A new method of position and attitude detection based on an angle sensor

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The objectives of this research is to propose a new multi-degrees-of-freedom encoder system by combining a 2-dimensional angle sensor and a 2-dimensional angle grid on which 2D sinusoidal angle patterns are generated. At first, we developed first prototype of surface encoder system to detect the X- and the Y- directional position/displacement with combining the newly developed angle sensor that could detect the local slope and the angle grid made with Fast tool servo. Second, modified surface encoder employing a scanning laser beam type angle sensor and new position detection method using interpolations of time domain are proposed. By using these, the surface encoder system has the ability of detecting pitch, roll and yaw in addition to the X- and the Y- directional positions : thus, it has been shown that 5DOF motions can be detected by this method. Furthermore, scanning type angle sensor has the merit of reducing the form error of the angle grid. Third, we propose the self-calibration method of the pitch of angle grid and have the result that position detection error can be reduced from 15 μm to 1 μm. Fourth, the new angle sensor that employ multi-spot light source was proposed and it was confirmed this sensor is effective to reduce the affection of form error of angle grid. At last, we combine the methods mentioned above and develop the multi-spot scanning type 2-dimensional angle sensor. With respect to the angle grid, a new method evaluating the form error of angle grid using 2-dimensional FFT has been developed. "Moreover, by applying this method, the form error induced by tool-shape has been reduced definitely. As an application of surface encoder, surface motor driven XYθz stage controlled by output signal of surface encoder was constructed and it is confirmed surface encoder is effective to make compact and simple the stage system.