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Development of Manufacturing Technology of Micro Mechano-Electronic Devices by Laser Irradiation / AFM Probe Processing / Electrochemistry

激光辐照/AFM探针加工/电化学微型机电器件制造技术的发展

基本信息

批准号：
11355029
负责人：
TAKAHASHI Hideaki
金额：
$ 22.89万
依托单位：
HOKKAIDO UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
1999
资助国家：
日本
起止时间：
1999 至 2001
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-11355029/
关键词：
micro patterning nano patterning anodizing aluminum laser irradiation AFM mold electroplating 金型

项目摘要

1) Fabrication of Aluminum Mold for Plastic Injection StructuringAluminum mold was fabricated by hard anodizing, laser irradiation, and Ni-P electroless plating. Using the aluminum mold produced, plastic pegs with 20 cm length was obtained with a automatic mold system successfully. In the fabrication procedure, several hundred micrometer thick Ni-P layer was attempted to be deposited only at the laser-irradiated area. It was found that the local deposition of Ni-P is accomplished by forming relatively thick anodic oxide films and then by sealing pores of the oxide films.2) Fabrication of micro pits and grooves by laser irradiation and electrochemical etchingAluminum covered with anodic oxide films was irradiated with a pulsed YAG-laser in NaCl solutions on open circuit or during anodic polarization. The laser irradiation on open circuit allowed the production of cone shaped pores, while the laser irradiation during anodic polarization produced hemispherical pores. Micro grooves with 10 … More to 50 micrometer diameter was fabricated successfully by formation of barrier anodic oxide films, laser irradiation, formation of porous anodic oxide films at the laser irradiated area, and dissolution of anodic oxide films.3) Fabrication of nano groves by AFM probe processingAluminum covered with thin anodic oxide films was scratched with AFM probes in solutions. The grooves with several hundred nanometer width were formed successfully on aluminum. The processing rate was found to depend strongly on the solution pH and chemical composition.4) Fabrication of micro wires by laser irradiation of the aluminum rodAluminum rods with 2 - 5mm diameter was anodized to form porous anodic oxide films and then irradiated with a pulsed YAG laser in Ni^<2+> solutions. During laser irradiation, the aluminum rod was rotated and moved upward at a steady rate. After laser irradiation, the rod was cathodically polarized to deposit Ni at the laser irradiated area, and then immesed in a NaOH solution to dissolve the aluminum substrate. A nickel spiral wire with 50 micrometer width could be obtained successfully. Less

1）用于塑料注射结构的铝模具的制造铝模具通过硬质阳极氧化、激光照射和Ni-P化学镀来制造。使用所生产的铝模具，通过自动模具系统成功获得了长度为20厘米的塑料钉。在制造过程中，尝试仅在激光照射区域沉积数百微米厚的 Ni-P 层。研究发现，Ni-P的局部沉积是通过形成较厚的阳极氧化膜，然后封闭氧化膜的孔隙来实现的。2)激光辐照和电化学刻蚀微凹坑和凹槽的制作在开路或阳极极化过程中，在氯化钠溶液中用脉冲YAG激光照射阳极氧化膜覆盖的铝。开路激光照射可产生锥形孔，而阳极极化期间的激光照射可产生半球形孔。通过形成阻挡阳极氧化膜、激光照射、在激光照射区域形成多孔阳极氧化膜以及溶解阳极氧化膜，成功制造了直径为 10 … More 至 50 微米的微凹槽。 3）通过 AFM 探针加工制备纳米凹槽用 AFM 探针在覆盖有薄阳极氧化膜的铝上进行划痕解决方案。在铝上成功形成了数百纳米宽的凹槽。发现加工速率很大程度上取决于溶液的pH值和化学成分。4)通过铝棒激光照射制造微丝直径2-5mm的铝棒被阳极氧化以形成多孔阳极氧化膜，然后在Ni^2+溶液中用脉冲YAG激光照射。在激光照射期间，铝棒旋转并以稳定的速度向上移动。激光照射后，棒被阴极极化以在激光照射区域沉积Ni，然后浸入NaOH溶液中以溶解铝基板。成功获得了宽度为50微米的镍螺旋线。较少的