Research on Evaluation of Adhesive Strength of Thin Film Based on Micromechanics
基于微观力学的薄膜粘合强度评价研究
基本信息
- 批准号:08455050
- 负责人:
- 金额:$ 5.18万
- 依托单位:
- 依托单位国家:日本
- 项目类别:Grant-in-Aid for Scientific Research (B)
- 财政年份:1996
- 资助国家:日本
- 起止时间:1996 至 1997
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
1.Adhesive strength of thin diamond film was investigated based on the adhesion of microscopic nuclei appeared on the substrate in the initial stage of chemical vapor deposition. The microscopic adhesive strength of these individual nuclei was successfully evaluated by being scratched off in an electron microscope.2.The ultrasonic wave transmission has been examined in order to find the relation between the transmission of ultrasonic angle beam and the adhesive strength of thin film. By comparing the experimental results with the results obtained by theoretical models, the transmission of ultrasonic wave was revealed to be influenced by the character of shear stress transmission through the interface, which ensured that the ultrasonic angle beam technique presented here was able to evaluate quantitatively the adhesion of thin film.3.The adhesive strength has been examined in connection to a simple fracture test performed by a Vickers indentation testing machine on thin diamond film. The energy released due to the extension of interface cracks was evaluated by subtracting the energy required for the plastic deformation of the substrate from the total dissipated energy obtained from the load-displacement diagram during the indentation test. This result was compared with the result of fracture test of individual nuclei performed in 1.4.The adhesive strength of thin film obtained by the simple fracture test performed in 3 was compared with the evaluation result given by the ultrasonic angle beam in 2. In addition, by introducing the ab-initio molecular dynamics in which the state of electrons was taken into account, atomic scale adhesion of nuclei was further examined in connection to the ultrasonic transmission characteristics.
1.基于金刚石薄膜在化学气相沉积初期基片上出现的微观核的附着力,研究了金刚石薄膜的附着力。通过在电子显微镜上刮掉这些单个原子核的微观结合强度,成功地评价了它们的微观结合强度。2.对超声波的透射率进行了测试,以找出超声角光束的透过率与薄膜结合强度之间的关系。通过将实验结果与理论模型的结果进行比较,揭示了界面剪切应力传递特性对超声波传输的影响,从而保证了本文提出的超声角波束技术能够定量地评价薄膜的附着力。3.在维氏压痕试验机上对金刚石薄膜进行了简单的断裂试验,对附着力进行了测试。通过从压痕试验期间的载荷-位移图获得的总耗能减去基材塑性变形所需的能量,评估了由于界面裂纹扩展而释放的能量。将这一结果与1.4中单个原子核的断裂试验结果进行了比较。将文献3中的简单断裂试验得到的薄膜的结合强度与文献2中超声角波束的评价结果进行了比较。此外,通过引入考虑电子状态的从头算分子动力学,结合超声传输特性,进一步考察了原子核的原子尺度结合。
项目成果
期刊论文数量(29)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
神谷 庄司(佐藤真樹,坂 真澄,阿部博之): "石英ガラス基板上におけるダイヤモンド薄膜の破壊挙動" 日本機械学会関西支部第72期定時総会講演会 講演論文集. (掲載予定). (1997)
Shoji Kamiya(佐藤真希、坂真澄、阿部博之):《石英玻璃基板上金刚石薄膜的断裂行为》日本机械工程学会关西分会第72届年会论文集(待出版) )(1997)。
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S, Kamiya・S, sato・M, Saka and H, Abe: "Fracture Toughness Estimation of Thin Chemical Vapor Deposition Diamond Films Based on the Spontaneous Fracture Behavior on Quartz Glass Substrates" Journal of Applied Physics. 82. 6056-6061 (1997)
S, Kamiya・S, sato・M, Saka 和 H, Abe:“基于石英玻璃基底上的自发断裂行为的薄化学气相沉积金刚石薄膜的断裂韧性估计”应用物理学杂志 82. 6056-6061(1997 年)。 )
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- 影响因子:0
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S.Kamiya (M.Sato, M.Saka and H.Abe): "Fracture Toughness Estimation of THin Chemical Vapor Deposition Diamond Films Based on the Spontaneous Fracture Behavior on Quartz Glass Substrates" Journal of Applied Physics. 82・12. 6056-6061 (1997)
S.Kamiya(M.Sato、M.Saka 和 H.Abe):“基于石英玻璃基底上的自发断裂行为的薄化学气相沉积金刚石薄膜的断裂韧性估计”应用物理学杂志 82・12。 6061 (1997)
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M, Saka・S, sato and H, Abe: "Quantitative NDE of Diamond Film Adhesion Using an Ultrasonic Angle-Beam Technique" NDT & E International. 30. 305-311 (1997)
M, Saka・S, sato 和 H, Abe:“使用超声波角束技术对金刚石薄膜粘合进行定量 NDE”NDT & E International。 30. 305-311 (1997)
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- 影响因子:0
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T.Kayaba (A.Inoue, M.Saka and H.Abe): "Numerical Simulation of Nucleation of Diamond by Molecular Dynamics" Prepr.of Jpn.Soc.Mech.Eng.(to be published).
T.Kayaba(A.Inoue、M.Saka 和 H.Abe):“分子动力学对金刚石成核的数值模拟”Prepr.of Jpn.Soc.Mech.Eng.(待出版)。
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