Development of Manufacturing Technology of Micro Mechano-Electronic Devices by Laser Irradiation / AFM Probe Processing / Electrochemistry

点击翻译按钮获取中文摘要

1) Fabrication of Aluminum Mold for Plastic Injection StructuringAluminum mold was fabricated by hard anodizing, laser irradiation, and Ni-P electroless plating. Using the aluminum mold produced, plastic pegs with 20 cm length was obtained with a automatic mold system successfully. In the fabrication procedure, several hundred micrometer thick Ni-P layer was attempted to be deposited only at the laser-irradiated area. It was found that the local deposition of Ni-P is accomplished by forming relatively thick anodic oxide films and then by sealing pores of the oxide films.2) Fabrication of micro pits and grooves by laser irradiation and electrochemical etchingAluminum covered with anodic oxide films was irradiated with a pulsed YAG-laser in NaCl solutions on open circuit or during anodic polarization. The laser irradiation on open circuit allowed the production of cone shaped pores, while the laser irradiation during anodic polarization produced hemispherical pores. Micro grooves with 10 … More to 50 micrometer diameter was fabricated successfully by formation of barrier anodic oxide films, laser irradiation, formation of porous anodic oxide films at the laser irradiated area, and dissolution of anodic oxide films.3) Fabrication of nano groves by AFM probe processingAluminum covered with thin anodic oxide films was scratched with AFM probes in solutions. The grooves with several hundred nanometer width were formed successfully on aluminum. The processing rate was found to depend strongly on the solution pH and chemical composition.4) Fabrication of micro wires by laser irradiation of the aluminum rodAluminum rods with 2 - 5mm diameter was anodized to form porous anodic oxide films and then irradiated with a pulsed YAG laser in Ni^<2+> solutions. During laser irradiation, the aluminum rod was rotated and moved upward at a steady rate. After laser irradiation, the rod was cathodically polarized to deposit Ni at the laser irradiated area, and then immesed in a NaOH solution to dissolve the aluminum substrate. A nickel spiral wire with 50 micrometer width could be obtained successfully. Less