Straightness Measurement of Long Cylinder for Construction of Linear Collider
Straightness Measurement of Long Cylinder for Construction of Linear Collider
批准号:
10555034
负责人:
KIYONO Satoshi
金额:
$8.32万
依托单位:
依托单位国家:
日本
项目类别:
Grant-in-Aid for Scientific Research (B)
财政年份:
1998
资助国家:
日本
项目状态:
已结题
起止时间:
1998 至 1999
中文摘要
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英文摘要
The purpose of this study is to develop an accurate straightness measuring system for the purpose of constructing a next generation of linear collider. This linear collider is approximately 20km in length and is going to be constructed by aligning components consisting of three cylinders with a length of 1.5m. To construct the entire linear collider straight enough, it is necessary to align each component with a straightness in approximately 10 microns. For this purpose, an accurate measurement system, which can measure the straightness of long cylinders up to 5 m with an accuracy of several microns, must be established. Considering the ratio of accuracy to length and the measuring environment, scanning probe technique is the only approach to satisfy this request. In this study, a new scanning multi-probe method for accurately measuring straightness profiles has been developed. This scanning probe method is developed from the traditional three-probe method, which can measure the profil … More e accurately without the influence of motion errors of the scanning stage. In the three-probe method, zero-adjustment errors between probes are the largest error source, and so far there was no good methods to accurately adjust the zero-adjustment error. In this study, a new method was proposed, in which two sets of three-probe method sensor units are used. The two sensor units are placed in the two sides of the collider component and are used to scan the two opposed generatrices of the component simultaneously. One of the cylinders in the component is then rotated 180 degrees and scanned by the probe units again. The zero-adjustment error, as well as the straightness profiles of the component can be accurately evaluated from the output data of the two measurements. An experimental setup based on the proposed method was constructed to measure the collider component of 5m in length. Six capacitance probes with a resolution of several nanometers were employed. The probe distance was set to be 150 mm. The straightness of the entire component was measured with an accuracy of several microns, and this indicated the feasibility of the developed straightness measuring system. Less
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Jun Yokoyama, Wei Gao, Satoshi Kiyono and Nobuteru Hitomi: "Ultra-precision metrology of Straightness of long cylinder (2nd report)"Proc. of JPSE Autumn Conf.. 456 (1999)
Jun Yokoyama、Wei Gaus、Satoshi Kiyono 和 Nobuteru Hitomi:“长圆柱体直线度的超精密测量(第二次报告)”Proc.
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Jun Yokoyama, Wei Gao, Satoshi Kiyono and Nobuteru Hitomi: "Ultra-precision metrology of Straightness of long cylinder (1st report)"Proc. of JPSE Autumn Conf.. 78 (1998)
Jun Yokoyama、Wei Gaus、Satoshi Kiyono 和 Nobuteru Hitomi:“长圆柱体直线度的超精密测量(第 1 次报告)”Proc.
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Wei Gao and Satoshi Kiyono: "On the zero-adjustment between probes in multi-probe methods"Proc. of JPSE Autumn Conf.. 455 (1999)
高伟和清野聪:“论多探针方法中探针之间的调零”Proc.
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高偉,清野慧: "多点法におけるゼロ点調整誤差補正について"1999年度精密工学会秋季大会学術講演会講演論文集. 455 (1999)
Takayoshi、Kiyono Kei:“关于多点法中的零点调整误差修正”1999年日本精密工程学会秋季会议学术会议论文集455(1999)。
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横山潤,高偉,清野慧,人見宣輝: "長尺円筒の中心線真直形状の超精密測定に関する研究(第3報)"2000年度精密工学会春季大会学術講演会講演論文集. (発表予定). (2000)
Jun Yokoyama、Takayoshi、Kei Seino、Nobuteru Hitomi:“长圆柱体中心线直线形状的超精密测量研究(第3次报告)”2000年日本精密工程学会春季会议学术会议论文集((2000)。
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共 13 条
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Basic Study on Ultra-Precision Self-Profile-Generation
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Ultra-Precision Angle Sensor Using Critical Prisms and Its Self-Calibration System
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Precision Measuring System for the Error of Synchronism of Two Rotating Shafts
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Research of a fast and accurate measuring method for guide planes of ultra precision machine
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