Development of high precision coordinate measurement machine with internal monitoring and thermal deformation compensation capability

开发具有内部监控和热变形补偿能力的高精度三坐标测量机

• 批准号: 07555357
• 负责人: NAGAO Takaaki
• 金额: $ 1.22万
• 依托单位: The University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1996
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07555357/
• 关键词: Coordinate Measurement Machine; Thermal Deformation; Deformation Sensor; Variable Temperature Environment; Neural Network; Genetic Algorithm; On-One Site; Internal Monitoring; 広範囲高精度測定; 原子間力顕微鏡; 粗動機構; 微動機構; ピエゾアクチュエータ; ナノブロック; ニューラル・ネットワーク

To measure a mechanical part in high accuracy, a coordinate measurement machine (CMM) is generally located in the constant temperature room. However, it is rather difficult to locate a manufacturing tool in the constant temperature room. Therefore, clamp and unclamp sequences are repeated for machining and measurement. It reduces the machining accuracy. To overcome the problem, a coordinate measurement machine with high accuracy even in the variable temperature condition was developed in this research.Ten deformation sensors were attached on the structure of the CMM.As the deformation sensor is made of super-invar material with very low thermal expansion, only the thermal distortion of the machine itself is measured without influence of the thermal changes in the environment or in the machine structure.In the experiment the standard gauge was made using super-invar material. To compensate for the thermal deformation, a measurement space compensation matrix was prepared. Each element of the compensation matrix was calculated by a neural network integrated with genetic algorithm. The input to the neural network is the output from deformation sensors and temperature information of air and optical scales.Edge length and angle between two edges were maintained less than 15% and 30%, respectively.

为了高精度地测量机械零件，坐标测量机（CMM）通常位于恒温室中。然而，在恒温室中定位制造工具相当困难。因此，重复夹紧和松开顺序进行加工和测量。降低了加工精度。为了解决这一问题，本研究开发了一种在变温条件下仍具有高精度的三坐标测量机，在三坐标测量机的结构上安装了10个变形传感器，由于变形传感器采用热膨胀系数很小的超因瓦材料，仅测量机器本身的热变形，而不受环境或机器中的热变化的影响实验中用超因瓦材料制作了标准应变片。为了补偿热变形，准备了测量空间补偿矩阵。补偿矩阵的每个元素由一个神经网络结合遗传算法计算。神经网络的输入为变形传感器的输出以及空气秤和光学秤的温度信息，边缘长度和两边缘之间的夹角分别保持在15%和30%以内。

项目成果

Okumura, T., Mitsuishi, M., Nagao, T., Nakao, M., Fukui, T.and Yoshioka, H.: ""High precision coordinate measurement machine in variable temperature environment, "" Prepr.Jpn.Soc.Prec.Eng.(Autumn Meeting). 559-560 (1995)

Okumura, T.、Mitsuishi, M.、Nagao, T.、Nakao, M.、Fukui, T. 和 Yoshioka, H.：““可变温度环境下的高精度坐标测量机”，“Prepr.Jpn.Soc.”

Okumura,T.,et al.: "Thermal deformation compensation for a CMM using internal monitoring method" Proceedings of the 3rd CIRP Workshop on Design and Implementation of Intelligent Manufacturing Systems. 3. 214-217 (1996)

Okumura,T.,et al.：“使用内部监控方法对 CMM 进行热变形补偿”第三届 CIRP 智能制造系统设计与实施研讨会论文集。

奥村努,光石衛,長尾高明,中尾政之,福井豊治,吉岡裕樹: "変温環境における三次元測定機の高精度化" 1995年度精密工学会秋季大会学術講演会論文集. 559-560 (1995)

Tsutomu Okumura、Mamoru Mitsuishi、Takaaki Nagao、Masayuki Nakao、Toyoharu Fukui、Hiroki Yoshioka：“提高可变温度环境下坐标测量机的精度”1995 年日本精密工程学会秋季会议学术会议论文集 559-560（1995 年）。 ) )

Mitsuishi,M.,et al.: "System construction for intelligent manufacturing" Proceedings of the 3rd CIRP Workshop on Design and Implementation of Intelligent Manufacturing Systems. 3. 51-65 (1996)

Mitsuishi,M.,et al.：“智能制造的系统构建”第三届 CIRP 智能制造系统设计与实现研讨会论文集。

Mitsuishi, M., et al.: "System construction for intelligent manufacturing" Proceedings of the 3nd CIRP Workshop on Design and Implementation of Intelligent Manufacturing Systems. 51-65 (1996)

Mitsuishi, M., et al.：“智能制造的系统构建”第三届 CIRP 智能制造系统设计与实现研讨会论文集。