考察了形状偏差对测量不确定度的影响，利用最小二乘法中误差矩阵的方差和协方差可以从理论上计算不确定度。利用三坐标测量机进行测量实验，利用三坐标测量机测量了几种圆的特征。并将测量结果与模拟结果进行了比较。坐标测量不确定度的评定通过这些实验和仿真，我们证实我们提出的方法可以应用于坐标计量。(1)三坐标测量机定标后的不确定度评定(2)测量特征形状偏差的不确定度评定(1)三坐标测量机定标后的不确定度评定(2)测量特征形状偏差的不确定度评定

项目成果

座標測定機のアーティファクト校正(第3報)-校正後の測定の不確かさの推定-

三坐标测量机的工件校准（第三次报告） - 校准后测量不确定度的估计 -

• 发表时间: 2005
• 期刊: 精密工学会誌 71・7
• 作者: Akio MIYASATO;Chitsakon PAKJAMSAI;Ichiro IMAE;Yusuke KAWAKAMI;高増潔
• 通讯作者: 高増潔

Evaluation of Thrust Force and Positioning Accuracy of a New Linear Motor

新型直线电机的推力和定位精度评估

• 发表时间: 2005
• 期刊: Key Engineering Materials 295-296
• 作者: K. Funaki;T. Kubo;A. Nakao;S. Sato;M. Matsuo;K. Kajikawa;K. Tanaka;M. Okada;H. Kumakura;H. Hayashi;X.Chen
• 通讯作者: X.Chen

Development of the Method for Estimating Cardiac Vagal Activity in Real-Time during Body Motion and Generation of the Interactive CG

身体运动过程中实时估计心脏迷走神经活动的方法的开发和交互式 CG 的生成

• 发表时间: 2007
• 期刊: IEEJ Trans. EIS 127,10
• 作者: Kiyoshi Kotani;Fumiaki Iida;Tomohiro Akagawa;Takashi Saitoh Yasuhiko Jimbo;Yoichiro Kawaguchi;Kiyoshi Takamasu
• 通讯作者: Kiyoshi Takamasu

Uncertainty Estimation Usin Monte-Carlo Method Constrained by Correlations of the Data

受数据相关性约束的蒙特卡罗方法的不确定性估计

• 发表时间: 2008
• 期刊: Key Engineering Materials 381-382
• 作者: M.Nara;M.Abbe K.Takamasu
• 通讯作者: M.Abbe K.Takamasu

近接場光を用いたナノインプリント残膜測定法に関する研究(第3報)-偏光特性を利用した残膜厚計測-

利用近场光的纳米压印残膜测量方法的研究（第3次报告）-利用偏振特性的残膜厚度测量-

• 发表时间: 2007
• 作者: 南口 修一;臼杵 深;高橋 哲;高増 潔
• 通讯作者: 高増 潔