Basic Study on Ultra-Precision Self-Profile-Generation

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A new ultra-precision self-profile-generation system by applying the technique of software datum has been proposed. In this research, we first developed a new kind of lapping probe that simultaneously acts as a force-controlled displacement probe. This probe, which utilize the principle of AFM,consists of a force sensing lever with a lapping pad attached at the center of the laver and optical detectors to measure the inclination of the lever. Both ends of the lever are held by PZT actuators. The machining force can be controlled by adjusting the inclination of the lever using the PZT actuators. On the other hand, the profile height can also be obtained from the inclination of the lever. Calibration results showed that the developed probe has a displacement resolution of 10nm. Next, we investigated the possibility of using three of the new lapping and measuring probes for scanning measurements of lapped profiles. The method of profile measurements is based on the 3-point method for constructing software datum. Profile measurements can be realized with the accuracy of the probe by canceling the pitching error and the translational error in the scanning motion using the information of the output data of the three probes. Computer simulations showed that abrasion amount of the lapping pad which results in a parabolic error in the evaluated profile with the method of software datum can be detected and compensated by using the proposed technique of absolute profile measurements. The effectiveness of the new system has also been confirmed by profile measurement and machining experiments.