Study on Industrialization of Precise Non-contact Type Coordinate Measuring Machine with 5 Controlled Axs

研制了一种高精度5轴可控非接触式空间坐标测量机。尽管市场上有一些非接触式空间坐标测量机，但由于缺乏探头运动自由度和实用的测量软件，其灵活性不够。在本研究中，我们开发了一种具有足够的精度和灵活性来满足实际使用要求的新型机床，设计了一种采用高精度旋转编码器的新型测头倾斜系统，并开发了一套各轴控制系统，以实现精确而灵活的运动。将该系统应用于一台四轴可控测量机(蔡司ZKM250)，并对改造后的五轴可控机床的性能进行了检测。控制系统的每轴定位精度分别小于0.17微米(x，y)和2.5秒(xw，yw)，标准偏差的重复性。利用图像检测边缘的坐标。为了获得小于1个像素尺寸(约5微米)的高探测分辨率，提出了亚像素图像处理方法。为了提高机床的使用效率，开发了螺杆、齿轮滚刀综合自动精密测量软件。该软件对螺杆导程误差的测量精度为0.15微米，重复性为标准差。一次测量6个螺纹螺杆所需的时间为10分钟。结果表明，与传统的手工测量相比，综合自动测量软件大大缩短了测量时间，提高了测量的重复性精度。研究表明，该5轴可控非接触式空间坐标测量机具有高精度和高可用性。

A high precision 5 axs controllable non-contact-type spatial coordinate measuring machine is developed. Although some non-contact-type spatial coordinate measuring machines are on the market, they don't have enough flexibility due to the lack of probe motion degree of freedom and useful measuring software. In this study, we develope a new machine which has enough precision and flexibility to satisfy requirements of practial use.A new probe inclination system with high precision rotary encoder is designed and an each axis control system is developed to obtain accurate and flexible motions. These system are applied to a 4 axs controllable measuring machine (Zeiss ZKM250) and the performance of remodeled 5 axs controllable machine is inspected .Each axis precision of positioning by the control system are less than 0.17mum(x, y) and 2.5sec(xw, yw) for repeatability in standard deviation.By the non-contact-type probe, microscopic images including edges of the specimen are captured into a computer. The coordinate of the edges are detected with the images. To obtain high detection resolution smaller than one pixel size (about 5mum) of captured images, the sub pixel image processing method is developed. By this method, the probing system comes up to sub-micro meter resolution.In order to improve the utility of this machine, a comprehensive automatic precision measuring software for screws and gear-hobs is developed. The precision of measurement by this software for the lead error in a screw is 0.15mum for repeatability in standard deviation. The required time for one measurement of 6 threads screw is 10 minutes. It is found that the comprehensive automatic measuring software shortens the measuring time and improves the precision of repeatability significantly compared with the conventional manual measurement.It is shown by this study that this 5 axs controllable non-contact-type spatial coordinate measuring machine has high precision and high usability.