Surface Patterning of Aluminum Using Pulsed-YAG Laser
Surface Patterning of Aluminum Using Pulsed-YAG Laser
批准号:
08455326
负责人:
TAKAHASHI Hideaki
金额:
$4.48万
依托单位:
依托单位国家:
日本
项目类别:
Grant-in-Aid for Scientific Research (B)
财政年份:
1996
资助国家:
日本
项目状态:
已结题
起止时间:
1996 至 1998
中文摘要
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英文摘要
Aluminum specimen covered with porous anodic oxide films was irradiated with a pulsed Nd-YAG laser in solutions containing metal ions, and then electro- or electroless- plating was carried out. Fine pattern was produced on an insulating organic board by the successive processes of anodizing, laser irradiation, metal deposition, insulator gluing, and metal substrate dissolution.The main results obtained in this investigation are in the following.1) Reaction during laser irradiationIt was found that laser irradiation causes the anodic oxide film to be removed effectively from the substrate at the laser-irradiated area, and that the film removal can be explained in terms of the laser ablation of the metal substrate. Spot size, D, and line width, W, of laser irradiated area was examined as the functions of laser power, distance between lens and specimen, and focal length of lens, and the D and W was found to be controlled in the range 15- 500 mm.During laser irradiation in solutions contai … More ning Pd2+, Cu2+, and Ni2+ ions, fine particles of metals, Pd, Cu, and Ni, deposited on the surface at the laser-irradiated area, and this was verified by XPS and rest potential measurements. This is due to the redox reaction between metal ions and the aluminum substrate.2) Metal deposition after laser irradiationDuring cathodic polarization of the specimen in the solution containing Cu2+ or Ni2+ ions after laser irradiation lead to the deposition of a dense layer of Cu or Ni only at the film-removed area. The current efficiency for Cu or Ni deposition was about 100 %.Localized electroless plating of Ni-P was also accomplished at the laser-irradiated area by changing the Pb2+ ion concentration in the electroless plating solution. At the initial stage of the Ni-P electroless plating, the fine particles depositing during laser irradiation were observed to act as nuclei of Ni-P deposition. The Pd particles enhanced Ni-P deposition very much, while Cu particles did not show any effect.3) Fine patterning on organic insulating boardBy computer control, fine patterns could be drawn, using Ni and Cu deposition after laser irradiation on aluminum. The patterned specimen was glued on a glass fiber-reinforced epoxy resin board, and the metal substrate was removed by dissolution in NaOH solution. The successive processes showed a possibility of the development of a new technology in the printed wiring board manufacturing industry. Less
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H.Takahashi: "Destruction and Reformation of Anodic oxide Films on Aluminum with Pulsed YAG-laser Irradiation" Textbook of Seminar on Breakdown and Reformation of Passive Films. 34-46 (1998)
H.Takahashi:《脉冲YAG激光照射铝上阳极氧化膜的破坏与改造》钝化膜击穿与改造研讨会教科书。
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通讯作者:
M.Sakairi: "Patterning of Aluminum Surface with Laser Irradiation and Nickel Electrodeposition I.Removal of Anodic Oxide Films by Laser Irradiation" J.Surf.Finishing Soc.Jpn.49. 1220-1226 (1998)
M.Sakairi:“利用激光照射和镍电沉积对铝表面进行图案化 I.利用激光照射去除阳极氧化膜”J.Surf.Finishing Soc.Jpn.49。
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高橋英明他4名: "レーザー照射によるアルミニウムの局部表面処理" 第21回軽金属セミナーテキスト. 17-26 (1997)
Hideaki Takahashi 等 4 人:“激光照射对铝的局部表面处理”第 21 届轻金属研讨会文本 17-26 (1997)。
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坂入正敏: "レーザー照射および局部めっきによるAl表面のパターニング、I. レーザー照射によるアノード酸化皮膜の破壊挙動" 表面技術. 49. 1220-1226 (1998)
Masatoshi Sakairi:“激光照射和局部电镀对铝表面进行图案化,I.激光照射对阳极氧化膜的破坏行为”表面技术。 49. 1220-1226 (1998)
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S.Z.Chu: "Local Deposition of Ni-P Alloy on Aluminum by Laser Irradiation and Electroless-Plating" J.Electrochem.Soc.,. Vol 146.No2. in press (1999)
S.Z.Chu:“通过激光照射和化学镀在铝上局部沉积 Ni-P 合金”J.Electrochem.Soc.,。
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