Study on Industrialization of Precise Non-contact Type Coordinate Measuring Machine with 5 Controlled Axs

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A high precision 5 axs controllable non-contact-type spatial coordinate measuring machine is developed. Although some non-contact-type spatial coordinate measuring machines are on the market, they don't have enough flexibility due to the lack of probe motion degree of freedom and useful measuring software. In this study, we develope a new machine which has enough precision and flexibility to satisfy requirements of practial use.A new probe inclination system with high precision rotary encoder is designed and an each axis control system is developed to obtain accurate and flexible motions. These system are applied to a 4 axs controllable measuring machine (Zeiss ZKM250) and the performance of remodeled 5 axs controllable machine is inspected .Each axis precision of positioning by the control system are less than 0.17mum(x, y) and 2.5sec(xw, yw) for repeatability in standard deviation.By the non-contact-type probe, microscopic images including edges of the specimen are captured into a computer. The coordinate of the edges are detected with the images. To obtain high detection resolution smaller than one pixel size (about 5mum) of captured images, the sub pixel image processing method is developed. By this method, the probing system comes up to sub-micro meter resolution.In order to improve the utility of this machine, a comprehensive automatic precision measuring software for screws and gear-hobs is developed. The precision of measurement by this software for the lead error in a screw is 0.15mum for repeatability in standard deviation. The required time for one measurement of 6 threads screw is 10 minutes. It is found that the comprehensive automatic measuring software shortens the measuring time and improves the precision of repeatability significantly compared with the conventional manual measurement.It is shown by this study that this 5 axs controllable non-contact-type spatial coordinate measuring machine has high precision and high usability.