Negative-Ion Beam Material Processing Techniques

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l.High Current Negative-Ion Extraction and Acceleration Techniques for Negative-Ion ImplanterA lens equipped just after an extractor and charge compensation by introduced gas were effective for beam divergence due to space charge of high current ion beam. A method of gas supply brought a new production of mA-class negative ions such as F,O,and CN in our RF plasma-sputter-type heavy negative-ion source. With this ion source, a negative-ion implanter was developed which could accelerate negative ions up to 100keV.2.Negative-Ion Implantation Technique and Application to Material ProcessingIn the negative-ion implantation, a surface potential of insulators is only several volts due to formation of an electric double layr during implantation. This is a charging-free implantation method. (1) non-scattering and uniform negative-ion implantation method for powders was developed, and (2) negative-ion implantation was found to control biocompatibility of polymers used in medical and biological f … More ields.3.Deceleration Technique for Low Energy Negative-Ion and Negative-Ion Beam Deposition ApparatusDeceleration just before substrate was effective, and could suppress beam divergence. We constructed a negative-ion beam deposition apparatus in an ultra-high vacuum and an negative-ion etching system.4.Application of Low-Energy Negative-Ion Beams to Material ProcessingAs material processing technique, we investigated ion beam deposition and etching by using negative-ion beam.(1) C and CN negative-ion beam deposition at a low energy was found to create metastable material films such as diamond-like carbon and carbon nitride.(2) Fluorine-negative-ion etching at a low energy could effectively etch Si and SiO_2 film with a low damage.Thus, we investigated techniques of acceleration and deceleration of a high-current negative ion beam and developed negative ion apparatus. Negative-ion beam techniques of low energy deposition, etching and high energy implantation was established as material processing techniques. Less