权益分类	功能权益	普通用户	{{item.name}}会员
{{category.name}}	{{benefitItem.name}}

Development of Manufacturing Technology of Micro Mechano-Electronic Devices by Laser Irradiation / AFM Probe Processing / Electrochemistry

激光辐照/AFM探针加工/电化学微型机电器件制造技术的发展

基本信息

批准号：
11355029
负责人：
TAKAHASHI Hideaki
金额：
$ 22.89万
依托单位：
HOKKAIDO UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
1999
资助国家：
日本
起止时间：
1999 至 2001
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-11355029/
关键词：
micro patterning nano patterning anodizing aluminum laser irradiation AFM mold electroplating 金型

项目摘要

1) Fabrication of Aluminum Mold for Plastic Injection StructuringAluminum mold was fabricated by hard anodizing, laser irradiation, and Ni-P electroless plating. Using the aluminum mold produced, plastic pegs with 20 cm length was obtained with a automatic mold system successfully. In the fabrication procedure, several hundred micrometer thick Ni-P layer was attempted to be deposited only at the laser-irradiated area. It was found that the local deposition of Ni-P is accomplished by forming relatively thick anodic oxide films and then by sealing pores of the oxide films.2) Fabrication of micro pits and grooves by laser irradiation and electrochemical etchingAluminum covered with anodic oxide films was irradiated with a pulsed YAG-laser in NaCl solutions on open circuit or during anodic polarization. The laser irradiation on open circuit allowed the production of cone shaped pores, while the laser irradiation during anodic polarization produced hemispherical pores. Micro grooves with 10 … More to 50 micrometer diameter was fabricated successfully by formation of barrier anodic oxide films, laser irradiation, formation of porous anodic oxide films at the laser irradiated area, and dissolution of anodic oxide films.3) Fabrication of nano groves by AFM probe processingAluminum covered with thin anodic oxide films was scratched with AFM probes in solutions. The grooves with several hundred nanometer width were formed successfully on aluminum. The processing rate was found to depend strongly on the solution pH and chemical composition.4) Fabrication of micro wires by laser irradiation of the aluminum rodAluminum rods with 2 - 5mm diameter was anodized to form porous anodic oxide films and then irradiated with a pulsed YAG laser in Ni^<2+> solutions. During laser irradiation, the aluminum rod was rotated and moved upward at a steady rate. After laser irradiation, the rod was cathodically polarized to deposit Ni at the laser irradiated area, and then immesed in a NaOH solution to dissolve the aluminum substrate. A nickel spiral wire with 50 micrometer width could be obtained successfully. Less

1)注塑结构件铝模具的制备铝模具采用硬质阳极氧化、激光照射、Ni-P化学镀等工艺制备。利用所生产的铝模，利用自动模制系统成功地获得了长度为20厘米的塑料销。在制备过程中，仅在激光照射区沉积了数百微米厚的Ni-P层。结果表明，Ni-P的局部沉积是通过形成较厚的阳极氧化膜，然后封闭氧化膜的孔隙来完成的。用脉冲yag激光在NaCl溶液中开路或阳极极化条件下辐照覆盖有阳极氧化膜的铝。开路激光照射可形成锥形孔，阳极极化激光照射可形成半球形孔。采用阻挡阳极氧化膜的形成、激光照射、在激光照射区域形成多孔阳极氧化膜、溶解阳极氧化膜等方法，成功制备了直径在10 ~ 50微米以上的微沟槽。3)原子力显微镜探针加工制备纳米格罗夫用原子力显微镜探针在溶液中划伤覆盖有阳极氧化薄膜的铝。成功地在铝上形成了数百纳米宽的凹槽。研究发现，处理速度与溶液pH和化学成分有很大关系。将直径为2 ~ 5mm的铝棒阳极氧化形成多孔阳极氧化膜，然后用脉冲YAG激光在Ni^<2+>溶液中辐照。在激光照射过程中，铝棒以稳定的速度旋转并向上移动。激光照射后，将棒阴极极化，在激光照射区域沉积Ni，然后浸泡在NaOH溶液中溶解铝基。成功地获得了宽度为50微米的镍螺旋线。少