Development of the coordinate measuring machine with nanometer resolution and establishment of the method for evaluation of the accuracy

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Nobel concepts to development of nano-CMM (Coordinate Measuring Machine with nanometer resolution) were established and the accuracy evaluation methods were proposed to apply the nano-CMM in industry.(1) Improvement of nano-CMMWe developed new nano-CMM made of low thermal expansion steel. The improvements of the new nano-CMM as follows:・ Low thermal expansion materials were used for the body and the scale of the nano-CMM・ Friction drive system for drivers of the nano-CMM(2) Evaluation of the stage of nano-CMMThe following experiments were done to evaluate the accuracy of the stages・ Evaluation of the system using nano scales and probing system for CMM・ Measure yawing, pitching and rolling errors of the stages.The straightness of the stage is 40 nm and the repeatability of the stage is 10 nm. And an optical flat and aspheric lens were measured by nano-CMM.(3) Thermal drift of nano-CMMWe evaluate the thermal drift of nano-CMM.